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1. 发明申请

WO2016087985A1 A MEMS SENSOR AND A SEMICONDUCTOR PACKAGE 审中-公开
标题翻译： MEMS传感器和半导体封装
公开(公告)号：WO2016087985A1
公开(公告)日：2016-06-09
申请号：PCT/IB2015/059062
申请日：2015-11-24
申请人： MURATA MANUFACTURING CO., LTD.
发明人： RYTKÖNEN, Ville-Pekka , LIUKKU, Matti
IPC分类号： G01P15/125 , G01P15/18 , B81B5/00 , G01P15/08
CPC分类号： B60R21/01 , B60R2021/01286 , B81B7/02 , B81B2201/0235 , B81B2201/033 , B81B2203/0154 , B81B2203/0163 , B81B2207/015 , G01P15/125 , G01P15/13 , G01P15/18 , G01P2015/0817
摘要： The MEMS sensor of the invention has movable and fixed components for measuring acceleration in a rotational mode in a direction in-plane perpendicular to spring axis. The components include an element frame (1), a substrate (7), a proof-mass (2) a spring (5) connected to the proof-mass (2) and to the substrate (7), and comb electrodes (9a, 9b). The MEMS sensor is mainly characterized by an arrangement of the components causing an inherent sensitivity for measuring accelerations in a range covering longitudinal and transversal accelerations. One or more of the components are tilted compared to the element frame (1). The semiconductor package (12) of the invention comprises at least one MEMS sensor.
摘要翻译：本发明的MEMS传感器具有用于在与弹簧轴线垂直的平面内的方向上测量旋转模式的加速度的可移动和固定部件。这些部件包括元件框架（1），基板（7），与质量块（2）和基板（7）相连的弹簧（5）和梳状电极（9a），9b）。 MEMS传感器的主要特征在于组件的布置，导致在覆盖纵向和横向加速度的范围内测量加速度的固有灵敏度。与元件框架（1）相比，一个或多个部件倾斜。本发明的半导体封装（12）包括至少一个MEMS传感器。

2. 发明申请

WO2014207710A1 CAPACITIVE MICROMECHANICAL SENSOR STRUCTURE AND MICROMECHANICAL ACCELEROMETER 审中-公开
标题翻译：电容式微电子传感器结构和微机械加速度计
公开(公告)号：WO2014207710A1
公开(公告)日：2014-12-31
申请号：PCT/IB2014/062650
申请日：2014-06-27
申请人： MURATA MANUFACTURING CO., LTD.
发明人： LIUKKU, Matti , RYTKÖNEN, Ville-Pekka
IPC分类号： G01P15/125 , B81B5/00 , G01P15/08
CPC分类号： G01P15/125 , B81B3/0078 , B81B2201/0235 , B81B2201/033 , G01P15/0802 , G01P15/131 , G01P15/18 , G01P2015/0814 , G01P2015/0871
摘要： The invention relates to a capacitive micromechanical sensor structure comprising a stator structure (1) rigidly anchored to a substrate (2) and a rotor structure (3) movably anchored by means of spring structures (4; 4a, 4b) to the substrate (2). The stator structure (1) has a plurality of stator finger support beams (5) and the rotor structure (3) has a plurality of rotor finger support beams (7). Stator fingers (10) along the stator finger support beam (5) of the stator structure (9) extend into rotor gaps (14) along the rotor finger support beam (7) of the rotor structure (12), and rotor fingers (13) along the rotor finger support beam (7) of the rotor structure (12) extend into stator gaps (11) along the stator finger support beam (5) of the stator structure (9).
摘要翻译：本发明涉及一种电容微机械传感器结构，其包括刚性地锚定到基底（2）的定子结构（1）和通过弹簧结构（4; 4a，4b）可移动地锚固到基底（2）的转子结构（3））。定子结构（1）具有多个定子指状支撑梁（5），并且转子结构（3）具有多个转子手指支撑梁（7）。沿着定子结构（9）的定子指支撑梁（5）的定子指（10）沿着转子结构（12）的转子指状支撑梁（7）延伸到转子间隙（14）中，并且转子指）沿着转子结构（12）的转子指状支撑梁（7）延伸到定子结构（9）的定子指状支撑梁（5）的定子间隙（11）中。

3. 发明申请

WO2017051241A1 SEMI-FLEXIBLE PROOF-MASS 审中-公开
标题翻译：半柔性防护质量
公开(公告)号：WO2017051241A1
公开(公告)日：2017-03-30
申请号：PCT/IB2016/001352
申请日：2016-09-22
申请人： MURATA MANUFACTURING CO., LTD.
发明人： BLOMQVIST, Anssi , RYTKÖNEN, Ville-Pekka , LIUKKU, Matti
IPC分类号： G01P15/08 , G01P15/125 , B81C1/00 , B81B3/00 , B81B7/00
CPC分类号： G01M7/08 , B81B3/001 , B81B3/0013 , B81B7/0016 , B81B2201/0235 , B81C1/00968 , G01P15/0802 , G01P15/125 , G01P2015/0814 , G01P2015/0874
摘要： The present invention relates to a microelectromechanical device including a semi-flexible proof-mass comprising at least one primary part, at least one secondary part and at least one stiff spring suspending the at least one primary part and the at least one secondary part of the semi-flexible proof-mass. The stiff spring substantially causes the at least one primary part and the at least one secondary part to move as a single, rigid entity when the device is in its normal operation range. The device further includes at least one first stopper structure configured to stop the at least one primary part. The semi-flexible proof-mass is configured to deform through deflection of the at least one stiff spring, when the device is subjected to a shock that impacts the device with a force that is beyond the normal operation range of the device. While the shock causes a motion of the semi-flexible proof-mass at least in one direction along an axis of movement, the at least one stiff spring is further configured to cause a restoring force causing at least the at least one secondary part of the semi-flexible proof-mass to be driven into a restoring motion in a direction opposite to the motion along the axis of movement caused by the shock, wherein momentum of the at least one secondary part in the restoring motion further causes the at least one primary part to dislodge from the first stopper structure.
摘要翻译：本发明涉及一种微机电装置，其包括半柔性防弹块，其包括至少一个主要部分，至少一个次要部分和至少一个刚性弹簧，其将所述至少一个主要部分和所述至少一个次要部分半柔性防爆质量。当设备处于其正常操作范围时，刚性弹簧基本上使得至少一个主要部件和至少一个次要部件作为单个刚性实体移动。该装置还包括至少一个构造成停止至少一个主要部分的第一止动结构。半柔性防弹质构造成通过使至少一个刚性弹簧的偏转而变形，当该装置受到以超过装置的正常工作范围的力冲击装置的冲击时。尽管冲击导致至少沿着运动轴线的一个方向的半柔性防弹块的运动，但是至少一个刚性弹簧被进一步构造成引起恢复力，至少使至少一个次要部分半柔性证明物质被驱动到与由冲击引起的运动轴线的运动相反的方向上的恢复运动，其中恢复运动中的至少一个次要部分的动量进一步使至少一个主要部分从第一止动结构移开。

4. 发明申请

WO2016142832A1 A MICROELECTROMECHANICAL CAPACITIVE SENSOR STRUCTURE AND DEVICE 审中-公开
标题翻译：微电子能量传感器结构与器件
公开(公告)号：WO2016142832A1
公开(公告)日：2016-09-15
申请号：PCT/IB2016/051265
申请日：2016-03-07
申请人： MURATA MANUFACTURING CO., LTD.
发明人： LIUKKU, Matti , RUOHIO, Jaakko , VESTERINEN, Hannu
IPC分类号： B81B3/00 , G01P15/125 , H01G5/14
CPC分类号： B81B3/0045 , B81B3/0056 , B81B3/0086 , B81B2201/0221 , B81B2201/0271 , G01P15/125 , G01P2015/0814 , H01G5/14
摘要： A MEMS structure that provides an improved way to selectively control electromechanical properties of a MEMS device with an applied voltage. The MEMS structure includes a capacitor element that comprises at least one stator element (6, 1), and at least one rotor element (8, 3) suspended for motion parallel to a first direction in relation to the stator element. The stator element and the rotor element form at least one capacitor element, the capacitance of which varies according to displacement of the rotor element from an initial position. The stator element and the rotor element are mutually oriented such that in at least one range of displacements of the rotor element from an initial position, the second derivative of the capacitance with respect to the displacement has negative values.
摘要翻译： MEMS结构提供了一种改进的方法来选择性地控制具有施加电压的MEMS器件的机电性能。 MEMS结构包括电容器元件，其包括至少一个定子元件（6,1）和至少一个相对于定子元件平行于第一方向运动的转子元件（8,3）。定子元件和转子元件形成至少一个电容器元件，其电容根据转子元件从初始位置的位移而变化。定子元件和转子元件相互取向，使得在转子元件从初始位置的至少一个位移范围内，电容相对于位移的二次导数具有负值。

5. 发明申请

WO2019220202A9 VIBRATION DAMPING IN MEMS ACCELERATION SENSORS 审中-公开
公开(公告)号：WO2019220202A9
公开(公告)日：2019-11-21
申请号：PCT/IB2019/000356
申请日：2019-05-13
申请人： MURATA MANUFACTURING CO., LTD.
发明人： LIUKKU, Matti , RYTKÖNEN, Ville-Pekka
IPC分类号： G01P15/125 , G01P1/00 , B81B5/00 , B81B7/00 , G01P15/08
摘要： A capacitive microelectromechanical acceleration sensor where one or more rotor measurement plates and one or more stator measurement plates are configured so that the movement of a proof mass in the direction of a sense axis can be measured in a capacitive measurement conducted between them. One or more first rotor damping plates and one or more first stator damping plates form a first set of parallel plates which are orthogonal to a first damping axis, and the first damping axis is substantially orthogonal to the sense axis.

6. 发明申请

WO2014207709A1 CAPACITIVE MICROMECHANICAL ACCELERATION SENSOR 审中-公开
标题翻译：电容式微机械加速传感器
公开(公告)号：WO2014207709A1
公开(公告)日：2014-12-31
申请号：PCT/IB2014/062649
申请日：2014-06-27
申请人： MURATA MANUFACTURING CO., LTD.
发明人： LIUKKU, Matti , RYTKÖNEN, Ville-Pekka , BLOMQVIST, Anssi
IPC分类号： G01P15/125 , G01P15/18 , G01P15/08
CPC分类号： G01P15/18 , G01P15/00 , G01P15/08 , G01P15/0802 , G01P15/125 , G01P2015/0828 , G01P2015/0837
摘要： The invention relates to a capacitive micromechanical acceleration sensor comprising a first sensor (2), a second sensor (4), and a third sensor (5). The first sensor (2) comprises a rotor electrode (6) and stator electrode (7). The sensor comprises a first beam (8) that is connected to a rotor electrode support structure (19) and that is connected to the rotor electrode (6). The sensor comprises a second beam (12) that is connected to the rotor electrode support structure (19) and that is connected to the rotor electrode (6). The second sensor (4) is situated in a first space (17) circumscribed by the first beam (8), the first sensor (2), and the rotor electrode support structure (19).The third sensor (5) is situated in a second space (18) circumscribed by the second beam (12), the first sensor (2), and the rotor electrode support structure (19).
摘要翻译：本发明涉及包括第一传感器（2），第二传感器（4）和第三传感器（5）的电容微机械加速度传感器。第一传感器（2）包括转子电极（6）和定子电极（7）。传感器包括连接到转子电极支撑结构（19）并且连接到转子电极（6）的第一梁（8）。传感器包括连接到转子电极支撑结构（19）并连接到转子电极（6）的第二梁（12）。第二传感器（4）位于由第一梁（8），第一传感器（2）和转子电极支撑结构（19）外接的第一空间（17）中。第三传感器（5）位于由第二梁（12）外接的第二空间（18），第一传感器（2）和转子电极支撑结构（19）。

7. 发明申请

WO2019220202A1 VIBRATION DAMPING IN MEMS ACCELERATION SENSORS 审中-公开
公开(公告)号：WO2019220202A1
公开(公告)日：2019-11-21
申请号：PCT/IB2019/000356
申请日：2019-05-13
申请人： MURATA MANUFACTURING CO., LTD.
发明人： LIUKKU, Matti , RYTKÖNEN, Ville-Pekka
IPC分类号： G01P15/125 , G01P1/00 , B81B5/00 , B81B7/00 , G01P15/08
摘要： A capacitive microelectromechanical acceleration sensor where one or more rotor measurement plates and one or more stator measurement plates are configured so that the movement of a proof mass in the direction of a sense axis can be measured in a capacitive measurement conducted between them. One or more first rotor damping plates and one or more first stator damping plates form a first set of parallel plates which are orthogonal to a first damping axis, and the first damping axis is substantially orthogonal to the sense axis.

8. 发明申请

WO2017051243A1 IMPROVED MICROELECTROMECHANICAL ACCELEROMETER DEVICE 审中-公开
标题翻译：改进的微电子机械加速度计装置
公开(公告)号：WO2017051243A1
公开(公告)日：2017-03-30
申请号：PCT/IB2016/001356
申请日：2016-09-23
申请人： MURATA MANUFACTURING CO., LTD.
发明人： LIUKKU, Matti , NISKANEN, Severi
IPC分类号： G01P15/125 , G01P15/18 , B81B5/00 , G01P15/08
CPC分类号： G01P15/125 , B81B5/00 , B81B2201/0235 , B81B2203/0163 , B81B2203/051 , G01P15/18 , G01P2015/0811 , G01P2015/0848
摘要： The structure enables two-directional sensing of accelerations with compact component dimensions and with minimal cross-axis sensitivity. The rotation mass (100) includes a first frame (102) and a second frame (102). In one sense direction, the structure employs a combined proof mass of the first frame and the second frame, which improves the signal to noise level achievable with said device dimensions. In the other sense direction, a detection structure (140) with at least two sensing elements is used to detect displacements of the proof mass of the second frame. Due to the specific internal configuration of the detection structure (140), signal contributions of the sensing elements in the one direction cancel each other.
摘要翻译：该结构使得能够以紧凑的部件尺寸并且具有最小的跨轴灵敏度的双向感测加速度。旋转质量块（100）包括第一框架（102）和第二框架（102）。在一个感测方向上，该结构采用第一帧和第二帧的组合证明质量，这提高了所述设备尺寸可实现的信噪比水平。在另一感测方向，具有至少两个感测元件的检测结构（140）用于检测第二框架的检验质量块的位移。由于检测结构（140）的具体内部结构，感测元件在一个方向上的信号贡献彼此抵消。

9. 发明申请

WO2016185313A1 A MULTI-LEVEL MICROMECHANICAL STRUCTURE 审中-公开
标题翻译：多层次微观结构
公开(公告)号：WO2016185313A1
公开(公告)日：2016-11-24
申请号：PCT/IB2016/052630
申请日：2016-05-09
申请人： MURATA MANUFACTURING CO., LTD.
发明人： IIHOLA, Antti , TORKKELI, Altti , RYTKÖNEN, Ville-Pekka , LIUKKU, Matti
IPC分类号： B81B3/00
CPC分类号： B81B3/0021 , B81B3/0094 , B81B2201/0235 , B81B2201/0242 , B81B2203/0136 , B81B2203/04 , B81C1/00357 , B81C2201/0112 , B81C2201/0132
摘要： The present invention relates to a micromechanical device comprising a multi-layer micromechanical structure including only homogenous silicon material. The device layer comprises at least a rotor and at least two stators. At least some of the rotor and the at least two stators are at least partially recessed to at least two different depths of recession from a first surface of the device layer and at least some of the rotor and at least two stators are at least partially recessed to at least two different depths of recession from a second surface of the device layer.
摘要翻译：微机械装置技术领域本发明涉及包括仅包含均质硅材料的多层微机械结构的微机械装置。装置层至少包括一个转子和至少两个定子。转子和至少两个定子中的至少一些至少部分地凹陷到来自装置层的第一表面的至少两个不同的凹陷深度，并且至少一些转子和至少两个定子至少部分地凹入到来自装置层的第二表面的至少两个不同的凹陷深度。

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