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1. 发明申请

WO2010016649A1 SUBSTRATE-PROCESSING APPARATUS AND METHOD OF TRANSFERRING SUBSTRATE IN THE SAME 审中-公开
标题翻译：基板处理装置及其中的基板传输方法
公开(公告)号：WO2010016649A1
公开(公告)日：2010-02-11
申请号：PCT/KR2009/001747
申请日：2009-04-06
申请人： SEMES CO., LTD. , HONG, Sang-Seok , KIM, Hyun-Woo
发明人： HONG, Sang-Seok , KIM, Hyun-Woo
IPC分类号： H01L21/677
CPC分类号： H01L21/67781
摘要： Provided is a substrate-processing apparatus including a transfer member loading and taking out a substrate to and from a storage member, and a control unit controlling the transfer member. The transfer member includes a plurality of transfer arms and an arm-driving part moving the respective transfer arms horizontally, and substrates are loaded on the respective transfer arms. The control unit controls a movement velocity and a position of the transfer member and compares movement velocity profiles of the transfer arms, so as to control movement velocities of the respective transfer arms. Accordingly, the simultaneously driven transfer arms simultaneously arrive at target points, and thus the substrate-processing apparatus reduces transfer time and improves productivity.
摘要翻译：提供了一种基板处理装置，其包括将存储部件加载和取出基板的转印部件和控制转印部件的控制部。转印构件包括多个转印臂和臂驱动部分，水平地移动各个转印臂，并且基板被装载在相应的转印臂上。控制单元控制传送构件的移动速度和位置，并且比较传送臂的移动速度分布，以便控制各传送臂的移动速度。因此，同时驱动的传送臂同时到达目标点，因此基板处理装置减少传送时间并提高生产率。

2. 发明申请

WO2010032910A1 SUBSTRATE-TRANSFERRING DEVICE, SUBSTRATE-PROCESSING APPARATUS HAVING THE SAME, AND METHOD OF TRANSFERRING SUBSTRATE USING THE SUBSTRATE-TRANSFERRING DEVICE 审中-公开
标题翻译：基板传输装置，具有该基板的基板处理装置以及使用基板传送装置传送基板的方法
公开(公告)号：WO2010032910A1
公开(公告)日：2010-03-25
申请号：PCT/KR2009/001752
申请日：2009-04-06
申请人： SEMES CO., LTD. , KIM, Dae-Ho , HONG, Sang-Seok , PARK, Joo-Jib , PARK, Sun-Yong
发明人： KIM, Dae-Ho , HONG, Sang-Seok , PARK, Joo-Jib , PARK, Sun-Yong
IPC分类号： H01L21/687
CPC分类号： H01L21/67781 , H01L21/67303 , H01L21/67766
摘要： Provided is a substrate-transferring device including a plurality of horizontally movable arms, a body, and a plurality of guides. The plurality of horizontally movable arms, each is adapted for loading a substrate. The body is coupled to the arms and moving the respective arms horizontally. The plurality of guides are fixed to the body, and disposed respectively behind the arms, and guide positions of substrates loaded on the respectively corresponding arms when the arms move rearward. Accordingly, the substrate-transferring device prevents a substrate from being removed while transferring the substrate and transfers a substrate stably, so as to improve transfer efficiency.
摘要翻译：提供一种基板转印装置，其包括多个水平可移动的臂，主体和多个引导件。多个可水平移动的臂各自适于装载基底。主体联接到臂并水平移动相应的臂。当臂向后移动时，多个引导件固定到主体并且分别设置在臂后面，以及装载在分别对应的臂上的基板的引导位置。因此，基板转印装置防止在转印基板并且稳定地传送基板时去除基板，从而提高转印效率。

3. 发明申请

WO2010016650A1 SUBSTRATE-PROCESSING APPARATUS AND METHOD OF TRANSFERRING SUBSTRATE IN THE SAME 审中-公开
标题翻译：基板处理装置及其中的基板传输方法
公开(公告)号：WO2010016650A1
公开(公告)日：2010-02-11
申请号：PCT/KR2009/001836
申请日：2009-04-09
申请人： SEMES CO., LTD. , KIM, Kyung-Mo , HONG, Sang-Seok
发明人： KIM, Kyung-Mo , HONG, Sang-Seok
IPC分类号： H01L21/677
CPC分类号： H01L21/67781
摘要： Provided is a substrate-processing apparatus including a plurality of process chambers, a buffer unit, and a transfer member. The transfer member transfers the substrate between the process chambers and the buffer unit, and collects the substrates processed in at least two of the process chambers where processes are simultaneously finished, to transfer the processed substrates to the buffer unit at once. Accordingly, a number of times during which the transfer member transfers substrates is decreased, so that the substrate-processing apparatus reduces the process time and improves the productivity.
摘要翻译：提供了包括多个处理室，缓冲单元和转印构件的基板处理设备。传送构件在处理室和缓冲单元之间传送衬底，并且收集在同时完成处理的至少两个处理室中处理的衬底，以将处理的衬底一次传送到缓冲单元。因此，传送构件传送基板的次数减少，使得基板处理装置减少处理时间并提高生产率。

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