会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 6. 发明申请
    • PERPENDICULAR STTM FREE LAYER INCLUDING PROTECTIVE CAP
    • PERPENDICULAR STTM自由层,包括保护盖
    • WO2018063255A1
    • 2018-04-05
    • PCT/US2016/054517
    • 2016-09-29
    • INTEL CORPORATION
    • OGUZ, KaanO'BRIEN, KevinDOYLE, BrianKUO, CharlesDOCZY, Mark
    • H01L43/02H01L43/10H01L43/08H01L43/12
    • H01L27/228H01L43/02H01L43/08H01L43/10H01L43/12
    • A perpendicular spin transfer torque memory (pSTTM) device incorporates a magnetic tunnel junction (MTJ) device having a free magnetic stack and a fixed magnetic stack separated by a dielectric tunneling layer. The free magnetic stack includes an uppermost magnetic layer that is at least partially covered by a cap layer. The cap layer is at least partially covered by a protective layer containing at least one of: ruthenium (Ru); cobalt/iron/boron (CoFeB); molybdenum (Mo); cobalt (Co); tungsten (W); or platinum (Pt). The protective layer is at least partially covered by a cap metal layer which may form a portion of MTJ electrode. The protective layer minimizes the occurrence of physical and/or chemical attack of the cap layer by the materials used in the cap metal layer, beneficially improving the interface anisotropy of the MTJ free magnetic layer.
    • 垂直自旋转移力矩存储器(pSTTM)装置结合了具有由电介质隧穿层分开的自由磁性堆叠和固定磁性堆叠的磁性隧道结(MTJ)装置。 自由磁性叠层包括至少部分被覆盖层覆盖的最上面的磁性层。 所述盖层至少部分地被含有以下至少一种的保护层覆盖:钌(Ru); 钴/铁/硼(CoFeB); 钼(Mo); 钴(Co); 钨(W); 或铂(Pt)。 保护层至少部分地被可形成MTJ电极的一部分的帽金属层覆盖。 保护层使盖层金属层中使用的材料对盖层的物理和/或化学侵蚀的发生最小化,有利地改善了MTJ自由磁层的界面各向异性。