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1. 发明申请

WO2004066331A3 CHARGED PARTICLE BEAM APPARATUS AND METHOD FOR OPERATING THE SAME 审中-公开
标题翻译：充电颗粒光束装置及其操作方法
公开(公告)号：WO2004066331A3
公开(公告)日：2005-01-13
申请号：PCT/EP2004000370
申请日：2004-01-19
申请人： INTEGRATED CIRCUIT TESTING , ADAMEC PAVEL , DEGENHARDT RALF , FEUERBAUM HANS-PETER , MUNACK HARRY , WINKLER DIETER
发明人： ADAMEC PAVEL , DEGENHARDT RALF , FEUERBAUM HANS-PETER , MUNACK HARRY , WINKLER DIETER
IPC分类号： H01J37/26 , H01J37/285
CPC分类号： H01J37/285 , H01J37/265 , H01J37/28 , H01J2237/0435 , H01J2237/049 , H01J2237/2855 , H01J2237/2857
摘要： A charged particle beam apparatus is provided which comprises a charged particle source (1) for producing a primary beam of charged particles, aperture means (2) for collimating said primary beam of charged particles, wherein said aperture means is adapted to switch between a collimation of said primary beam to a width appropriate for serial imaging of a sample (8) as well as a collimation of said primary beam to a width appropriate for parallel imaging of said sample (8), a condenser lens (3) for condensing said primary beam of charged particles, scanning means (5) for deflecting said primary beam of charged particles, an objective lens (6) for focusing said condensed primary beam, a sectorized detector (7) for detecting a secondary charged particles. Also, several different operation modes of the beam apparatus are described allowing for serial imaging as well as parallel imaging.
摘要翻译：提供带电粒子束装置，其包括用于产生带电粒子的一次束的带电粒子源（1），用于准直所述带电粒子的一次束的孔口装置（2），其中所述孔口装置适于在准直的所述主光束适合于样品（8）的串行成像的宽度以及所述主光束的准直到适合于所述样品（8）的平行成像的宽度;聚光透镜（3），用于冷凝所述主光束带电粒子束，用于偏转所述带电粒子的一次束的扫描装置（5），用于聚焦所述冷凝的主光束的物镜（6），用于检测次级带电粒子的扇形检测器（7）。此外，描述了束装置的几种不同的操作模式，允许串行成像以及平行成像。

2. 发明申请

WO2005122208A3 CHARGED PARTICLE BEAM DEVICE WITH RETARDING FIELD ANALYZER 审中-公开
标题翻译：带延迟场分析仪的充电颗粒光束装置
公开(公告)号：WO2005122208A3
公开(公告)日：2006-04-13
申请号：PCT/EP2005006247
申请日：2005-06-10
申请人： LBLEITERPRUEFTECHNIK MBH ICT I , DEGENHARDT RALF , FEUERBAUM HANS-PETER , HAMBACH DIRK , KOEGLER WALTER , MUNACK HARRY , SALVESEN CARLO
发明人： DEGENHARDT RALF , FEUERBAUM HANS-PETER , HAMBACH DIRK , KOEGLER WALTER , MUNACK HARRY , SALVESEN CARLO
IPC分类号： H01J37/244 , G01R31/305 , G01R31/307 , H01J37/28
CPC分类号： H01J37/244 , G01R31/305 , H01J2237/24485 , H01J2237/24585
摘要： The invention provides a charged particle beam device (100) to inspect or structure a specimen (102) with a primary charged particle beam (104) propagating along an optical axis (108); a beam tube element (130) having a tube voltage (VT); and a retarding field analyzer (1, 50) in the vicinity of the beam tube element (130) to detect secondary charged particles (2,105) generated by the primary charged particle beam (104) on the specimen (102). According to the invention, the retarding field analyzer (1, 50) thereby comprises an entrance grid electrode (10) at a second voltage (V2); at least one filter grid electrode (4) at a first voltage (V1); a charged particle detector (8) to detect the secondary charged particles (2,105); and at least one further electrode element (122, 122a, 122b, 152, 152a, 152b, 170, 170a, 170b) arranged between the entrance grid electrode (10) and the at least one filter grid electrode (4). The at least one further electrode element (122, 122a, 122b, 152, 152a, 152b, 170, 170a, 170b, 180) reduces the size of the stray fields regions (41) in the retarding electric field region (20) to improve the energy resolution of the retarding field analyzer (1, 50). The improvement of the energy resolution is significant, in particular when the beam tube element (130) is part of a high voltage beam tube.
摘要翻译：本发明提供一种带电粒子束装置（100），用于利用沿着光轴（108）传播的初级带电粒子束（104）来检查或构造样本（102）。具有管电压（VT）的光束管元件（130）; 以及在所述束管元件（130）附近的延迟场分析器（1,50），以检测由所述样本（102）上的所述初级带电粒子束（104）产生的二次带电粒子（2,105）。根据本发明，延迟场分析仪（1,50）由此包括处于第二电压（V2）的入口栅电极（10）; 至少一个第一电压（V1）的滤波栅极（4）; 带电粒子检测器（8），用于检测二次带电粒子（2,105）; 以及布置在入射栅电极（10）和至少一个滤光栅格电极（4）之间的至少一个另外的电极元件（122,122a，122b，152,152a，152b，170,170a，170b）。至少一个另外的电极元件（122,122a，122b，152,152a，152b，170,170a，170b，180）减小了延迟电场区域（20）中的杂散场区域（41）的尺寸，以改善延迟场分析仪（1,50）的能量分辨率。能量分辨率的提高是显着的，特别是当束管元件（130）是高压束管的一部分时。

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