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1. 发明申请

WO2011028807A3 METROLOGY SYSTEMS AND METHODS 审中-公开
标题翻译：计量系统与方法
公开(公告)号：WO2011028807A3
公开(公告)日：2011-06-16
申请号：PCT/US2010047539
申请日：2010-09-01
申请人： KLA TENCOR CORP , KANDEL DANIEL , LEVINSKI VLADIMIR , SVIZHER ALEXANDER , SELIGSON JOEL , HILL ANDREW , BACHAR OHAD , MANASSEN AMNON , CHUANG YUNG-HO ALEX , SELA ILAN , MARKOWITZ MOSHE , NEGRI DARIA , ROTEM EFRAIM
发明人： KANDEL DANIEL , LEVINSKI VLADIMIR , SVIZHER ALEXANDER , SELIGSON JOEL , HILL ANDREW , BACHAR OHAD , MANASSEN AMNON , CHUANG YUNG-HO ALEX , SELA ILAN , MARKOWITZ MOSHE , NEGRI DARIA , ROTEM EFRAIM
IPC分类号： H01L21/66
CPC分类号： G01N21/47 , G01B11/02 , G01B11/0641 , G01B2210/56 , G01N21/211 , G01N21/9501 , G01N21/956 , G01N2021/4792 , G01N2201/06113 , G01N2201/105 , G03F7/70625 , G03F7/70633
摘要： Various metrology systems and methods are provided.
摘要翻译：提供了各种计量系统和方法。

2. 发明申请

WO2011159725A3 DISCRETE POLARIZATION SCATTEROMETRY 审中-公开
标题翻译：离散极化分析
公开(公告)号：WO2011159725A3
公开(公告)日：2012-04-26
申请号：PCT/US2011040389
申请日：2011-06-14
申请人： KLA TENCOR CORP , HILL ANDREW V , MANASSEN AMNON , KANDEL DANIEL , LEVINSKI VLADIMIR , SELIGSON JOEL , SVIZHER ALEXANDER , WANG DAVID Y , ROTTER LAWRENCE D , DE VEER JOHANNES D
发明人： HILL ANDREW V , MANASSEN AMNON , KANDEL DANIEL , LEVINSKI VLADIMIR , SELIGSON JOEL , SVIZHER ALEXANDER , WANG DAVID Y , ROTTER LAWRENCE D , DE VEER JOHANNES D
IPC分类号： H01L21/027 , H01L21/66
CPC分类号： G02B27/141 , G01N21/474 , G01N21/4788 , G01N2021/4792 , G02B27/145 , G03F7/70633
摘要： Systems and methods for discrete polarization scatterometry are provided. One embodiment relates to an optical subsystem of a scatterometer. The optical subsystem includes one or more light sources configured to produce light having different polarizations. The optical subsystem also includes a polarizing beam splitter configured to separate the light into two different light beams having orthogonal and mutually exclusive polarizations. The optical subsystem further includes one or more second optical elements configured to control which one of the two different light beams illuminates the wafer during measurements. The optical subsystem also includes a detection subsystem configured to separately detect two different scattered light beams resulting from illumination of the wafer. The two different scattered light beams have orthogonal and mutually exclusive polarizations. All optical surfaces of the optical subsystem used for the measurements are stationary during the measurements.
摘要翻译：提供了离散极化散射法的系统和方法。一个实施例涉及一种散射仪的光学子系统。光学子系统包括被配置为产生具有不同偏振的光的一个或多个光源。光学子系统还包括偏振分束器，其被配置为将光分离成具有正交和相互排斥的极化的两个不同光束。光学子系统还包括一个或多个第二光学元件，其被配置为在测量期间控制两个不同光束中的哪一个照射晶片。光学子系统还包括被配置为分别检测由晶片的照明产生的两个不同散射光束的检测子系统。两个不同的散射光束具有正交和相互排斥的偏振。用于测量的光学子系统的所有光学表面在测量期间是静止的。

3. 发明申请

WO2013002988A3 ILLUMINATION CONTROL 审中-公开
标题翻译：照明控制
公开(公告)号：WO2013002988A3
公开(公告)日：2013-07-11
申请号：PCT/US2012041273
申请日：2012-06-07
申请人： KLA TENCOR CORP , MANASSEN AMNON , SELIGSON JOEL , SAPIENS NOAM
发明人： MANASSEN AMNON , SELIGSON JOEL , SAPIENS NOAM
IPC分类号： H01L21/027
CPC分类号： G01J1/4257 , G02B21/0016 , G02B21/082 , G02B21/365 , G02B26/0833 , G03F7/70633
摘要： An optical system may include an objective, a source of illumination, an illumination system having illumination optics configured to direct the illumination onto the objective, and at least two dynamic optical array devices located at a pupil conjugate plane and a field conjugate plane, respectively in the illumination optics. The dynamic optical array devices are configured to control one or more properties of illumination coupled from the illumination system to the objective.
摘要翻译：光学系统可以包括物镜，照明源，具有被配置为将照明引导到物镜上的照明光学器件的照明系统以及分别位于光瞳共轭平面和场共轭平面处的至少两个动态光学阵列装置照明光学器件。动态光学阵列装置被配置为控制从照明系统耦合到物镜的照明的一个或多个特性。

4. 发明申请

WO2010080732A3 SCATTEROMETRY METROLOGY TARGET DESIGN OPTIMIZATION 审中-公开
标题翻译：计量测量学目标设计优化
公开(公告)号：WO2010080732A3
公开(公告)日：2010-10-07
申请号：PCT/US2010020046
申请日：2010-01-04
申请人： KLA TENCOR CORP , ADEL MICHAEL E , MANASSEN AMNON , KANDEL DANIEL
发明人： ADEL MICHAEL E , MANASSEN AMNON , KANDEL DANIEL
IPC分类号： H01L21/66
CPC分类号： G03F7/70683 , G03F7/705 , G03F7/70633 , H01L22/12
摘要： A metrology target design may be optimized using inputs including metrology target design information, substrate information, process information, and metrology system information. Acquisition of a metrology signal with a metrology system may be modeled using the inputs to generate one or more optical characteristics of the metrology target. A metrology algorithm may be applied to the characteristics to determine a predicted accuracy and precision of measurements of the metrology target made by the metrology system. Part of the information relating to the metrology target design may be modified and the signal modeling and metrology algorithm may be repeated to optimize the accuracy and precision of the one or more measurements. The metrology target design may be displayed or stored after the accuracy and precision are optimized.
摘要翻译：度量目标设计可以使用包括度量衡目标设计信息，衬底信息，过程信息和度量衡系统信息的输入来优化。采用计量系统采集计量信号可以使用输入来建模以产生计量目标的一个或多个光学特性。计量算法可以应用于特征以确定由计量系统制造的计量目标的测量的预测精度和精度。与计量目标设计有关的部分信息可能会被修改，信号建模和计量算法可能会重复，以优化一个或多个测量的准确度和精确度。计量目标设计可以在精确度和精度得到优化之后显示或存储。

5. 发明申请

WO03001282A8 COMPOUND OPTICAL MODULATOR 审中-公开
标题翻译：复合光学调制器
公开(公告)号：WO03001282A8
公开(公告)日：2003-09-04
申请号：PCT/IL0100580
申请日：2001-06-26
申请人： 3DV SYSTEMS LTD , MANASSEN AMNON , SANDER AVNER
发明人： MANASSEN AMNON , SANDER AVNER
IPC分类号： G02F1/017 , H04B10/155
CPC分类号： B82Y20/00 , G02F1/017 , G02F2201/16 , G02F2203/055
摘要： There is therefore provided in accordance with an embodiment of the present invention a modulator for modulating light comprising: a quantum well structure (QWS), comprising narrow-bandgap semiconductor layers interleaved with wide-bandgap semiconductor layers which QWS has an operating band of wavelengths for which transmittance for light is controllable by an electric field generated in the QWS; a configuration of electrodes electrifiable to generate an electric field perpendicular to the semiconductor layers of the QWS in each of a plurality of localized non-overlapping voxels of the QWS independent of an electric field in any of the other voxels; a different optical filter coupled to each of at least two of the voxels, each different filter transmitting light in a different sub-band of the operating band of the QWS and being substantially opaque to light having a wavelength in the operating band that is outside of the sub-band; and a power supply controllable to apply voltage to the configuration of electrodes so as to generate the electric field.
摘要翻译：因此，根据本发明的实施例提供了一种用于调制光的调制器，包括：量子阱结构（QWS），其包括与宽带隙半导体层交错的窄带隙半导体层，其中QWS具有用于光透过率可以通过QWS中产生的电场来控制; 在QWS的多个局部非重叠体素的每一个中产生垂直于QWS的半导体层的电场的电极的结构，其独立于任何其他体素中的电场; 耦合到至少两个体素中的每一个的不同滤光器，每个不同的滤光器透射QWS的工作频带的不同子带中的光，并且对于在工作频带外的波长的波长基本上不透明子带; 以及电源，其可控制以将电压施加到电极的配置以产生电场。

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