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1. 发明申请

WO1991014027A1 SYSTEM FOR CONTROLLING CRYSTAL GROWTH APPARATUS AND MELT REPLENISHMENT SYSTEM THEREFOR 审中-公开
标题翻译：用于控制晶体生长装置和熔体补偿系统的系统
公开(公告)号：WO1991014027A1
公开(公告)日：1991-09-19
申请号：PCT/US1991001153
申请日：1991-02-21
申请人： MOBIL SOLAR ENERGY CORPORATION
发明人： MOBIL SOLAR ENERGY CORPORATION , MACKINTOSH, Brian, H. , ERISS, Lawrence
IPC分类号： C30B15/34
CPC分类号： C30B15/00 , C30B15/02 , C30B15/28 , C30B15/34 , C30B29/66 , Y10T117/104 , Y10T117/1056
摘要： A control system for controlling the operation of a system (18) for replenishing the melt in the crucible (24) of an apparatus (20) for growing tubular crystalline bodies (22) of a selected material. The melt replenishment system (18) comprises a container (302) for storing solid particles of said selected material and a dispenser (306) for transporting the particles from the container (302) to the crucible (24). The control system controls the rate at which the dispenser (306) transports particles from the container (302) to the crucible (24) based on the weight of the solid particles stored in the container (302), the weight of the crystalline body (22), and the pressure inside the crystalline body (22). Additionally, the control system may be adapted to control the temperature of the crucible heater (26) of the apparatus (20). Compensation is provided by this invention for weight measurement errors that are created by pressure fluctuations within the tubular crystalline body (22).
摘要翻译：一种用于控制用于补充用于生长所选材料的管状结晶体（22）的装置（20）的坩埚（24）中的熔体的系统（18）的操作的控制系统。熔体补充系统（18）包括用于储存所述选定材料的固体颗粒的容器（302）和用于将颗粒从容器（302）输送到坩埚（24）的分配器（306）。控制系统控制分配器（306）基于存储在容器（302）中的固体颗粒的重量，结晶体的重量（306）将颗粒从容器（302）输送到坩埚（24）的速率 22）和晶体内部的压力（22）。另外，控制系统可以适于控制装置（20）的坩埚加热器（26）的温度。由本发明提供的用于由管状结晶体（22）内的压力波动产生的重量测量误差的补偿。

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