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    • 2. 发明申请
    • DEVICE FOR OPTICAL DETERMINATION OF LOW-ORDER ERRORS IN SHAPE
    • 用于光学确定形状中的低阶错误的装置
    • WO8604676A2
    • 1986-08-14
    • PCT/DE8600037
    • 1986-02-05
    • RODENSTOCK OPTIK GDAIMLER BENZ AG
    • RAU NORBERTHUEBNER GERDSTAIGER WOLFGANGBRODMANN RAINERGERSTORFER OSKAR
    • G01B11/26G01B11/30G01N21/88G01N21/89G01N21/892G01N21/952
    • G01B11/303G01N21/88G01N21/952
    • A device for the optical determination of low-order errors in shape, for example unevenness. The device comprises a light source (1), the light of which scans the body to be examined, and a light-receiving system (5) for the light reflected from the body (4). The device is characterized by the fact that the light-receiving system (5) consits of a plurality of light-receiving elements arranged in the form of lines, and by the fact that an evaluation unit determines the inclination angle of the scanned surface element of the body on the basis of all output signals of the light-receiving elements. This system offers the remarkable advantage that it is possible to measure shifts in the focus of the reflected light beam which are essentially under the width of a light-receiving element. Furthermore, the measurement result is virtually unaffected by higher-order deviations in shape, such as roughness etc.
    • 用于光学确定形状的低阶误差的装置,例如不均匀性。 该装置包括光源(1),其光线扫描被检体,以及用于从身体(4)反射的光的光接收系统(5)。 该装置的特征在于,光接收系统(5)包含以线的形式布置的多个光接收元件,以及评估单元确定扫描表面元件的倾斜角度 基于光接收元件的所有输出信号的身体。 该系统提供了显着的优点,即可以测量基本上在光接收元件的宽度下的反射光束的焦点的偏移。 此外,测量结果几乎不受高阶偏差的影响,如粗糙度等。