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1. 发明申请

WO2006014203A1 FUNCTIONAL MATERIAL FOR MICRO-MECHANICAL SYSTEMS 审中-公开
标题翻译：微机械系统的功能材料
公开(公告)号：WO2006014203A1
公开(公告)日：2006-02-09
申请号：PCT/US2005/018913
申请日：2005-05-27
申请人： MASSACHUSETTS INSTITUTE OF TECHNOLOGY , SENEVIRATNE, Dilan , NIELSON, Gregory, N. , BARBASTATHIS, George , TULLER, Harry, L.
发明人： SENEVIRATNE, Dilan , NIELSON, Gregory, N. , BARBASTATHIS, George , TULLER, Harry, L.
IPC分类号： B81B3/00
CPC分类号： B81B3/0016 , B81B3/0024 , B81B2201/032 , G11C23/00
摘要： A MEMS device includes a first material structure. A second material structure includes TiN. The second material structure is moveable relative to the first material structure.
摘要翻译： MEMS器件包括第一材料结构。第二种材料结构包括TiN。第二材料结构可相对于第一材料结构移动。

2. 发明申请

WO2005069331A1 LOW-VOLTAGE MICRO-SWITCH ACTUATION TECHNIQUE 审中-公开
标题翻译：低电压微动开关技术
公开(公告)号：WO2005069331A1
公开(公告)日：2005-07-28
申请号：PCT/US2004/036359
申请日：2004-11-02
申请人： MASSACHUSETTS INSTITUTE OF TECHNOLOGY , PIRELLI & C. S.P.A.? , NIELSON, Gregory, N. , BARBASTATHIS, George
发明人： NIELSON, Gregory, N. , BARBASTATHIS, George
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H47/00 , H01H2059/0054
摘要： An electro-mechanical switch structure includes at least one fixed electrode and a free electrode which is movable in the structure with a voltage potential applied between each fixed electrode and the free, movable electrode. The voltage potentials applied between each fixed electrode and the movable electrode are modulated to actuate the electro-mechanical switch structure.
摘要翻译：机电开关结构包括至少一个固定电极和自由电极，该电极可在结构中移动，在每个固定电极和自由的可移动电极之间施加电压电位。施加在每个固定电极和可动电极之间的电压被调制以致动机电开关结构。

3. 发明申请

WO2005103784A1 SYSTEM AND METHOD FOR PROVIDING FAST, LOW VOLTAGE INTEGRATED OPTICAL ELEMENTS 审中-公开
标题翻译：用于提供快速，低电压综合光学元件的系统和方法
公开(公告)号：WO2005103784A1
公开(公告)日：2005-11-03
申请号：PCT/US2005/013377
申请日：2005-04-20
申请人： MASSACHUSETTS INSTITUTE OF TECHNOLOGY , NIELSON, Gregory, N. , BARBASTATHIS, George
发明人： NIELSON, Gregory, N. , BARBASTATHIS, George
IPC分类号： G02B6/35
CPC分类号： G02B6/3536 , G02B6/29343 , G02B6/3508 , G02B6/356 , G02B6/357 , G02B6/3584 , G02B6/3594 , G02B6/3596
摘要： A switching system is disclosed for an optical signal. The switching system includes a first optical waveguide coupled to a first electrode, a second electrode, and a second optical waveguide. The second optical waveguide is coupled to a ovable electrode. The movable electrode is supported by a support structure and is positioned with respect to the first and second electrodes so that the position of the movable electrode may be selectively placed in either a first closed state or a second open state defined by the first and second electrodes under application of a voltage with respect to one of the first and second electrodes. The first closed state provides that the first and second optical waveguides are sufficiently close to each other to provide optical coupling therebetween while the second open state provides that the first and second optical communication channels are not ufficiently close to each other to provide optical coupling therebetween, or provide some different amount of optical coupling than in the first closed state.
摘要翻译：公开了一种用于光信号的开关系统。开关系统包括耦合到第一电极，第二电极和第二光波导的第一光波导。第二光波导耦合到可电极。可移动电极由支撑结构支撑并且相对于第一和第二电极定位，使得可动电极的位置可以选择性地放置在由第一和第二电极限定的第一闭合状态或第二开放状态在相对于所述第一和第二电极之一施加电压的情况下。第一关闭状态使得第一和第二光波导彼此充分接近以在其间提供光耦合，而第二开放状态规定第一和第二光通信通道彼此不够靠近以提供光耦合，或提供与第一关闭状态相比不同量的光耦合。

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