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1. 发明申请

WO2018089502A9 METHOD, SYSTEM AND DEVICE FOR DELIVERY OF PROCESS GAS 审中-公开
公开(公告)号：WO2018089502A9
公开(公告)日：2018-05-17
申请号：PCT/US2017/060650
申请日：2017-11-08
申请人： RASIRC, INC.
发明人： ALVAREZ, Daniel , HOLMES, Russell , SPIEGELMAN, Jeffrey , HEINLEIN, Edward , RAMOS, Christopher , TRAMMEL, Jeremiah
IPC分类号： B01D19/00 , B01D63/00 , B01D63/06
摘要： A method and chemical delivery system and device are provided. One method useful in the present invention includes contacting a non-aqueous hydrazine solution with a carrier gas and/or vacuum and delivering a substantially dry gas stream comprising hydrazine to a critical process or application. Also disclosed herein are methods of forming nitrogen-containing thin films by atomic layer deposition using hydrazine gas from a non-aqueous hydrazine solution.

2. 发明申请

WO2018102139A1 METHOD, SYSTEM, AND APPARATUS FOR INHIBITING DECOMPOSITION OF HYDROGEN PEROXIDE IN GAS DELIVERY SYSTEMS 审中-公开
公开(公告)号：WO2018102139A1
公开(公告)日：2018-06-07
申请号：PCT/US2017/061950
申请日：2017-11-16
申请人： RASIRC, INC.
发明人： RAMOS, Christopher , HEINLEIN, Edward , WEBB, Sean , SPIEGELMAN, Jeffrey , HOLMES, Russell , ALVAREZ, Daniel
IPC分类号： A61C17/00
CPC分类号： C01B15/01 , A61C19/066
摘要： Provided herein are methods, systems, and apparatus for inhibiting decomposition of hydrogen peroxide gas through use of surface modification of production and delivery components.

3. 发明申请

WO2018089502A1 METHOD, SYSTEM AND DEVICE FOR DELIVERY OF PROCESS GAS 审中-公开
标题翻译：用于输送过程气体的方法，系统和装置
公开(公告)号：WO2018089502A1
公开(公告)日：2018-05-17
申请号：PCT/US2017/060650
申请日：2017-11-08
申请人： RASIRC, INC.
发明人： ALVAREZ, Daniel , HOLMES, Russell , SPIEGELMAN, Jeffrey , HEINLEIN, Edward , RAMOS, Christopher , TRAMMEL, Jeremiah
IPC分类号： B01D19/00 , B01D63/00 , B01D63/06
CPC分类号： B01D19/0005 , B01D19/00 , B01D19/0031 , B01D19/0036 , B01D19/0042 , B01D19/0063 , B01D2325/42 , C01B21/00 , C01B21/068 , C01B21/076 , C01B21/16
摘要： A method and chemical delivery system and device are provided. One method useful in the present invention includes contacting a non-aqueous hydrazine solution with a carrier gas and/or vacuum and delivering a substantially dry gas stream comprising hydrazine to a critical process or application. Also disclosed herein are methods of forming nitrogen-containing thin films by atomic layer deposition using hydrazine gas from a non-aqueous hydrazine solution.
摘要翻译：提供了一种方法和化学输送系统和装置。可用于本发明的一种方法包括使非水肼溶液与载气和/或真空接触，并将包含肼的基本干燥的气流输送至关键过程或应用。本文还公开了使用来自非水肼溶液的肼气体通过原子层沉积形成含氮薄膜的方法。

4. 发明申请

WO2017027581A1 METHODS AND SYSTEMS FOR GENERATING PROCESS GASES 审中-公开
标题翻译：用于产生过程气体的方法和系统
公开(公告)号：WO2017027581A1
公开(公告)日：2017-02-16
申请号：PCT/US2016/046334
申请日：2016-08-10
申请人： RASIRC, INC.
发明人： SPIEGELMAN, Jeffrey , SHEPHERD, Douglas , HOLMES, Russell, J. , SHAMSI, Zohreh
IPC分类号： C23C16/448
CPC分类号： C23C16/4481
摘要： Methods for the gas-phase delivery of gases, such as process gases, from the gas phase of a multicomponent source liquid are provided. The methods are generally directed to the generation of process gases having mass flow rates which are proportional to the input power delivered to the multicomponent source liquid containers. The methods may be used to deliver process gases to critical process applications.
摘要翻译：提供了从多组分源液体的气相中气相递送气相（例如工艺气体）的方法。该方法通常涉及产生具有与输送到多组分源液体容器的输入功率成比例的质量流量的工艺气体。这些方法可用于将工艺气体输送到关键过程应用中。

5. 发明申请

WO2016065132A1 METHOD, SYSTEM, AND DEVICE FOR DELIVERY OF PROCESS GAS 审中-公开
标题翻译：用于输送过程气体的方法，系统和装置
公开(公告)号：WO2016065132A1
公开(公告)日：2016-04-28
申请号：PCT/US2015/056887
申请日：2015-10-22
申请人： RASIRC, INC.
发明人： ALVAREZ, Daniel, Jr. , HOLMES, Russell, J. , SPIEGELMAN, Jeffrey , HEINLEIN, Edward , RAMOS, Christopher
IPC分类号： B01D53/44 , B01D53/77 , B01J20/292 , H01G4/06
CPC分类号： C01B21/16 , B01D19/0031 , B01D19/0068 , B01D63/06 , B01D2325/42
摘要： A method and chemical delivery system and device are provided. One method includes contacting a non-aqueous hydrazine solution with a carrier gas and/or vacuum and delivering a gas stream comprising hydrazine to a critical process or application. One chemical delivery system and device includes a non-aqueous hydrazine solution having a vapor phase that is in contact with a carrier gas and/or vacuum. One device includes a chamber for containing a liquid comprising at least one volatile process chemical, such as a non-aqueous hydrazine solution, a hydrogen peroxide solution, or another suitable process chemical, and a head space from which the volatile can be drawn using a carrier gas and/or vacuum. Another method useful in the present invention involves drawing a process chemical from a device as a disclosed herein using a carrier or vacuum and delivering the process chemical to a critical process or application.
摘要翻译：提供了一种方法和化学品输送系统和装置。一种方法包括使非水肼溶液与载气和/或真空接触，并将包含肼的气流输送至关键过程或应用。一种化学输送系统和装置包括具有与载气和/或真空接触的气相的非水肼溶液。一个装置包括用于容纳包含至少一种挥发性过程化学品的液体的室，例如非水肼溶液，过氧化氢溶液或其它合适的过程化学品，以及可以使用载气和/或真空。在本发明中有用的另一种方法包括从本文公开的装置中使用载体或真空抽出工艺化学品，并将该工艺化学品递送至关键的工艺或应用。

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