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1. 发明申请

WO2019224232A1 METHOD AND APPARATUS FOR CHECKING DIMENSIONS OF A MECHANICAL PART 审中-公开
公开(公告)号：WO2019224232A1
公开(公告)日：2019-11-28
申请号：PCT/EP2019/063182
申请日：2019-05-22
申请人： MARPOSS SOCIETA' PER AZIONI
发明人： PARESCHI, Stefano
IPC分类号： G01B5/18
摘要： An apparatus for checking the length (H) of a chamfer (7) delimited by a first surface (5) and by an edge (S), comprises two feelers (15, 25) - movably connected to a same supporting frame (20) - and respective transducers (16,26). The transducers supply signals (T1, T2) indicative of displacements of the respective feelers along mutually perpendicular directions (Y, X). A checking method includes moving the supporting frame at a constant speed so that, during the movement, one of the feelers scans the chamfer and the other cooperates with the first surface. The signals of the respective transducers are acquired and transmitted synchronously to a processing unit (40) which processes them together with information on the mutual position of the two feelers to obtain the length of the chamfer.

2. 发明申请

WO2015166035A1 APPARATUS AND METHOD FOR CHECKING THE POSITION AND/OR DIMENSIONS OF A WORKPIECE 审中-公开
标题翻译：检查工件的位置和/或尺寸的装置和方法
公开(公告)号：WO2015166035A1
公开(公告)日：2015-11-05
申请号：PCT/EP2015/059494
申请日：2015-04-30
申请人： MARPOSS SOCIETA' PER AZIONI
发明人： PARESCHI, Stefano , MARTELLI, Samuele , CIPRIANI, Riccardo
IPC分类号： G01B5/20
CPC分类号： G01B5/202 , G01B5/166
摘要： An apparatus and a method for checking the position and/or dimensions of a workpiece, more specifically dimensions of teeth (T) of gears, make use of a touch trigger probe (1) having a determined pre-stroke (Rp) and driving and detecting devices (11) to check a position of the probe in a reference system (9). A feeler (7) of the probe approaches and contacts a surface (S) of the tooth to be checked along a checking direction (Dc) that is inclined with respect to a direction (Do) perpendicular to the same surface. The position of a point (P) on the surface of the tooth is detected on the basis of the position (XC) of the center (C) of the feeler when the contact takes place that, in its turn, is based on the indication provided by the driving and detecting devices and a processing that takes into account the pre-stroke and the angular arrangement (P) of the checking direction. Specific methods for checking the tooth thickness or other dimensions of the gear include additional steps.
摘要翻译：用于检查工件的位置和/或尺寸的装置和方法，更具体地说，是齿轮齿（T）的尺寸，利用具有确定的前冲程（Rp）的触发式探针（1）和驱动和检测装置（11）以检查探针在参考系（9）中的位置。探头的探测器（7）沿着相对于垂直于同一表面的方向（Do）倾斜的检查方向（Dc）接近并接触待检查的牙齿的表面（S）。基于触点发生时的触点的中心（C）的位置（XC）来检测点（P）在牙齿表面上的位置，该位置反过来是基于指示由驱动和检测装置提供，以及考虑到检查方向的前冲程和角度排列（P）的处理。用于检查齿厚度或齿轮的其他尺寸的具体方法包括附加步骤。

3. 发明申请

WO2015011243A1 METHOD AND APPARATUS FOR OPTICALLY CHECKING BY INTERFEROMETRY THE THICKNESS OF AN OBJECT BEING MACHINED 审中-公开
标题翻译：通过干涉测量对象物体的厚度进行光学检查的方法和装置
公开(公告)号：WO2015011243A1
公开(公告)日：2015-01-29
申请号：PCT/EP2014/065963
申请日：2014-07-24
申请人： MARPOSS SOCIETA' PER AZIONI
发明人： PARESCHI, Stefano
IPC分类号： G01B9/02 , G01B11/06 , B24B49/12 , H01L21/66
CPC分类号： G01B11/06 , B24B37/013 , B24B49/12 , G01B9/02021 , G01B9/02025 , G01B9/02044 , G01B9/0209 , G01B11/0675 , H01L22/12 , H01L22/26
摘要： A method for optically checking by interferometry the thickness of an object (2) being machined comprises a phase of direct checking wherein the spectrum of the result of interference between primary reflected radiations (R1) generated by reflection of incident radiations (I) on an external surface (16) and secondary reflected radiations (R2) generated by reflection on an internal surface of discontinuity (17) of the object is analysed, and a preliminary phase wherein information relative to the variation of a virtual thickness (D) delimited and defined by a reference surface (18) and the external surface of the object, indicative of thickness variations of the object being machined. In the preliminary phase, the processing is based on the analysis of the spectrum of the result of interference between primary reflected radiations and reference reflected radiations (Rref) generated by the reflection of the incident radiations on the reference surface, that defines the length of a reference optical path. An apparatus that implements such method for optically checking includes an optical probe (6) that receives and detects the primary, secondary and reference reflected radiations, and a spectrometer (5) that analyses the spectrum of the result of interference.
摘要翻译：用于通过干涉测量来对被加工物体（2）的厚度进行光学检查的方法包括直接检查的相位，其中通过在外部的入射辐射（I）的反射产生的主反射辐射（R1）之间的干涉结果的频谱分析通过在物体的不连续（17）的内表面上的反射产生的表面（16）和二次反射辐射（R2），以及初步阶段，其中相对于虚拟厚度（D）的变化的信息被界定和限定参考表面（18）和物体的外表面，指示被加工物体的厚度变化。在初步阶段，处理是基于主反射辐射与参考反射辐射之间的干涉结果的频谱分析（Rref），其通过参考表面上的入射辐射的反射而产生，其定义为参考光路。实现这种用于光学检查的方法的装置包括接收和检测初级，次级和参考反射辐射的光学探头（6）和分析干扰结果的光谱的光谱仪（5）。

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