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1. 发明申请

WO2010022530A1 METHOD FOR MANUFACTURING TRANSPARENT CONDUCTIVE OXIDE (TCO) FILMS; PROPERTIES AND APPLICATIONS OF SUCH FILMS 审中-公开
标题翻译：制造透明导电氧化物（TCO）膜的方法; 这种膜的性质和应用
公开(公告)号：WO2010022530A1
公开(公告)日：2010-03-04
申请号：PCT/CH2009/000291
申请日：2009-08-28
申请人： OERLIKON SOLAR IP AG, TRÜBBACH , DIMITRY, Zimin , ZINDEL, Arno , TEREN, Andrew , WATKINS, Owan Charles , DESPONT, Laurent , WIDER, Joachim , RAMOINO, Luca , GOSSLA, Mario , VOGLER, Benjamin , KERSCHBAUMER, Joerg , SCHNEIDER, Stefan , MARK, Andreas , POPPELLER, Markus , KUHN, Hansjoerg , BORRELLO, Daniel , BENAGLI, Stefano , MEIER, Johannes , KROLL, Ulrich , VALLAT-SAUVAIN, Evelyne
发明人： DIMITRY, Zimin , ZINDEL, Arno , TEREN, Andrew , WATKINS, Owan Charles , DESPONT, Laurent , WIDER, Joachim , RAMOINO, Luca , GOSSLA, Mario , VOGLER, Benjamin , KERSCHBAUMER, Joerg , SCHNEIDER, Stefan , MARK, Andreas , POPPELLER, Markus , KUHN, Hansjoerg , BORRELLO, Daniel , BENAGLI, Stefano , MEIER, Johannes , KROLL, Ulrich , VALLAT-SAUVAIN, Evelyne
IPC分类号： C23C16/40 , C23C16/44 , H01L31/0224 , H01L31/0392 , H01L31/18 , H01L21/365
CPC分类号： C23C16/407 , C23C16/44 , H01L21/02422 , H01L21/02554 , H01L21/02573 , H01L21/0262 , H01L31/022483 , H01L31/075 , H01L31/1884 , Y02E10/548
摘要： A method for manufacturing a boron doped, transparent, conductive zinc oxide layer from on a substrate is disclosed. The layer is being deposited from at least diethylzinc, water and diborane by low pressure chemical vapour deposition (LPCVD) in a process chamber of a deposition system comprising wherein the gas flow ratio of diethylzinc and water is kept between 0.87 and 1.3 and the gas flow ratio of diborane and diethylzinc is being kept between 0.05 and 0.4. The haze of such manufactured layer, measured as ratio of diffuse transmittance to total transmittance at 600nm, is between 10 and 25%.
摘要翻译：公开了一种从衬底上制造硼掺杂的透明导电氧化锌层的方法。该层在沉积系统的处理室中通过低压化学气相沉积（LPCVD）从至少二乙基锌，水和乙硼烷沉积，其中二乙基锌和水的气体流量比保持在0.87和1.3之间，气流乙硼烷和二乙基锌的比例保持在0.05和0.4之间。以600nm处的扩散透射率与总透射率的比率测量的这种制造层的雾度在10％和25％之间。

2. 发明申请

WO2010020445A1 TRAP 审中-公开
标题翻译：陷阱
公开(公告)号：WO2010020445A1
公开(公告)日：2010-02-25
申请号：PCT/EP2009/057390
申请日：2009-06-15
申请人： OERLIKON SOLAR IP AG, TRÜBBACH , FISCHER, Tobias , SCHNEIDER, Stefan , GÖTTLICH, Hagen , BHANGU, Kavreet , VOGLER, Benjamin , WIDMEIER, Christoph , ZINDEL, Arno
发明人： FISCHER, Tobias , SCHNEIDER, Stefan , GÖTTLICH, Hagen , BHANGU, Kavreet , VOGLER, Benjamin , WIDMEIER, Christoph , ZINDEL, Arno
IPC分类号： C23C16/44
CPC分类号： C23C16/4412
摘要： The present invention provides a hot-trap device (1) comprising an enclosure (2) with at least one inlet (3), at least one outlet (5) at least one heating means (7) and at least one collector means (10) for the conversion of reaction by-products into products, wherein the collector means is arranged within the enclosure between the inlet and the outlet has a diameter that substantially matches the diameter of the enclosure and has at least one opening (18).
摘要翻译：本发明提供一种热阱装置（1），其包括具有至少一个入口（3），至少一个出口（5）至少一个加热装置（7）和至少一个收集器装置（10）的外壳（2）），用于将反应副产物转化成产物，其中收集器装置布置在入口和出口之间的外壳内，其直径基本上与外壳的直径相匹配并具有至少一个开口（18）。

3. 发明申请

WO2010020446A1 TRAP 审中-公开
标题翻译：陷阱
公开(公告)号：WO2010020446A1
公开(公告)日：2010-02-25
申请号：PCT/EP2009/057395
申请日：2009-06-15
申请人： OERLIKON SOLAR IP AG, TRÜBBACH , SCHNEIDER, Stefan , BHANGU, Kavreet , FISCHER, Tobias , GÖTTLICH, Hagen , VOGLER, Benjamin , WIDMEIER, Christoph , ZINDEL, Arno
发明人： SCHNEIDER, Stefan , BHANGU, Kavreet , FISCHER, Tobias , GÖTTLICH, Hagen , VOGLER, Benjamin , WIDMEIER, Christoph , ZINDEL, Arno
IPC分类号： C23C16/44
CPC分类号： C23C16/4412
摘要： The present invention provides a hot-trap device for the efficient removal of reaction by- products from exhausted process gases in vacuum processing systems, wherein collector means for the conversion of such reaction by-products are provided as pellets. Furthermore, a vacuum treatment system comprising such a hot-trap device and methods for the removal of reaction by-products utilizing the hot-trap device or the vacuum treatment system are provided.
摘要翻译：本发明提供了一种用于在真空处理系统中有效地除去排出的工艺气体的反应副产物的热阱装置，其中用于转化这种反应副产物的收集装置被提供为颗粒。此外，提供了包括这种热阱装置的真空处理系统和利用热阱装置或真空处理系统去除反应副产物的方法。

4. 发明申请

WO2010049186A1 PRECURSOR DISPOSAL 审中-公开
标题翻译：前期处置
公开(公告)号：WO2010049186A1
公开(公告)日：2010-05-06
申请号：PCT/EP2009/059227
申请日：2009-07-17
申请人： Oerlikon Solar IP AG, Trübbach , HOTZ, Philipp , SCHNEIDER, Stefan , VOGLER, Benjamin , PROBST, Peter
发明人： HOTZ, Philipp , SCHNEIDER, Stefan , VOGLER, Benjamin , PROBST, Peter
IPC分类号： C23C16/44
CPC分类号： C23C16/4412 , B01D2257/706 , B01D2258/0216 , F23G7/00 , F23G2209/142
摘要： The present invention provides a system for the disposal of waste of substrate treatment systems which comprises at least one process module connected to at least one reservoir and at least one abatement system, wherein the reservoir collects the waste produced by the process module and wherein the waste collected in the reservoir is transferred to the abatement system and wherein the waste comprises a substance selected from the group consisting of pyrophoric metalorganic chemicals, phosphine, diborane, silane, dimethylzinc and/or diethylzinc. Thus, the production of waste by the substrate treatment system is decoupled from the disposal of the waste by the abatement system. This has the advantage that the abatement system can be designed to be capable of handling an average waste load from the substrate treatment system, whereby no unused overcapacities of the abatement system need to be accepted.
摘要翻译：本发明提供了一种用于处置废物处理系统的系统，该系统包括连接至少一个贮存器和至少一个消除系统的至少一个处理模块，其中储存器收集由处理模块产生的废物，其中废物收集在储存器中的废物被转移到减排系统中，其中废物包括选自自燃金属有机化合物，磷化氢，乙硼烷，硅烷，二甲基锌和/或二乙基锌的物质。因此，衬底处理系统的废物生产与减排系统的废弃物处理脱钩。这具有的优点是，减排系统可以被设计为能够处理来自基板处理系统的平均废物负载，由此不需要接受减排系统的未使用的过剩能力。

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