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    • 2. 发明申请
    • MICROMIRROR ARRAYS HAVING SELF ALIGNED FEATURES
    • 具有自对准特征的MICROMIRROR ARRAYS
    • WO2011112260A3
    • 2012-01-19
    • PCT/US2011000452
    • 2011-03-10
    • PACIFIC BIOSCIENCES CALIFORNIAMONADGEMI PEZHMAN
    • MONADGEMI PEZHMAN
    • G02B26/00G01N21/00
    • B82Y20/00B29D11/00596G02B1/118G02B5/09G02B5/26G02B6/3512G02B6/3556G02B6/3584G02B2207/101
    • Methods, arrays, and systems for the optical analysis of multiple chemical, biological, or biochemical reactions are provided. The invention includes methods for producing arrays of micromirrors on transparent substrates, each micromirror comprising a nanostructure or optical confinement on its top. The arrays are produced by a process in which lateral dimensions of both the nanostructures and micromirrors are defined in a single step, allowing for control of the relative placement of the features on the substrate, minimizing the process-related defects, allowing for improved optical performance and consistency. In some aspects, the invention provides methods of selectively etching large features on a substrate while not concurrently etching small features. In some aspects, the invention provides methods of etching large features on a substrate using hard mask materials.
    • 提供了用于多种化学,生物或生化反应的光学分析的方法,阵列和系统。 本发明包括在透明衬底上产生微镜阵列的方法,每个微反射镜在其顶部包括纳米结构或光学限制。 阵列是通过一个方法制造的,其中纳米结构和微反射镜的横向尺寸在单个步骤中被限定,允许控制特征在基底上的相对放置,最小化与工艺相关的缺陷,允许改进的光学性能 和一致性。 在一些方面,本发明提供了选择性地蚀刻衬底上的大特征而不同时蚀刻小特征的方法。 在一些方面,本发明提供了使用硬掩模材料在基底上蚀刻大特征的方法。