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1. 发明申请

WO1997035805A1 METHOD AND APPARATUS FOR PURIFYING HYDROGEN GAS 审中-公开
标题翻译：用于净化氢气的方法和装置
公开(公告)号：WO1997035805A1
公开(公告)日：1997-10-02
申请号：PCT/US1997004655
申请日：1997-03-21
申请人： SAES PURE GAS, INC. , LORIMAR, D'Arcy, H.
发明人： SAES PURE GAS, INC.
IPC分类号： C01B03/50
CPC分类号： B01D53/0431 , B01D53/22 , B01D53/229 , B01D2253/112 , B01D2253/25 , B01D2256/16 , B01D2257/102 , B01D2257/108 , B01D2257/7025 , B01D2258/0216 , B01D2259/403 , B01D2259/4525 , B82Y30/00 , C01B3/0031 , C01B3/505 , C01B2203/0405 , C01B2203/048 , Y02C20/20 , Y02E60/327 , Y02P20/156
摘要： A method and apparatus for providing substantially pure hydrogen gas from a mixture of hydrogen and gaseous contaminants includes passing a gaseous mixture containing hydrogen gas and gaseous impurities through a purifier (204) to form substantially pure hydrogen gas which is stored in a porous storage material including a getter material (210). The substantially pure hydrogen gas can be released from the porous storage matrix as desired. Preferably the purifier and porous storage matrix are separated by a thermally insulating matrix (208). The apparatuses can be combined in a serial configuration to provide a stream of substantially pure hydrogen gas at a substantially constant pressure.
摘要翻译：用于从氢气和气态污染物的混合物提供基本上纯的氢气的方法和装置包括将含有氢气和气态杂质的气态混合物通过净化器（204），以形成基本上纯的氢气，该氢气储存在多孔储存材料中，包括吸气材料（210）。基本上纯的氢气可根据需要从多孔储存基质中释放出来。优选地，净化器和多孔存储矩阵由隔热矩阵（208）分离。这些设备可以以串联配置组合以提供基本上恒定压力的基本上纯的氢气流。

2. 发明申请

WO1994019688A1 METHOD AND APPARATUS FOR PREDICTING END-OF-LIFE OF A CONSUMABLE IN A FLUID PURIFICATION SYSTEM 审中-公开
标题翻译：用于预测流体净化系统中消耗的终止寿命的方法和装置
公开(公告)号：WO1994019688A1
公开(公告)日：1994-09-01
申请号：PCT/US1994001951
申请日：1994-02-25
申请人： SAES PURE GAS, INC.
发明人： SAES PURE GAS, INC. , LORIMER, D'Arcy, H.
IPC分类号： G01N33/00
CPC分类号： B01D53/30 , B01D53/0454
摘要： A method for predicting end-of-life of a system consumable in a fluid purification system (50) characterized by the steps of (a) coupling a model consumable (62) to the fluid purification system which has comparable characteristics but substantially less time capacity than the system consumable; (b) diverting a portion of an unpurified fluid which could otherwise flow into the system consumable into the model consumable; and (c) analyzing the model consumable to predict the end-of-life of the system consumable. Preferably, the time capacity of the model consumable to remove impurities from the fluid is a small fraction, e.g. 25 % - 50 %, of the capacity of the system consumable. A fluid purification system of the present invention is characterized by an inlet (70), an outlet (72), a system consumable (52) coupled between the inlet and the outlet, a model consumable (62) having comparable characteristics but substantially less time capacity than the system consumable, and a diverting mechanism (108) coupled between the inlet and the model consumable for diverting a portion of an unpurified fluid to model consumable. The diverting mechanism preferably includes a mass flow meter (MFM) (60) coupled in-line with the system consumable which is coupled to and controls a mass flow controller (MFC) (64) which is coupled in-line with the model consumable. The model consumable is analyzed to predict the end-of-life of the system consumable.
摘要翻译：一种用于预测流体净化系统（50）中的消耗品的寿命终止的方法，其特征在于以下步骤：（a）将模型耗材（62）耦合到具有相当的特性但是显着更少的时间容量的流体净化系统比系统消耗; （b）将一部分未净化的流体转移到另一个流入系统中的消耗品，和（c）分析消耗品模型以预测系统消耗品的使用寿命。优选地，耗用于从流体中去除杂质的模型的时间容量是小部分，例如， 25％ - 50％的系统消耗能力。本发明的流体净化系统的特征在于入口（70），出口（72），联接在入口和出口之间的系统消耗品（52），具有相当特征但显着较少时间的模型耗材（62）以及耦合在入口和模型之间的转向机构（108），用于将未净化流体的一部分转向模型消耗品。转向机构优选地包括质量流量计（MFM）（60），所述质量流量计（MFM）（60）与系统消耗品成对联接，所述质量流量计（60）与所述系统消耗品联接并且控制与所述模型消耗品成对准的质量流量控制器（MFC）（64）。分析模型耗材以预测系统耗材的使用寿命。

3. 发明申请

WO1997035652A1 COMBINATION CRYOPUMP/GETTER PUMP AND METHOD FOR REGENERATING SAME 审中-公开
标题翻译：组合CRYOPUMP / GETTER泵和再生器的方法
公开(公告)号：WO1997035652A1
公开(公告)日：1997-10-02
申请号：PCT/US1997004974
申请日：1997-03-25
申请人： SAES PURE GAS, INC. , LORIMER, D'Arcy, H.
发明人： SAES PURE GAS, INC.
IPC分类号： B01D08/00
CPC分类号： F04B37/02 , F04B37/08 , Y10S417/901
摘要： A combination cryopump/getter pump (50) including a cryopump section (52) having a cryopump inlet (76), a getter pump section (54) having a getter pump inlet (86), and a mechanism (60) for coupling the cryopump section (52) and the getter pump section (54) to a single port (58) of a process chamber to be evacuated. Preferably, a cylindrical getter pump section (54) surrounds a cylindrical cryopump section (52). Preferably, the cryopump section (52) and the getter pump section (54) are coupled to the common port (58) of the process chamber by a gate valve mechanism (60). In one embodiment, the gate valve mechanism (60) isolates the cryopump inlet (76) and the getter pump inlet (86) when in a closed position. In another embodiment, the gate valve mechanism (60) does not isolate the cryopump inlet (76) and the getter pump inlet (86) when in a closed position. Preferably, thermal insulation (78) is provided between the getter pump section (54) and the cryopump section (52) to thermally isolate the two sections. The cryopump section preferably includes both a 15 DEG K array (72) and an 80 DEG K array (70a-d).
摘要翻译：一种组合的低温泵/吸气泵（50），包括具有低温泵入口（76）的低温泵部分（52），具有吸气泵入口（86）的吸气泵部分（54）和用于将低温泵部分（52）和吸气泵部分（54）连接到待抽真空的处理室的单个端口（58）。优选地，圆柱形吸气泵部分（54）围绕圆柱形低温泵部分（52）。优选地，低温泵部分（52）和吸气泵部分（54）通过闸阀机构（60）联接到处理室的公共端口（58）。在一个实施例中，当处于关闭位置时，闸阀机构（60）隔离低温泵入口（76）和吸气泵入口（86）。在另一个实施例中，当处于关闭位置时，闸阀机构（60）不隔离低温泵入口（76）和吸气泵入口（86）。优选地，在吸气泵部分（54）和低温泵部分（52）之间提供热绝缘（78）以热隔离两个部分。低温泵部分优选地包括15°K阵列（72）和80°K阵列（70a-d）。

4. 发明申请

WO1996017171A2 GETTER PUMP MODULE AND SYSTEM 审中-公开
标题翻译：进水泵模块和系统
公开(公告)号：WO1996017171A2
公开(公告)日：1996-06-06
申请号：PCT/US1995015598
申请日：1995-11-30
申请人： SAES PURE GAS, INC.
发明人： SAES PURE GAS, INC. , KRUEGER, Gordon, P. , LORIMER, D'Arcy, H. , CARELLA, Sergio , CONTE, Andrea
IPC分类号： F04B37/02
CPC分类号： C23C14/54 , C23C14/56 , C23C14/564 , F04B37/02 , F04B37/08
摘要： A getter pump module includes a number of getter disks provided with axial holes, and a heating element which extends through the holes to support and heat the getter disks. The getter disks are preferably solid, porous, sintered getter disks that are provided with a titanium hub that engages the heating element. A thermally isolating shield is provided to shield the getter disks from heat sources and heat sinks within the chamber, and to aid in the rapid regeneration of the getter disks. In certain embodiments of the present invention, the heat shields are fixed, and in other embodiments the heat shield is movable. In one embodiment, a focus shield is provided to reflect thermal energy to the getter material from an external heater element and provide high pumping speeds. An embodiment of the present invention also provides for a rotating getter element to enhance getter material utilization.
摘要翻译：吸气泵模块包括设置有轴向孔的多个吸气盘，以及延伸穿过孔以加热吸气盘的加热元件。吸气盘优选是固体，多孔，烧结的吸气剂盘，其具有与加热元件接合的钛毂。提供了一种隔热屏蔽件，用于屏蔽吸气剂盘从室内的热源和散热器，并帮助吸气剂盘的快速再生。在本发明的某些实施例中，隔热板是固定的，并且在其它实施例中，隔热罩是可移动的。在一个实施例中，提供聚焦屏蔽以将来自外部加热器元件的吸热材料的热能反射并提供高的泵送速度。本发明的一个实施方案还提供了一种旋转吸气剂元件以增强吸气剂材料的利用。

5. 发明申请

WO1996013620A1 IN SITU GETTER PUMP SYSTEM AND METHOD 审中-公开
标题翻译：在现场泵系统和方法
公开(公告)号：WO1996013620A1
公开(公告)日：1996-05-09
申请号：PCT/US1995014154
申请日：1995-10-30
申请人： SAES PURE GAS, INC.
发明人： SAES PURE GAS, INC. , LORIMER, D'Arcy, H. , KRUEGER, Gordon, P.
IPC分类号： C23C14/56
CPC分类号： C23C14/564 , C23C14/54 , C23C14/56 , F04B37/02 , F04B37/08
摘要： A wafer processing system including a processing chamber, a low pressure pump coupled to the processing chamber for pumping noble and non-noble gases, a valve mechanism coupling a source of noble gas to the processing chamber, an in situ getter pump disposed within the processing chamber which pumps certain non-noble gases during the flow of the noble gas into the chamber, and a processing mechanism for processing a wafer disposed within the processing chamber. Preferably, the in situ getter pump can be operated at a number of different temperatures to preferentially pump different species of gas at those temperatures. A gas analyzer is used to automatically control the temperature of the getter pump to control the species of gases that are pumped from the chamber. A method for processing a wafer of the present invention includes the steps of placing a wafer within a processing chamber and sealing the chamber, flowing a noble gas into the chamber while simultaneously pumping the chamber with an external low pressure pump and with an in situ getter pump disposed within the chamber which pumps non-noble gases, and processing the wafer within the chamber while the noble gas continues to flow. The method also preferably includes the steps of monitoring the composition of the gas within the chamber and controlling the temperature of the getter material based upon the analysis of the composition.
摘要翻译：一种晶片处理系统，包括处理室，耦合到用于泵送贵重和非惰性气体的处理室的低压泵，将惰性气体源耦合到处理室的阀机构，设置在处理中的原位吸气泵在惰性气体流入室期间泵送某些非惰性气体的腔室，以及用于处理设置在处理室内的晶片的处理机构。优选地，原位吸气泵可以在多个不同温度下操作，以在那些温度下优先泵送不同种类的气体。气体分析仪用于自动控制吸气泵的温度，以控制从腔室泵送的气体种类。本发明的晶片的处理方法包括以下步骤：将晶片放置在处理室内并密封该腔室，将惰性气体流入腔室，同时用外部低压泵泵送腔室，并使用原位吸气剂设置在室内的泵，其泵送非惰性气体，并且在惰性气体继续流动的同时在室内处理晶片。该方法还优选包括以下步骤：基于组合物的分析来监测室内气体的组成并控制吸气剂材料的温度。

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