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1. 发明申请

WO2012031684A8 CIRCUIT ARRANGEMENT FOR PRODUCING RADIO-FREQUENCY OUTPUT SIGNALS FORMED BY A BROADBAND FREQUENCY RAMP 审中-公开
标题翻译：电路，用于产生宽带频率斜坡侧高频输出入信号
公开(公告)号：WO2012031684A8
公开(公告)日：2012-09-20
申请号：PCT/EP2011004209
申请日：2011-08-22
申请人： KROHNE MESSTECHNIK GMBH , POHL NILS , MUSCH THOMAS
发明人： POHL NILS , MUSCH THOMAS
IPC分类号： H03L7/185 , H03L7/23
CPC分类号： H03L7/185 , H03L7/235 , H03L2207/05 , H03L2207/12
摘要： A circuit arrangement for production of radio-frequency output signals formed by a broadband frequency ramp is described and illustrated, having a reference oscillator (1), a phase detector (2), a loop filter (3), a VC oscillator (4) for production of the output signals, a frequency divider (5), a step-down mixer (7) and a local oscillator (8) for production of a local oscillator signal, wherein the reference oscillator (1), the phase detector (2), the loop filter (3), the VC oscillator (4), the frequency divider (5) and the step-down mixer (7) belong to a phase locked loop, the frequency divider (5) and the step-down mixer (7) are located in the feedback path of the phase locked loop, the step-down mixer (7) mixes the output signals and the local oscillator signal, and the frequency of the output signal can be adjusted by variation of the division ratio of the frequency divider (5). According to the invention, the characteristic of the output signal is improved with the aid of the adjustable frequency of the local oscillator signal.
摘要翻译：描述和示出的电路装置，用于产生一个宽频带频率斜坡形成的高频输出信号，包括参考振荡器（1），相位检测器（2），环路滤波器（3），一个VC-振荡器（4），用于产生输出信号，分频器（ 5），一个下转换器（7）和用于产生本地振荡器信号，其中所述参考振荡器（1），相位检测器（2），环路滤波器（3）中，VC-振荡器（4），所述分频器的本地振荡器（8）（5 ）和下变频器（7）属于一个锁相环，分频器（5）和下变频器（7）是在锁相环的反馈路径，所述下混频器（7）通过改变所述分频比混合的输出信号和本地振荡器信号和所述输出信号的频率分频器（5）可调。根据输出信号的特性，通过本振信号的可调频率来改善。

2. 发明申请

WO2012045301A3 DEVICE AND USE OF THE DEVICE FOR MEASURING THE DENSITY AND/OR THE ELECTRON TEMPERATURE AND/OR THE COLLISION FREQUENCY OF A PLASMA 审中-公开
标题翻译：装置和设备的使用测量密度和/或电子温度和/或等离子体频率的PUSH
公开(公告)号：WO2012045301A3
公开(公告)日：2012-06-14
申请号：PCT/DE2011001802
申请日：2011-10-06
申请人： UNIV RUHR BOCHUM , BRINKMANN RALF PETER , OBERRATH JENS , AWAKOWICZ PETER , LAPKE MARTIN , MUSCH THOMAS , MUSSENBROCK THOMAS , ROLFES ILONA , SCHULZ CHRISTIAN , STORCH ROBERT , STYRNOLL TIM , ZIETZ CHRISTIAN
发明人： BRINKMANN RALF PETER , OBERRATH JENS , AWAKOWICZ PETER , LAPKE MARTIN , MUSCH THOMAS , MUSSENBROCK THOMAS , ROLFES ILONA , SCHULZ CHRISTIAN , STORCH ROBERT , STYRNOLL TIM , ZIETZ CHRISTIAN
IPC分类号： H05H1/00 , H01P5/10
CPC分类号： H05H1/0037 , H01P3/085 , H01P5/10 , H05H1/0012 , H05H1/0081
摘要： The invention relates to a device for measuring the density of a plasma, comprising means for determining an impulse response to a high-frequency signal coupled into a plasma, means for calculating the density and/or the electron temperature and/or the collision frequency as a function of the impulse response, a probe (1) that can be introduced into the plasma and that has a probe head (2) and a probe shaft (5), which is connected to a signal generator for electrically coupling a high-frequency signal into the probe head (2), wherein the probe head (2) has a jacket (7) and a probe core (8) enclosed by the jacket (7), the surface of the probe core (8) having electrode areas (3, 4; 3a, 4a) of opposite polarity that are insulated from each other, characterized in that the probe (1) has a balun (9), which is effective in the transition between the probe head (2) and an electrically unbalanced high-frequency signal feed (6) in order to convert electrically unbalanced signals into balanced signals.
摘要翻译：装置用于测量等离子体的密度，包括：用于确定到一个注入等离子体的高频信号的脉冲响应的装置，以及用于计算的密度和/或电子温度和/或碰撞的频率的脉冲响应的函数，可插入到等离子体探针（1 ）（与探针头2）和探针轴（5），其连接到一个信号发生器，用于在所述探头（2）电耦合的射频信号，其中所述探针头（2）具有外壳（7）和一个（从壳体7 有）包围探针芯（8），其中所述探针芯（8）相互绝缘的电极部（3，4的表面上;相反极性的3A，4A），其特征在于，所述探针（1）包括一个平衡 - 不平衡变换器（9），其是在用于将不对称电信号探针头（2）和电不平衡的高频信号馈送（6）之间的过渡是有效的平衡信号。

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