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1. 发明申请

WO2016127110A2 METHODS AND SYSTEMS FOR GENERATING PLASMA TO CLEAN OBJECTS 审中-公开
标题翻译：用于产生等离子体清洁对象的方法和系统
公开(公告)号：WO2016127110A2
公开(公告)日：2016-08-11
申请号：PCT/US2016/016859
申请日：2016-02-05
申请人： IONFIELD HOLDINGS, LLC
发明人： HENSLEY, Paul, F. , GABRIEL, David
IPC分类号： H01J37/32
CPC分类号： H01J37/32348 , H01J37/32018 , H01J37/32532 , H01J37/32568 , H01J2237/335 , H05H1/2406 , H05H2001/2418 , H05H2001/2437
摘要： A system to generate plasma to clean at least one object, the apparatus comprising a microplate with an electrode support array comprising a plurality of matched pairs of elongated dielectric barrier members connected to a plurality of electrodes, with said dielectric barrier members of said matched pair being spaced at a pre-determined non-uniform gap, a variable time scale pulsed power source electrically coupled to said electrodes to provide electrical pulses and a plurality of electronic components to control polarity of said electrical pulses, such that said pulses produce electron streamers from opposing elongated dielectric barrier members of said plurality of matched pairs and charge on a surface of said dielectric barrier member is substantially evenly distributed.
摘要翻译：一种用于产生等离子体以清洁至少一个物体的系统，所述装置包括具有电极支撑阵列的微板，所述电极支撑阵列包括连接到多个电极的多个匹配成对的细长电介质阻挡构件，所述匹配对的所述电介质阻挡构件为以预定的非均匀间隙间隔开，电可耦合到所述电极的可变时标脉冲电源以提供电脉冲和多个电子部件来控制所述电脉冲的极性，使得所述脉冲从相对的方向产生电子拖缆所述多个匹配对中的细长电介质阻挡构件并且在所述电介质阻挡构件的表面上充电基本上均匀分布。

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