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1. 发明申请

WO1988005166A1 TURBULENT SHEAR FORCE MICROSENSOR 审中-公开
标题翻译： TURBULENT SHEAR力量微型传感器
公开(公告)号：WO1988005166A1
公开(公告)日：1988-07-14
申请号：PCT/US1988000044
申请日：1988-01-07
申请人： MASSACHUSETTS INSTITUTE OF TECHNOLOGY
发明人： MASSACHUSETTS INSTITUTE OF TECHNOLOGY , HARITONIDIS, Joseph, H. , HOWE, Roger, T. , SCHMIDT, Martin, A. , SENTURIA, Stephen, D.
IPC分类号： G01N13/00
CPC分类号： G01N13/00
摘要： A microbridge is used for the accurate measuring of time varying shear forces in the presence of fluctuating pressure. A microdimensioned plate (14) is suspended by arms (16) to form a microbridge. The microdimensions enable the smallest turbulence scales of interest to be sensed uniformally throughout the entire surface of the plate (14). The cavity (21) beneath the microbridge is so small that a viscous drag is created in the air within the cavity and dampens normal movement of the plate. The microdimensions in conjunction with the damping effect of the cavity enable the sensor to be substantially insensitive to pressure and thus sense lateral forces independent of normal forces. The microbridge sensor is fabricated by surface micromachining. A sacrificial layer is deposited over a substrate. A structural layer is deposited and patterned to form the plate and support arms over the sacrificial layer. The cavity is formed by a selective etchant removing the sacrificial layer and leaving the rest of the microbridge structure suspended above the substrate. In a differential capacitance readout scheme, a conducting layer in the plate of the microbridge is capacitively coupled with conductors in the substrate. A sensed change in capacitive coupling generates an indication of plate deflection and thereby shear stress independent of vertical movement. Optical readout schemes may also be employed and are readily incorporated in the fabrication process. A mounting member presses the microbridge sensor into a holding plate which fits in a matching slot flush with the target wall.
摘要翻译：在存在波动压力的情况下，使用微桥来精确测量时变剪切力。微尺寸板（14）由臂（16）悬挂以形成微桥。微尺寸使得能够在板（14）的整个表面均匀地感测到感兴趣的最小湍流尺度。微桥下面的空腔（21）非常小，使得在空腔内的空气中产生粘性阻力并阻止板的正常运动。结合腔的阻尼效应的微尺寸使得传感器对压力基本上不敏感，并因此感测与法向力无关的侧向力。微桥传感器通过表面微加工制造。牺牲层沉积在衬底上。沉积并图案化结构层以在牺牲层上形成板和支撑臂。通过选择性蚀刻剂除去该牺牲层并使悬浮在衬底上方的微桥结构的其余部分形成空腔。在差分电容读出方案中，微桥板中的导电层与衬底中的导体电容耦合。感测到的电容耦合变化产生板偏转的指示，从而产生与垂直运动无关的剪切应力。也可以采用光学读出方案，并且容易地结合在制造工艺中。安装构件将微桥传感器压入保持板，该保持板适合与目标壁齐平的匹配槽。

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