专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO2002073702A1 INTEGRATED TOROIDAL COIL INDUCTORS FOR IC DEVICES 审中-公开
标题翻译：集成器件的集成式电感线圈电感器
公开(公告)号：WO2002073702A1
公开(公告)日：2002-09-19
申请号：PCT/US2002/007992
申请日：2002-03-13
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人： ACOSTA, Raul, E. , CARASSO, Melanie, L. , CORDES, Steven, A. , GROVES, Robert, A. , LUND, Jennifer, L. , ROSNER, Joanna
IPC分类号： H01L29/82
CPC分类号： H01L28/10 , H01F17/0006 , H01F17/0033 , H01F41/041 , H01L27/08
摘要： A means for fabrication of solenoidal inductors interated in a semiconductor chip is provided. A solenoidal coil (50) is partially embedded in a deep well etched into the chip substrate (10). The non-embedded part (30) of the coil is fabricated as part of BEOL metallization layers (52). This allows for large cross-sectional area of the solenoid turns, tus reducing the turn-to-turn capacitive coupling. Because the solenoidal coils of this invention have a large diameter cross-section, the coil can be made with a large inductance value and yet occupy a small area of the chip. The farbication process includes etching of a deep cavity in the substrate after all the FEOL steps are completed; lining said cavity with a dielectric (14) followed by fabrication of the part of the coil (22) that will be embedded by deposition of a conductive material metal through a mask; deposition of dielectric (24 and 28) and planarization of the same by CMP. After planarization the fabrication of the remaining part (30) of the solenoidal coil is fabricated as part of the metallization in the BEOL (i.e. as line/vias of the BEOL). To further increase the cross section of the solenoidal coil, part of it may be built by electrodeposition through a mask on top of the BEOL layers.
摘要翻译：提供了一种用于制造交错在半导体芯片中的螺线管电感器的装置。螺线管线圈（50）被部分地嵌入到蚀刻到芯片衬底（10）中的深阱中。线圈的非嵌入部分（30）被制造为BEOL金属化层（52）的一部分。这允许螺线管转弯的大截面积，减少匝间电容耦合。由于本发明的螺线管线圈具有大直径的横截面，所以线圈可以制造成具有大的电感值，并且占据芯片的小面积。改进方法包括在所有FEOL步骤完成之后蚀刻衬底中的深空腔; 用电介质（14）衬里所述空腔，随后制造将通过掩模沉积导电材料金属而嵌入的线圈（22）的部分; 介电（24和28）的沉积和CMP的平坦化。在平坦化之后，螺线管线圈的剩余部分（30）的制造被制造为BEOL中的金属化的一部分（即，作为BEOL的线/通路）。为了进一步增加螺线管线圈的横截面，其一部分可以通过电沉积穿过BEOL层顶部的掩模来构建。

IPRDB

热门服务

关于我们

友情链接

联系方式