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1. 发明申请

WO2018089502A9 METHOD, SYSTEM AND DEVICE FOR DELIVERY OF PROCESS GAS 审中-公开
公开(公告)号：WO2018089502A9
公开(公告)日：2018-05-17
申请号：PCT/US2017/060650
申请日：2017-11-08
申请人： RASIRC, INC.
发明人： ALVAREZ, Daniel , HOLMES, Russell , SPIEGELMAN, Jeffrey , HEINLEIN, Edward , RAMOS, Christopher , TRAMMEL, Jeremiah
IPC分类号： B01D19/00 , B01D63/00 , B01D63/06
摘要： A method and chemical delivery system and device are provided. One method useful in the present invention includes contacting a non-aqueous hydrazine solution with a carrier gas and/or vacuum and delivering a substantially dry gas stream comprising hydrazine to a critical process or application. Also disclosed herein are methods of forming nitrogen-containing thin films by atomic layer deposition using hydrazine gas from a non-aqueous hydrazine solution.

2. 发明申请

WO2018089502A1 METHOD, SYSTEM AND DEVICE FOR DELIVERY OF PROCESS GAS 审中-公开
标题翻译：用于输送过程气体的方法，系统和装置
公开(公告)号：WO2018089502A1
公开(公告)日：2018-05-17
申请号：PCT/US2017/060650
申请日：2017-11-08
申请人： RASIRC, INC.
发明人： ALVAREZ, Daniel , HOLMES, Russell , SPIEGELMAN, Jeffrey , HEINLEIN, Edward , RAMOS, Christopher , TRAMMEL, Jeremiah
IPC分类号： B01D19/00 , B01D63/00 , B01D63/06
CPC分类号： B01D19/0005 , B01D19/00 , B01D19/0031 , B01D19/0036 , B01D19/0042 , B01D19/0063 , B01D2325/42 , C01B21/00 , C01B21/068 , C01B21/076 , C01B21/16
摘要： A method and chemical delivery system and device are provided. One method useful in the present invention includes contacting a non-aqueous hydrazine solution with a carrier gas and/or vacuum and delivering a substantially dry gas stream comprising hydrazine to a critical process or application. Also disclosed herein are methods of forming nitrogen-containing thin films by atomic layer deposition using hydrazine gas from a non-aqueous hydrazine solution.
摘要翻译：提供了一种方法和化学输送系统和装置。可用于本发明的一种方法包括使非水肼溶液与载气和/或真空接触，并将包含肼的基本干燥的气流输送至关键过程或应用。本文还公开了使用来自非水肼溶液的肼气体通过原子层沉积形成含氮薄膜的方法。

3. 发明申请

WO2016065132A1 METHOD, SYSTEM, AND DEVICE FOR DELIVERY OF PROCESS GAS 审中-公开
标题翻译：用于输送过程气体的方法，系统和装置
公开(公告)号：WO2016065132A1
公开(公告)日：2016-04-28
申请号：PCT/US2015/056887
申请日：2015-10-22
申请人： RASIRC, INC.
发明人： ALVAREZ, Daniel, Jr. , HOLMES, Russell, J. , SPIEGELMAN, Jeffrey , HEINLEIN, Edward , RAMOS, Christopher
IPC分类号： B01D53/44 , B01D53/77 , B01J20/292 , H01G4/06
CPC分类号： C01B21/16 , B01D19/0031 , B01D19/0068 , B01D63/06 , B01D2325/42
摘要： A method and chemical delivery system and device are provided. One method includes contacting a non-aqueous hydrazine solution with a carrier gas and/or vacuum and delivering a gas stream comprising hydrazine to a critical process or application. One chemical delivery system and device includes a non-aqueous hydrazine solution having a vapor phase that is in contact with a carrier gas and/or vacuum. One device includes a chamber for containing a liquid comprising at least one volatile process chemical, such as a non-aqueous hydrazine solution, a hydrogen peroxide solution, or another suitable process chemical, and a head space from which the volatile can be drawn using a carrier gas and/or vacuum. Another method useful in the present invention involves drawing a process chemical from a device as a disclosed herein using a carrier or vacuum and delivering the process chemical to a critical process or application.
摘要翻译：提供了一种方法和化学品输送系统和装置。一种方法包括使非水肼溶液与载气和/或真空接触，并将包含肼的气流输送至关键过程或应用。一种化学输送系统和装置包括具有与载气和/或真空接触的气相的非水肼溶液。一个装置包括用于容纳包含至少一种挥发性过程化学品的液体的室，例如非水肼溶液，过氧化氢溶液或其它合适的过程化学品，以及可以使用载气和/或真空。在本发明中有用的另一种方法包括从本文公开的装置中使用载体或真空抽出工艺化学品，并将该工艺化学品递送至关键的工艺或应用。

4. 发明申请

WO2018102139A1 METHOD, SYSTEM, AND APPARATUS FOR INHIBITING DECOMPOSITION OF HYDROGEN PEROXIDE IN GAS DELIVERY SYSTEMS 审中-公开
公开(公告)号：WO2018102139A1
公开(公告)日：2018-06-07
申请号：PCT/US2017/061950
申请日：2017-11-16
申请人： RASIRC, INC.
发明人： RAMOS, Christopher , HEINLEIN, Edward , WEBB, Sean , SPIEGELMAN, Jeffrey , HOLMES, Russell , ALVAREZ, Daniel
IPC分类号： A61C17/00
CPC分类号： C01B15/01 , A61C19/066
摘要： Provided herein are methods, systems, and apparatus for inhibiting decomposition of hydrogen peroxide gas through use of surface modification of production and delivery components.

5. 发明申请

WO2017181013A1 METHOD, SYSTEM, AND DEVICE FOR DELIVERY OF PROCESS GAS 审中-公开
标题翻译：用于输送过程气体的方法，系统和装置
公开(公告)号：WO2017181013A1
公开(公告)日：2017-10-19
申请号：PCT/US2017/027634
申请日：2017-04-14
申请人： RASIRC, INC.
发明人： ALVAREZ, JR., Daniel , HOLMES, Russell J. , SPIEGELMAN, Jeffrey J. , HEINLEIN, Edward , RAMOS, Christopher , TRAMMEL, Jeremiah
IPC分类号： B01F3/02 , B01D53/44 , B01D53/77 , B01J20/292 , H01G4/06
摘要： Provided herein are methods, systems, and devices for the vapor phase delivery of high purity process gases to a critical process or application.
摘要翻译：本文提供了用于将高纯度工艺气体气相输送到关键工艺或应用的方法，系统和设备。

6. 发明申请

WO2015175564A1 METHODS AND SYSTEMS FOR DELIVERING PROCESS GASES TO CRITICAL PROCESS APPLICATIONS 审中-公开
标题翻译：将过程气体输送到关键过程应用的方法和系统
公开(公告)号：WO2015175564A1
公开(公告)日：2015-11-19
申请号：PCT/US2015/030422
申请日：2015-05-12
申请人： RASIRC, INC.
发明人： ALVAREZ, Daniel, Jr. , SPIEGELMAN, Jeffrey, J. , HOLMES, Russell, J. , HEINLEIN, Edward , SHAMSI, Zohreh , RAMOS, Christopher , DEPTALA, Alexander , HOGAN, James
IPC分类号： A61L2/20
CPC分类号： C12Q1/6848 , A61L2/186 , A61L2/208 , A61L2202/24 , C12Q1/6806 , C12Q2527/125
摘要： Methods and delivery systems for providing a gas phase of a multi-component liquid source for delivery to a critical process application are provided. The methods include concentration of a component of the liquid source which is less volatile than water for delivery of a gas stream comprising the less volatile component to a critical process application. Critical process applications include decontamination and microelectronic processing applications.
摘要翻译：提供了用于提供用于递送至关键过程应用的多组分液体源的气相的方法和递送系统。这些方法包括液体源的组分的浓度，其比水挥发性低，用于将包含较不易挥发组分的气流输送到关键的过程应用中。关键过程应用包括去污和微电子处理应用。

7. 发明申请

WO2014165637A2 DELIVERY OF A HIGH CONCENTRATION HYDROGEN PEROXIDE GAS STREAM 审中-公开
标题翻译：高浓度氢过氧化物气流的输送
公开(公告)号：WO2014165637A2
公开(公告)日：2014-10-09
申请号：PCT/US2014/032748
申请日：2014-04-03
申请人： RASIRC, INC.
发明人： SPIEGELMAN, Jeffrey, J. , HOLMES, Russell, J. , ARYA, Bhuvnesh , HEINLEIN, Edward , ALVAREZ, Daniel, Jr.
IPC分类号： A61L9/02
CPC分类号： B01D53/228 , A61L2/00 , A61L9/00 , F22B1/284 , H05B3/009
摘要： A method and chemical delivery system are provided. The method includes providing a concentrated aqueous hydrogen peroxide solution in a boiler having a head space, boiling the concentrated aqueous hydrogen peroxide solution to produce a dilute vapor comprising hydrogen peroxide within the head space of the boiler, and adding a dilute aqueous hydrogen peroxide solution to the concentrated aqueous hydrogen peroxide solution within the boiler to maintain the concentration of the aqueous hydrogen peroxide solution in the boiler. The method further includes delivering the dilute vapor comprising hydrogen peroxide to a critical process or application. The chemical delivery system includes a concentrated aqueous hydrogen peroxide solution, a boiler having a head space configured for boiling the concentrated aqueous hydrogen peroxide solution and producing a dilute vapor comprising hydrogen peroxide within the head space, and a manifold configured for adding a dilute aqueous hydrogen peroxide solution to the concentrated aqueous hydrogen peroxide solution within the boiler to maintain the concentration of the aqueous hydrogen peroxide solution in the boiler, wherein the manifold is further configured to deliver the dilute vapor comprising hydrogen peroxide to a critical process or application.
摘要翻译：提供了一种方法和化学物质输送系统。该方法包括在具有顶部空间的锅炉中提供浓缩的过氧化氢水溶液，煮沸浓缩的过氧化氢水溶液以在锅炉的顶部空间内产生包含过氧化氢的稀释蒸气，并将稀二水过氧化氢溶液锅炉内浓缩的过氧化氢水溶液，保持锅炉中过氧化氢水溶液的浓度。该方法还包括将包含过氧化氢的稀释蒸气输送至关键过程或应用。化学递送系统包括浓缩的过氧化氢水溶液，具有顶部空间的锅炉，所述顶部空间被配置为沸腾浓缩的过氧化氢水溶液，并且在顶部空间内产生包含过氧化氢的稀释蒸气，以及歧管，其构造成用于加入稀氢氧化水溶液过氧化物溶液加入到锅炉内的浓缩的过氧化氢水溶液中以维持锅炉中过氧化氢水溶液的浓度，其中歧管进一步构造成将包含过氧化氢的稀释蒸气输送至关键的过程或应用。

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