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    • 9. 发明申请
    • SUBSTRATE CONVEYING DEVICE
    • 基板输送装置
    • WO2010005238A3
    • 2010-04-22
    • PCT/KR2009003739
    • 2009-07-08
    • LG ELECTRONICS INCKIM DONG CHEOLNOH MIN SEOKKWON YEONG HYEONKWAK JIN SAMMOON SUNG HOHAN SEUNG HEELEE HYUN WOO
    • KIM DONG CHEOLNOH MIN SEOKKWON YEONG HYEONKWAK JIN SAMMOON SUNG HOHAN SEUNG HEELEE HYUN WOO
    • H04B7/26
    • H04W52/146H04W52/242H04W52/42
    • One problem associated with substrate-conveying devices is that, when a first substrate (1) has been placed on a supply lift (11) and is being conveyed from an upper workbench (10) to a lower workbench (20), a wait is imposed on a second substrate (2) which has finished undergoing an ultraviolet cleaning process on the upper workbench (10) as shown in Figure 2, and, consequently, productivity is reduced due to the delay in supplying other substrates through a supply and discharge part (15). The present invention relates to a substrate conveying device which conveys a substrate supplied to an upper first position to a lower second position and moves and discharges the substrate conveyed to the second lower position by means of a conveying rail, wherein first and second upper rotational supports and first and second lower rotational supports rotate in a state in which they are vertically spaced apart from each other.
    • 与衬底输送装置相关的一个问题是,当第一衬底(1)已经被放置在供给升降机(11)上并被从上部工作台(10)传送到下部工作台(20)时,等待是 施加在已经在上部工作台(10)上完成了紫外线清洁处理的第二基板(2),如图2所示,因此,由于通过供给和排出部分供应其它基板的延迟,生产率降低 (15)。 本发明涉及一种基板输送装置,该基板输送装置将提供给上部第一位置的基板输送到下部第二位置,并且借助于输送轨道移动和排出输送到第二下部位置的基板,其中,第一和第二上部旋转支撑 并且第一和第二下旋转支撑件在它们彼此垂直间隔开的状态下旋转。