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1. 发明申请

WO2011008376A2 DETERMINING PLASMA PROCESSING SYSTEM READINESS WITHOUT GENERATING PLASMA 审中-公开
标题翻译：确定等离子体处理系统无需生成等离子体
公开(公告)号：WO2011008376A2
公开(公告)日：2011-01-20
申请号：PCT/US2010/037936
申请日：2010-06-09
申请人： LAM RESEARCH CORPORATION , CHOI, Brian , YUN, Gunsu , VENUGOPAL, Vijayakumar C. , WILLIAMS, Norman
发明人： CHOI, Brian , YUN, Gunsu , VENUGOPAL, Vijayakumar C. , WILLIAMS, Norman
IPC分类号： H01L21/66 , H01L21/02 , H01L21/00
CPC分类号： H01J37/32935
摘要： A test system for facilitating determining whether a plasma processing system (which includes a plasma processing chamber) is ready for processing wafers. The test system may include a computer-readable medium storing at least a test program. The test program may include code for receiving electric parameter values derived from signals detected by at least one sensor when no plasma is present in the plasma processing chamber. The test program may also include code for generating electric model parameter values using the electric parameter values and a mathematical model. The test program may also include code for comparing the electric model parameter values with baseline model parameter value information. The test program may also include code for determining readiness of the plasma processing system based on the comparison. The test system may also include circuit hardware for performing one or more tasks associated with the test program.
摘要翻译：用于有助于确定等离子体处理系统（其包括等离子体处理室）是否准备好用于处理晶片的测试系统。测试系统可以包括至少存储测试程序的计算机可读介质。测试程序可以包括用于接收由等离子体处理室中没有等离子体时由至少一个传感器检测的信号导出的电参数值的代码。测试程序还可以包括使用电参数值和数学模型产生电模型参数值的代码。测试程序还可以包括用于将电模型参数值与基准模型参数值信息进行比较的代码。测试程序还可以包括用于基于比较来确定等离子体处理系统的准备状态的代码。测试系统还可以包括用于执行与测试程序相关联的一个或多个任务的电路硬件。

2. 发明申请

WO2011017716A3 SEASONING PLASMA PROCESSING SYSTEMS 审中-公开
公开(公告)号：WO2011017716A3
公开(公告)日：2011-02-10
申请号：PCT/US2010/046757
申请日：2010-08-26
申请人： LAM RESEARCH CORPORATION , CHOI, Brian , VENUGOPAL, Vijayakumar C.
发明人： CHOI, Brian , VENUGOPAL, Vijayakumar C.
IPC分类号： H01L21/00 , H01L21/3065 , H01L21/205
摘要： A system for facilitating seasoning a plasma processing chamber. The system includes a computer-readable medium storing a chamber seasoning program (or CS program). The CS program includes code for receiving a first plurality of values and a second plurality of values of a set of parameters related to operation of the plasma processing chamber. The CS program includes code for ascertaining, using the first plurality of values and the second plurality of values, whether current values of the parameters have stabilized. The CS program also includes code for determining, using the second plurality of values but not the first plurality of values, whether the current values of parameters have stabilized within a predetermined range. The system may also include circuit hardware for performing one or more tasks associated with the CS program.

3. 发明申请

WO2006078940A3 ALLOSTERIC CONTROL OF PROTEINS BY MANIPULATING MECHANICAL TENSION 审中-公开
公开(公告)号：WO2006078940A3
公开(公告)日：2006-07-27
申请号：PCT/US2006/002090
申请日：2006-01-20
申请人： THE REGENTS OF THE UNIVERSITY OF CALIFORNIA , ZOCCHI, Giovanni , CHOI, Brian
发明人： ZOCCHI, Giovanni , CHOI, Brian
IPC分类号： G01N33/53 , C07K1/107 , C12Q1/25
摘要： A method of altering the conformation of a polypeptide having a known three- dimensional structure is described. The method comprises attaching a first end of a polymer to a first portion of the polypeptide, attaching a second end of the polymer to a second portion of the polypeptide, and altering the mechanical tension of the polymer, thereby altering the conformation of the polypeptide. The alteration of the conformation of the polypeptide may increase or decrease the binding affinity of the polypeptide for a substrate bound by the polypeptide, or alter the catalytic rate of an enzyme. Typically, the polymer is a polynucleotide or polypeptide.

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