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1. 发明申请

WO2015032955A1 TARGET PROCESSING UNIT 审中-公开
标题翻译：目标处理单位
公开(公告)号：WO2015032955A1
公开(公告)日：2015-03-12
申请号：PCT/EP2014/069116
申请日：2014-09-08
申请人： MAPPER LITHOGRAPHY IP B.V.
发明人： KONING, Johan Joost , VAN DEN BERGEN, David Johannes
IPC分类号： G03F7/20 , H01J37/20 , H01J37/317 , H01J37/30 , H05K7/14 , G02B6/36
CPC分类号： H01J37/023 , B01J19/12 , G03F7/708 , G03F7/70825 , G03F7/70833 , G03F7/70891 , G03F7/709 , G03F7/70975 , H01J37/10 , H01J37/20 , H01J37/3007 , H01J37/3177
摘要： The invention relates to a projection lens assembly for directing a beam toward a target. This assembly includes a lens support body (52) that spans a plane (P), and has a connection region (58) and a lateral edge (56). The lens support body is arranged for insertion into a frame (42) of a processing unit along an insertion direction (X) parallel with the plane (P). The projection lens assembly includes conduits (60-64) emanating from the connection region, and a conduit guiding body (70-81) for accommodating the conduits. The guiding body includes a first guiding portion (72) for guiding the conduits from the connection region, along the plane to a lateral region (B) beyond the lateral edge. The guiding body also includes a second guiding portion (78) for guiding the conduits from the lateral region (B) toward a tilted edge (79) of the conduit guiding body.
摘要翻译：本发明涉及一种用于将光束引向目标的投影透镜组件。该组件包括跨越平面（P）的透镜支撑体（52），并且具有连接区域（58）和侧边缘（56）。透镜支撑体被布置成沿着与平面（P）平行的插入方向（X）插入到处理单元的框架（42）中。投影透镜组件包括从连接区域发出的导管（60-64）和用于容纳导管的导管引导体（70-81）。引导体包括第一引导部分（72），用于将管道从连接区域沿着该平面引导到横向边缘外侧的横向区域（B）。引导体还包括用于将导管从横向区域（B）引导到导管引导体的倾斜边缘（79）的第二引导部分（78）。

2. 发明申请

WO2014166970A1 CABINET FOR ELECTRONIC EQUIPMENT 审中-公开
标题翻译：电子设备柜
公开(公告)号：WO2014166970A1
公开(公告)日：2014-10-16
申请号：PCT/EP2014/057099
申请日：2014-04-08
申请人： MAPPER LITHOGRAPHY IP B.V.
发明人： VAN DEN BERGEN, David Johannes
IPC分类号： G03F7/20
CPC分类号： H05K7/20754 , G03F7/708 , G03F7/70991 , H01J37/3174 , H01J2237/31793 , H05K7/20145 , H05K7/20763
摘要： Cabinet (10) for accommodating electronic equipment (46). The cabinet comprises a casing (12) with an access opening (24) at a access side (23), and a second side (17) opposite to the access side, an electronic equipment rack (40a), a first plenum space (35) between the access side and the rack, and a channel (36) in fluid communication with the second side and the first plenum space. The cabinet encloses a first cooling medium (27) that is in thermal communication with the electronic equipment. A cooling arrangement (29) is provided at the second side, which comprises a flow generator (30) for generating a flow (Φf) of the first cooling medium from the first plenum space across the electronic equipment toward the second side, and a heat exchanger (31) for extracting heat from the first cooling medium. The first cooling medium is subsequently recirculated through the channel to the first plenum space.
摘要翻译：用于容纳电子设备（46）的机柜（10）。所述机柜包括在入口侧（23）具有进入开口（24）的壳体（12）和与所述进入侧相对的第二侧（17），电子设备支架（40a），第一增压空间（35））和与所述第二侧和所述第一集气室空间流体连通的通道（36）。机柜包围与电子设备热连通的第一冷却介质（27）。冷却装置（29）设置在第二侧，其包括流量发生器（30），用于从跨过电子设备的第一集气室向第二侧产生第一冷却介质的流量（Φf）交换器（31），用于从第一冷却介质提取热量。第一冷却介质随后通过通道再循环到第一集气室。

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