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    • 4. 发明申请
    • EPITAXIAL GROWTH OF GROUP III NITRIDES ON SILICON SUBSTRATES VIA A REFLECTIVE LATTICE-MATCHED ZIRCONIUM DIBORIDE BUFFER LAYER
    • 通过反射式匹配的ZIRCONIUM DIBORIDE BUFFER层的硅基体上的III族氮化物的外延生长
    • WO2004073045A2
    • 2004-08-26
    • PCT/US2004004605
    • 2004-02-12
    • UNIV ARIZONA STATETSONG IGNATIUS S TKOUVETAKIS JOHNTOLLE JOHNROUCKA RADEK
    • TSONG IGNATIUS S TKOUVETAKIS JOHNTOLLE JOHNROUCKA RADEK
    • C30B25/02C30B29/10H01L21/20H01L33/00H01L
    • C30B25/02C30B29/10H01L21/0237H01L21/02439H01L21/02491H01L21/0254H01L21/0262H01L21/02631H01L33/007
    • A semiconductor structure and fabrication method is provided for integrating wide bandgap nitrides with silicon. The structure includes a substrate, a single crystal buffer layer formed by epitaxy over the substrate and a group III nitride film formed by epitaxy over the buffer layer. The buffer layer is reflective and conductive. The buffer layer may comprise B an element selected from the group consisting of Zr, Hf, Al. For example, the buffer layer may comprise ZrB2, AlB2 or HfB2. The buffer layer provides a lattice match with the group III nitride layer. The substrate can comprise silicon, silicon carbide (SiC), gallium arsenide (GaAs), sapphire or A12O3. The group III nitride material includes GaN, A1N, InN, A1GaN, InGaN or A1InGaN and can form an active region. In a presently preferred embodiment, the buffer layer is ZrB2 and the substrate is Si(111) or Si(100) and the group l[II nitride layer comprises GaN. The ZrB2 buffer layer provides a reflective and conductive buffer layer that has a small lattice mismatch with GaN. The semiconductor structure can be used to fabricate active microelectronic devices, such as transistors including field effect transistors and bipolar transistors. The semiconductor structure also can be used to fabricate optoelectronic devices, such as laser diodes and light emitting diodes
    • 提供了一种用于将宽带隙氮化物与硅结合的半导体结构和制造方法。 该结构包括衬底,通过衬底上的外延形成的单晶缓冲层和通过缓冲层上的外延形成的III族氮化物膜。 缓冲层是反射和导电的。 缓冲层可以包含选自由Zr,Hf,Al组成的组的元素。 例如,缓冲层可以包括ZrB2,AlB2或HfB2。 缓冲层提供与III族氮化物层的晶格匹配。 衬底可以包括硅,碳化硅(SiC),砷化镓(GaAs),蓝宝石或A12O3。 III族氮化物材料包括GaN,AlN,InN,AlGaN,InGaN或AlInGaN,并且可以形成有源区。 在目前优选的实施方案中,缓冲层是ZrB 2,衬底是Si(111)或Si(100),第1组[II族氮化物层包括GaN。 ZrB2缓冲层提供与GaN具有小的晶格失配的反射和导电缓冲层。 半导体结构可用于制造有源微电子器件,例如包括场效应晶体管和双极晶体管的晶体管。 该半导体结构也可用于制造诸如激光二极管和发光二极管之类的光电器件