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    • 3. 发明申请
    • PARTICLE SENSOR
    • 粒子传感器
    • WO2011058481A3
    • 2011-07-14
    • PCT/IB2010054998
    • 2010-11-04
    • KONINKL PHILIPS ELECTRONICS NVMARRA JOHANNESVAN DER HOEF SIEBE-JAN
    • MARRA JOHANNESVAN DER HOEF SIEBE-JAN
    • G01N15/02G01N15/06
    • G01N15/0266G01N1/2247
    • The invention relates to a particle sensor for sensing airborne particles, having an improved detection limit for particles larger than about 10 nm, so that it may be used in a clean room of ISO-3 Class standard or higher. The particle sensor (100) comprises an air inlet (110) for entry of an air flow (120) comprising the airborne particles (121), a charging unit (130) for electrically charging at least part of the airborne particles (121) to create electrically charged airborne particles (122), an electrically insulated filtration unit (140) for filtering the electrically charged airborne particles (122) at least partly from the air flow (120), a sensing unit (150) for generating a sensor signal (151) based on the amount of electrically charged airborne particles (122) filtered by the filtration unit (140), and an evaluation unit (160) for deriving, from the sensor signal (151), data relating to the electrically charged airborne particles (122) filtered from the air flow (120) by the filtration unit (140). According to the invention, the particle sensor (100) further comprises a switch (190) between the filtration unit (140) and the sensing unit (150), to enable the particle sensor (100) to be operated in a charge accumulation mode wherein the switch (190) is open during a charge accumulation time to accumulate electric charge in the filtration unit (140), and in a charge release mode wherein the switch (190) is closed during a charge release time to release the accumulated electric charge from the filtration unit (140) into the sensing unit (150), the charge accumulation time being larger than the charge release time by at least a factor of 10.
    • 本发明涉及一种用于检测空气传播颗粒的颗粒传感器,其对大于约10nm的颗粒具有改进的检测极限,使得其可以用于ISO-3等级或更高等级的洁净室。 所述粒子传感器(100)包括用于进入包括所述大气颗粒(121)的气流(120)的进气口(110),用于将至少部分所述大气颗粒(121)充电到 (122),用于至少部分地从气流(120)中过滤带电气载微粒(122)的电绝缘过滤单元(140),感测单元(150),用于产生传感器信号 基于由所述过滤单元(140)过滤的带电空气传播颗粒(122)的量来确定所述带电空气颗粒(122)的量;以及评估单元(160),其从所述传感器信号(151) 122)由过滤单元(140)从空气流(120)过滤。 根据本发明,粒子传感器(100)还包括位于过滤单元(140)和传感单元(150)之间的开关(190),以使得粒子传感器(100)能够以电荷积聚模式运行,其中 在电荷累积时间期间开关(190)断开以累积过滤单元(140)中的电荷,并且在电荷释放模式中,其中开关(190)在电荷释放时间期间闭合以释放来自 过滤单元(140)进入感测单元(150),电荷积累时间比电荷释放时间大至少10倍。
    • 4. 发明申请
    • METHOD OF MANUFACTURING A FIELD EMITTING ELECTRODE
    • 制造现场发射电极的方法
    • WO2004097883A2
    • 2004-11-11
    • PCT/IB2004050506
    • 2004-04-26
    • KONINKL PHILIPS ELECTRONICS NVVINK TEUNIS JMARRA JOHANNES
    • VINK TEUNIS JMARRA JOHANNES
    • H01J1/304H01J9/02H01J9/00
    • H01J9/025B82Y10/00H01J1/304H01J1/3048H01J2201/30469
    • This invention relates to a method of manufacturing an field emission electrode, including a field emission electrode substrate (1) and a plurality of emitter particles (2) arranged on said field emission electrode substrate (1), comprising the steps of: - dispersing said emitter particles (2) as aerosolized emitter particles (2) in a carrier gas stream; - electrically charging said emitter particles (2); and - directing said charged emitter particles (2) in the carrier gas stream via at least one outlet towards the field emission electrode substrate (1) while maintaining an electric field between the substrate (1) and a deposition electrode (10) near the outlet, whereafter said emitter particles (2) are deposited on and adhered to said field emission electrode substrate (1).
    • 本发明涉及一种场致发射电极的制造方法,其包括场发射电极基板(1)和布置在所述场发射电极基板(1)上的多个发射极粒子(2),包括以下步骤: 作为气雾发射体颗粒(2)在载气流中的发射体颗粒(2); - 对所述发射极颗粒(2)进行充电; 以及 - 通过至少一个出口朝向场发射电极基板(1)将所述带电发射体颗粒(2)引导到载气流中,同时保持基板(1)和出口附近的沉积电极(10)之间的电场 之后,所述发射极颗粒(2)沉积在所述场致发射电极基板(1)上并附着在所述场发射电极基板(1)上。