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    • 2. 发明申请
    • DIELECTRIC RESONATOR
    • 电介质谐振器
    • WO02097963A3
    • 2003-07-17
    • PCT/US0149481
    • 2001-12-27
    • MOTOROLA INC
    • IRWIN JAMES S
    • H01L21/20H01P7/10H03B5/18H01L21/205
    • H01L21/02546H01L21/02381H01L21/02439H01L21/02488H01L21/02505H01P7/10H03B5/1876
    • High quality epitaxial layers of monocrystalline materials can be grown overlying monocrystalline substrates such as large silicon wafers by forming a compliant substrate for growing the monocrystalline layers. The compliant substrate includes an accommodating buffer layer (235) that is a layer of monocrystalline oxide spaced apart from the silicon wafer by an amorphous interface layer (234) of silicon oxide. The amorphous interface layer dissipates strain and permits the growth of a high quality monocrystalline oxide accommodating buffer layer (235). The accommodating buffer layer (235) is lattice matched to both the underlying silicon wafer and the overlying monocrystalline material layer. Any lattice mismatch between the accommodating buffer layer (235) and the underlying silicon substrate (222) is taken care of by the amorphous interface layer (234). The use of monocrystalline dielectric material as a layer facilitates the fabrication of on chip high frequency communications devices such as dielectric resonators with direct interface to compound semiconductor material in the integrated circuit.
    • 通过形成用于生长单晶层的柔性衬底,可以将单晶材料的高质量外延层生长在覆盖单晶衬底(例如大硅晶片)上。 柔性衬底包括容纳缓冲层(235),其是通过氧化硅的非晶界面层(234)与硅晶片间隔开的单晶氧化物层。 非晶界面层消耗应变并允许高质量单晶氧化物容纳缓冲层(235)的生长。 容纳缓冲层(235)与下面的硅晶片和上覆单晶材料层晶格匹配。 通过非晶界面层(234)处理容纳缓冲层(235)和底层硅衬底(222)之间的任何晶格失配。 使用单晶介电材料作为层有助于片上高频通信设备的制造,例如与集成电路中的化合物半导体材料直接接口的介质谐振器。
    • 3. 发明申请
    • OSCILLATING REFERENCE SIGNAL GENERATOR
    • 振荡参考信号发生器
    • WO02099482A3
    • 2003-03-13
    • PCT/US0150688
    • 2001-12-27
    • MOTOROLA INC
    • CRAIG RONALD AIRWIN JAMES SFOLEY BARBARA M
    • H01L21/20H01L21/8258H01L27/06H01L27/15H01S5/026H01S5/042H03B17/00
    • H03B17/00H01L21/02381H01L21/02488H01L21/02505H01L21/02521H01L21/8258H01L27/0605H01L27/15H01S5/0261H01S5/0427
    • An apparatus for generating an oscillating reference signal at a reference frequency includes: (a) a light conveying element (4214) having a first end and a second end; the light conveying element (4214) conveying substantially all light received or reflected at one end to the other end; the light conveying element (4214) having a light transmission path intermediate the first end and the second end; the transmission path being related to the reference frequency; (b) a light transmitting element (4216) oriented to introduce light into the light conveying element (4214) at one end of the light conveying element; and (c) a light receiving element (4218) oriented to receive the transmitted light at one end of the light conveying element. The light conveying element (4216), the light transmitting element and the light receiving element (4218) are implemented in a monolithic structure arranged on a single substrate (4212).
    • 用于产生参考频率的振荡参考信号的装置包括:(a)具有第一端和第二端的光传输元件(4214); 所述光输送元件(4214)基本上将在一端接收或反射的所有光传送到另一端; 光输送元件(4214)具有在第一端和第二端之间的光传输路径; 所述传输路径与所述参考频率相关; (b)定向成将光引入光传输元件(4214)的光传输元件(4216)的光传输元件的一端; 和(c)定向为在光输送元件的一端处接收透射光的光接收元件(4218)。 光输送元件(4216),透光元件和光接收元件(4218)以布置在单个基板(4212)上的整体结构来实现。