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    • 6. 发明申请
    • X-Y TABLE APPARATUS
    • X-Y表装置
    • WO1993021639A1
    • 1993-10-28
    • PCT/JP1993000420
    • 1993-04-01
    • MITUTOYO CORPORATIONTENG, Hongchun;ISHIBASHI, Wataru;
    • MITUTOYO CORPORATION
    • G12B05/00
    • G01D5/34715G12B5/00Y10S33/03Y10S248/913
    • An X-Y table apparatus provided with a base (12), a member (14) capable of being moved in an X-direction with respect to the base, a member (18) capable of being moved in a Y-direction with respect to the X-direction-movable member and supporting an object placed thereon, and a means (20) for detecting an amount of movement of the object support member with respect to the base, the movement amount detecting means including a main scale (24) which is provided at the central portion of a lower surface of the object support member so that the main scale can be operated in accordance with the movement of the object support member, and which has a matrix type island-like first lattice, and an index scale (26) which is provided on the base so that it can be moved relatively and two dimensionally with respect to and extends in parallel with the main scale, and which has a second grid-ironed lattice (80) and a third grid-ironed lattice (82). This apparatus has a simple construction, and, moreover, it is capable of detecting the displacement of an object in the X- and Y-directions with a high accuracy. A block (100) attached unitarily to the object support member (18) is provided with a mounting hole (101). A free end portion (102) of a detecting shaft (22) of an X-Y encoder is inserted into this mounting hole and three-line-supported on three parallel pins (103a-103c). The relative position of angle of rotation of a table with respect to the X-Y encoder are finely regulated by turning the detecting shaft by a regulating lever (105) directly under the object support member.
    • 一种具有基座(12)的XY台面装置,能够相对于基座在X方向上移动的构件(14),能够相对于所述基座沿Y方向移动的构件(18) X方向可动构件,并支撑放置在其上的物体,以及用于检测物体支撑构件相对于基座的移动量的装置(20),移动量检测装置包括主秤(24) 设置在物体支撑构件的下表面的中心部分,使得主标尺可以根据物体支撑构件的移动而被操作,并且具有矩阵型岛状第一格子和指标( 26),其设置在基座上,使得其可以相对于主刻度相对并相对于并平行地移动并且与主刻度平行地移动,并且具有第二格栅格(80)和第三格栅格( 82)。 该装置结构简单,而且能够高精度地检测物体在X方向和Y方向上的位移。 一体地安装在物体支撑部件(18)上的块(100)设置有安装孔(101)。 X-Y编码器的检测轴(22)的自由端部(102)被插入到该安装孔中,并且三线支撑在三个平行的销(103a-103c)上。 台面相对于X-Y编码器的旋转角度的相对位置通过直接在对象支撑构件正下方的调节杆(105)转动检测轴来进行微调节。
    • 9. 发明申请
    • THREE-DIMENSIONAL MEASURING INSTRUMENT
    • 三维测量仪器
    • WO1990013791A1
    • 1990-11-15
    • PCT/JP1990000551
    • 1990-04-27
    • MITUTOYO CORPORATIONTAKAHASHI, KeizoMATSUMOTO, Masakasu
    • MITUTOYO CORPORATION
    • G01B21/20
    • G01B3/002G01B21/047
    • This invention relates to a three-dimensional measuring instrument capable of setting an origin of measurement arbitrarily by reference point blocks. When dust is deposited on the reference point block, the origin of measurement deviates by a distance corresponding to the thickness of the dust, so that the object measuring accuracy decreases. In order to prevent this inconvenience, covers (40A, 40B, 80) enclosing the reference point blocks (50A, 50B, 70) are provided so that the covers can be opened and closed with respect to the reference point blocks. If these covers are opened only when an origin of measurement is set, the deposition of dust on the reference point blocks can be prevented or reduced extremely, and an origin of measurement can be set accurately, this enabling an object to be measured precisely. This invention can be applied to a three-dimensional measuring instrument adapted to set an origin of measurement by origin ball-carrying reference point blocks and carry out precision measurement of the order of microns.
    • 本发明涉及能够通过参考点块任意设定测量原点的三维测量仪器。 当灰尘沉积在参考点块上时,测量原点偏离与灰尘厚度相对应的距离,从而物体测量精度降低。 为了防止这种不便,设置包围参考点块(50A,50B,70)的盖(40A,40B,80),使得盖可以相对于参考点块打开和关闭。 如果这些盖仅在设定测量原点时才打开,则可以极大地防止或减少灰尘沉积在基准点块上,并且可以准确地设置测量的原点,从而能够精确地测量物体。 本发明可以应用于三维测量仪器,其适用于通过原始球携带参考点块设置测量原点,并执行微米数量级的精密测量。