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    • 4. 发明申请
    • A CMUT ARRAY COMPRISING AN ACOUSTIC WINDOW LAYER
    • 包含声学窗口层的CMUT阵列
    • WO2016139103A1
    • 2016-09-09
    • PCT/EP2016/053899
    • 2016-02-25
    • KONINKLIJKE PHILIPS N.V.
    • BECKERS, Lucas Johannes Anna MariaHAKKENS, Franciscus Johannes GerardusDIRKSEN, Peter
    • B06B1/02
    • B06B1/06A61B8/4209B06B1/0292B06B1/067B32B7/12G10K11/02G10K11/30H01L41/083
    • An ultrasound array for acoustic wave transmission comprising at least one capacitive micro-machined ultrasound transducer (CMUT) cell (6), wherein the CMUT cell comprises a substrate (4) having a first electrode (7); a cell membrane (5) having a second electrode (7'), which opposes the first electrode with a cavity (8) there between, wherein the membrane is arranged to vibrate upon the cell activation; and an acoustic window layer (13), overlaying the cell membrane, and having an inner surface opposing the cell membrane and an outer surface; the acoustic window layer is in a direct contact with the cell membrane and comprises a first layer comprising molecules of antioxidant and a polymeric material, wherein the polymeric material consists of hydrogen and carbon atoms and has a density equal or 3 below 0.95 g/cm and an acoustic impedance equal or above 1.4 MRayl. The array may further comprise comprising at least one drive circuit coupled to the cell and adapted to (a) bring the membrane into a collapsed state in which the membrane is collapsed to the substrate in the central part, by applying a d.c. voltage over the first and the second electrodes of the at least one CMUT cell, and (b) activate the CMUT cell by applying an a.c. voltage having a CMUT operating frequency over the first and the second electrodes of the at least one said CMUT cell. This acoustic window layer provides an improved acoustic performance, such as wide bandwidth and low attenuation, in application with the CMUT based array, especially in the collapsed operation mode.
    • 一种用于声波传播的超声波阵列,包括至少一个电容微加工超声换能器(CMUT)单元(6),其中所述CMUT单元包括具有第一电极(7)的基板(4); 具有第二电极(7')的细胞膜(5),所述第二电极与所述第一电极相对,其间具有腔(8),其中所述膜布置成在所述细胞活化时振动; 和覆盖所述细胞膜的声窗口层(13),并且具有与所述细胞膜相对的内表面和外表面; 所述声窗层与所述细胞膜直接接触并且包括包含抗氧化剂和聚合物材料分子的第一层,其中所述聚合物材料由氢和碳原子组成,并且具有等于或低于0.95g / cm 3的密度,以及 声阻抗等于或高于1.4 MRayl。 所述阵列还可以包括至少一个驱动电路,其耦合到所述电池并且适于(a)通过施加直流电流使所述膜进入折叠状态,其中所述膜在所述中心部分中被折叠到所述基板。 电压超过所述至少一个CMUT单元的所述第一和第二电极,以及(b)通过应用a.c.激活所述CMUT单元。 电压具有超过所述至少一个所述CMUT单元的第一和第二电极的CMUT工作频率。 在使用基于CMUT的阵列的应用中,这种声窗口层提供了改进的声学性能,例如宽带宽和低衰减,特别是在塌缩操作模式中。
    • 6. 发明申请
    • A CMUT ARRAY COMPRISING AN ACOUSTIC WINDOW LAYER
    • 包含声学窗口层的CMUT阵列
    • WO2016139087A1
    • 2016-09-09
    • PCT/EP2016/053799
    • 2016-02-23
    • KONINKLIJKE PHILIPS N.V.
    • BECKERS, Lucas, Johannes, Anna, MariaHAKKENS, Franciscus, Johannes, GerardusDIRKSEN, Peter
    • B06B1/02
    • B06B1/0292G01S7/521G01S15/02
    • An ultrasound array for acoustic wave transmission comprising at least one capacitive micro-machined ultrasound transducer (CMUT) cell (6), wherein the CMUT cell comprises a substrate (4); a first electrode (7); a cell membrane (5) having a second electrode (7'), which opposes the first electrode and the substrate with a cavity (8) there between, wherein the membrane is arranged to vibrate upon the cell activation; and an acoustic window layer (13), overlaying the cell membrane, and having an inner surface opposing the cell membrane and an outer surface. The acoustic window layer comprises a first layer comprising molecules of antioxidant and a polymeric material (47) with insulating particles (41) embedded therein, wherein the polymeric material consists of hydrogen and carbon atoms and has a density equal or below 0.95 g/cm 3 and an acoustic impedance equal or above 1.45 MRayl. This acoustic window layer provides an improved acoustic performance, such as wide bandwidth and low attenuation, in application with the CMUT based array.
    • 一种用于声波传输的超声阵列,包括至少一个电容微加工超声换能器(CMUT)单元(6),其中所述CMUT单元包括基底(4); 第一电极(7); 具有第二电极(7')的细胞膜(5),所述第二电极(7')与所述第一电极和所述基板之间具有空腔(8)相对,其中所述膜布置成在所述细胞活化时振动; 和覆盖所述细胞膜的声窗口层(13),并且具有与所述细胞膜相对的内表面和外表面。 声窗层包括包含抗氧化剂分子的第一层和嵌入其中的绝缘颗粒(41)的聚合材料(47),其中聚合物材料由氢和碳原子组成,并且具有等于或低于0.95g / cm 3的密度, 声阻抗等于或高于1.45 MRay1。 在使用基于CMUT的阵列的应用中,该声窗层提供了改进的声学性能,例如宽带宽和低衰减。
    • 7. 发明申请
    • CMUT DEVICE MANUFACTURING METHOD, CMUT DEVICE AND APPARATUS
    • CMUT设备制造方法,CMUT设备和设备
    • WO2015043989A1
    • 2015-04-02
    • PCT/EP2014/069574
    • 2014-09-15
    • KONINKLIJKE PHILIPS N.V.
    • DIRKSEN, PeterMULDER, MarcelLEEUWESTEIN, Adriaan
    • B06B1/02
    • B06B1/0292B81B3/0021B81B2203/0127B81B2203/0315B81C1/00158B81C2201/0109B81C2201/013H02N1/006
    • Disclosed is a method of manufacturing a capacitive micro-machined ultrasonic transducer (CMUT) device comprising a first electrode (112) on a substrate (110) and a second electrode (122) embedded in an electrically insulating membrane, the first electrode and the membrane being separated by a cavity (130) formed by the removal of a sacrificial material (116) in between the first electrode and the membrane, the method comprising forming a membrane portion (22) on the second electrode and a further membrane portion (24) extending from the membrane portion towards the substrate alongside the sacrificial material, wherein the respective thicknesses the membrane portion and the further membrane portion exceed the thickness of the sacrificial material prior to forming said cavity. A CMUT device manufactured in accordance with this method and an apparatus comprising such a CMUT device are also disclosed.
    • 公开了一种制造电容微加工超声波换能器(CMUT)装置的方法,该装置包括在基板(110)上的第一电极(112)和嵌入电绝缘膜中的第二电极(122),第一电极和膜 由通过在第一电极和膜之间移除牺牲材料(116)而形成的空腔(130)隔开,所述方法包括在所述第二电极上形成膜部分(22)和另外的膜部分(24) 在牺牲材料旁边从膜部朝向衬底延伸,其中在形成所述空腔之前,膜部分和另外的膜部分超过牺牲材料的厚度的相应厚度。 还公开了根据该方法制造的CMUT装置和包括这种CMUT装置的装置。
    • 8. 发明申请
    • WAFER AND METHOD OF MANUFACTURING THE SAME
    • 其制造方法及其制造方法
    • WO2013179247A1
    • 2013-12-05
    • PCT/IB2013/054455
    • 2013-05-30
    • KONINKLIJKE PHILIPS N.V.
    • DIRKSEN, Peter
    • B06B1/02B81B3/00
    • H02N1/006B06B1/0292
    • The present invention relates to a wafer (100) being subdivided and separable into a plurality of dies. Each die (110) comprises an array of capacitive micro-machined transducer cells (1). Each cell comprises a substrate (10) comprising a first electrode (11), a membrane (13) comprising a second electrode (14), and a cavity (12) between the substrate (10) and the membrane (13). Each cell (1) of at least a part of the dies (110) comprises a compensating plate (15) on the membrane (13), each compensating plate (15) having a configuration for influencing a bow (h) of the membrane (13). The configurations of the compensating plates (13) vary across the wafer (100). The present invention further relates to a method of manufacturing such a wafer and a method of manufacturing such a die.
    • 本发明涉及被细分并分离成多个管芯的晶片(100)。 每个管芯(110)包括电容微加工的换能器单元(1)的阵列。 每个电池包括包括第一电极(11),包括第二电极(14)的膜(13)和在衬底(10)和膜(13)之间的空腔(12)的衬底(10)。 至少一部分模具(110)的每个单元(1)包括在膜(13)上的补偿板(15),每个补偿板(15)具有用于影响膜的弓(h)的构造( 13)。 补偿板(13)的结构在晶片(100)上变化。 本发明还涉及这种晶片的制造方法及其制造方法。
    • 10. 发明申请
    • BROADBAND ULTRASOUND TRANSDUCER
    • 宽带超声波传感器
    • WO2017216139A1
    • 2017-12-21
    • PCT/EP2017/064363
    • 2017-06-13
    • KONINKLIJKE PHILIPS N.V.
    • SHULEPOV, SergeiTIMMERMANS, Petrus, Henricus, MariaDIRKSEN, Peter
    • B06B1/02
    • A transducer array (10) is disclosed comprising a plurality of CMUT cells (100, 100, 100"), each CMUT cell comprising a first electrode (110) supported by a substrate (101) and a second electrode (120) supported by a membrane suspended over a cavity (105) between the first electrode and the second electrode, the plurality of CMUT cells comprising a first group of CMUT cells (100) each having a membrane comprising a first layer stack (130); and a second group of CMUT cells (100') each having membrane comprising a second layer stack (130'), the second layer stack including a layer (135) of a material having a higher density than any of the layers in the first layer stack. Also disclosed is a device comprising such a transducer array, an ultrasound imaging system including such a transducer array and a method of operating such an ultrasound imaging system.
    • 公开了一种换能器阵列(10),其包括多个CMUT单元(100,100,100“),每个CMUT单元包括由衬底(101)支撑的第一电极(110)和 由悬挂在所述第一电极和所述第二电极之间的空腔(105)上的膜支撑的第二电极(120),所述多个CMUT单元包括第一组CMUT单元(100),每个CMUT单元具有包括第一层堆叠 130); 和第二组CMUT单元(100'),每个CMUT单元具有包括第二层堆叠(130')的膜,所述第二层堆叠包括材料层(135),所述材料具有比所述第一层中的任何层更高的密度 叠加。 还公开了包括这种换能器阵列的装置,包括这种换能器阵列的超声成像系统以及操作这种超声成像系统的方法。