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1. 发明申请

WO2005094491A3 SPATIAL LIGHT MODULATOR WITH ROBUST MIRROR SUBSTRATE CONDITION 审中-公开
标题翻译：具有稳定的镜面基板状态的空间光调制器
公开(公告)号：WO2005094491A3
公开(公告)日：2006-05-26
申请号：PCT/US2005009692
申请日：2005-03-24
申请人： SILICON LIGHT MACHINES CORP , PAYNE ALEXANDER P , HUNTER JAMES A , AMM DAVID T
发明人： PAYNE ALEXANDER P , HUNTER JAMES A , AMM DAVID T
IPC分类号： H01L29/22 , G02B26/08 , H01L29/227 , H01L29/24 , H01L33/00
CPC分类号： G02B26/0808
摘要： A light modulator and a method of manufacturing the same are provided having a substrate with reflectivity enhancing layers formed thereon. The layers include at least a top surface for receiving incident light, a first layer (210) overlying the substrate , and a second layer (208) between the top surface and the first layer, the second layer overlying and abbuting the first layer. The second layer has a predetermined thickness (510) selected in relation to an index of refraction of the second layer and to a wavelenght of the incident light such that the light (506) reflecting off an interface (505) between the first and second layers constructively interferes with light (504) reflected from the top surface. Preferably, the first layer also has a predetermined thickness (512) selected such that the light (508) reflecting off an interface (507) between the first layer and the substrate constructively interferes with light (504) reflected from the top surface.
摘要翻译：提供一种光调制器及其制造方法，具有在其上形成有反射增强层的基板。这些层至少包括用于接收入射光的顶表面，覆盖衬底的第一层（210）和在顶表面和第一层之间的第二层（208），第二层覆盖并吸收第一层。第二层具有相对于第二层的折射率和入射光的波长选择的预定厚度（510），使得从第一层和第二层之间的界面（505）反射的光（506）建设性地干扰从顶表面反射的光（504）。优选地，第一层还具有选择的预定厚度（512），使得从第一层和衬底之间的界面（507）反射的光（508）构造地干扰从顶表面反射的光（504）。

2. 发明申请

WO2005098462A3 PROBE CARD AND METHOD FOR CONSTRUCTING SAME 审中-公开
标题翻译：探针卡及其构造方法
公开(公告)号：WO2005098462A3
公开(公告)日：2006-08-17
申请号：PCT/US2005009984
申请日：2005-03-24
申请人： CYPRESS SEMICONDUCTOR CORP , NULTY JAMES E , HUNTER JAMES A , HERRERA ALEXANDER J
发明人： NULTY JAMES E , HUNTER JAMES A , HERRERA ALEXANDER J
IPC分类号： G01R31/26 , G01R1/073
CPC分类号： G01R1/07314 , G01R1/0735 , G01R1/07371 , Y10T29/4913 , Y10T29/49147 , Y10T29/49153 , Y10T29/49155
摘要： In one embodiment, a probe card for testing dice on a wafer (240) includes a substrate (120), a number of cantilevers (122) formed on a surface thereof, and a number of probes (128) extending from unsupported ends of the cantilevers. The unsupported ends of the cantilevers (122) project over cavities (124) on the surface of the substrate (120). The probes (128) have tips to contact pads (241) on the dice under test. The probe card may include a compressive layer (130) above the surface of the substrate (120) with a number of holes through which the probes (128) extend.
摘要翻译：在一个实施例中，用于在晶片（240）上测试骰子的探针卡包括基底（120），在其表面上形成的多个悬臂（122）和从所述基底（120）的未支撑的端部延伸的多个探针（128）悬臂。悬臂（122）的未支撑的端部突出在衬底（120）的表面上的空腔（124）上。探针（128）具有在被测试的骰子上接触垫（241）的尖端。探针卡可以包括在衬底（120）的表面上方的具有多个探针（128）所延伸的孔的压缩层（130）。

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