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    • 1. 发明申请
    • SPINEL SUBSTRATE AND HETEROEPITAXIAL GROWTH OF III-V MATERIALS THEREON
    • 其中III-V材料的螺旋体基体和异相生长
    • WO2003084886A1
    • 2003-10-16
    • PCT/US2003/010147
    • 2003-03-31
    • SAINT-GOBAIN CERAMICS & PLASTICS, INC.KOKTA, Milan, R.ONG, Hung T.
    • KOKTA, Milan, R.ONG, Hung T.
    • C03B15/00
    • C30B15/00C30B29/26Y10T428/12076Y10T428/12528Y10T428/12667
    • A spinel composition of the invention includes a monocrystalline lattice having a formula Mg 1-w α w A1 x-y β y O z , where w is greater than 0 and less than 1, x is greater than 2 and less than about 8, y is less than x, z is equal to or greater than 4 and equal to or less than about 13, α is a divalent cationic element having an ionic radius greater than divalent magnesium, and β is a trivalent cationic element having an ionic radius greater than trivalent aluminum. The monocrystalline lattice has tetrahedral positions and octahedral positions, and most of the magnesium and α occupy tetrahedral positions. In one embodiment, the molar ratio of aluminum to the amount of magnesium, α and β can be controlled during growth of the monocrystalline lattice thereby forming a spinel substrate suitable for heteroepitaxial growth of III-V materials. A method of the invention, includes forming a monocrystalline lattice of spinel composition. A composition includes the spinel composition layer and a III-V layer at the surface of the spinel layer. A method of forming a composite includes depositing the III-V layer onto the surface of the spinel composition using heteroepitaxial techniques.
    • 本发明的尖晶石组合物包括具有式Mg1-w&agr; wA1x-y&bgr; yOz的单晶晶格,其中w大于0且小于1,x大于2且小于约8,y小于x z等于或大于4且等于或小于约13,α是具有大于二价镁的离子半径的二价阳离子元素,β是具有大于三价铝的离子半径的三价阳离子元素。 单晶晶格具有四面体位置和八面体位置,大多数镁和α占据四面体位置。 在一个实施方案中,可以在单晶晶格生长期间控制铝与镁,α和β的量的摩尔比,从而形成适用于III-V材料的异质外延生长的尖晶石衬底。 本发明的方法包括形成尖晶石组合物的单晶晶格。 组合物包括尖晶石组合物层和在尖晶石层的表面处的III-V层。 形成复合材料的方法包括使用异质外延技术将III-V层沉积到尖晶石组合物的表面上。