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    • 3. 发明申请
    • SUPERCONDUCTING QUANTUM INTERFERENCE DEVICE (SQUID) SENSOR, AND METHOD FOR MANUFACTURING SAME
    • 超导量子干涉装置(SQUID)传感器及其制造方法
    • WO2011034280A3
    • 2011-05-12
    • PCT/KR2010005099
    • 2010-08-03
    • KOREA RES INST OF STANDARDSLEE YONG HOYU KWON KYUKIM JIN MOKKWON HYUK CHANKIM KI WOONG
    • LEE YONG HOYU KWON KYUKIM JIN MOKKWON HYUK CHANKIM KI WOONG
    • G01R33/035G01R3/00
    • G01R33/035
    • The present invention relates to a superconducting quantum interference device (SQUID) sensor and to a method for manufacturing same. The SQUID sensor of the present invention comprises a wound detection coil for detecting a fine magnetic field and generating current, and a thin film SQUID having input coils, each end of which is connected to conductive connection pads, wherein both ends of the detection coil and the conductive connection pad are directly electrically connected via a superconducting connection line. Meanwhile, the method for manufacturing a SQUID sensor of the present invention comprises a first step of providing a SQUID sensor comprising a wound detection coil for detecting a fine magnetic field and generating current, and a thin film SQUID having input coils, each end of which is connected to conductive connection pads, and electrically connecting one end of a superconducting connection line to the conductive connection pad; a second step of fixing both ends of the wound detection coil onto a support by an adhesive; and a third step of electrically connecting, to the other end of the superconducting connection line, both ends of the detection coil fixed by the adhesive.
    • 超导量子干涉装置(SQUID)传感器及其制造方法技术领域本发明涉及超导量子干涉装置(SQUID)传感器及其制造方法。 本发明的SQUID传感器包括用于检测微小磁场并产生电流的伤口检测线圈和具有输入线圈的薄膜SQUID,所述输入线圈的每个端部连接到导电连接垫,其中检测线圈的两端和 导电连接焊盘通过超导连接线直接电连接。 同时,本发明的用于制造SQUID传感器的方法包括:提供SQUID传感器的第一步骤,所述SQUID传感器包括用于检测微小磁场并产生电流的伤口检测线圈和具有输入线圈的薄膜SQUID,所述SQUID的每一端 连接到导电连接焊盘,并且将超导连接线的一端电连接到导电连接焊盘; 第二步骤,通过粘合剂将伤口检测线圈的两端固定到支撑件上; 以及第三步骤,将通过粘合剂固定的检测线圈的两端电连接到超导连接线的另一端。