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    • 6. 发明申请
    • METHOD TO PLASMA DEPOSIT ONTO AN ORGANIC POLYMER DIELECTRIC FILM
    • 等离子体沉积在有机聚合物电介质膜上的方法
    • WO2004070793A2
    • 2004-08-19
    • PCT/US2004/003187
    • 2004-02-04
    • TEGAL CORPORATIONZHANG, ZhihongNGUYEN, Tai, DungNGUYEN, Tue
    • ZHANG, ZhihongNGUYEN, Tai, DungNGUYEN, Tue
    • H01L
    • H01L21/76843H01L21/31058
    • A method for protecting a device such as an organic polymer underlayer during a plasma assisted process of depositing a subsequent film on the organic polymer underlayer is disclosed. The method provides for the deposition of a protective continuous layer using organic polymer damage-free technique in order to not damage the organic polymer underlayer and to protect the organic polymer underlayer during the plasma assisted process of depositing a subsequent film. The organic polymer damage-free technique is a non-plasma process, using only thermal energy and chemical reactions to deposit the continuous layer. The organic polymer damage-free technique can also be a plasma assisted process using a reduced plasma power that is low enough that does not damage the organic polymer underlayer. This method is applicable to many organic polymer underlayers such as organic polymer is aromatic hydrocarbon, polytetrafluoroehtylene (PTFE), parylene, benzocyclobutene-based polymers (BCB), polyimide, fluorinated polyimide, fluorocarbon-based polymers, poly(arylene ether)-based polymers (PAE), and cyclohexanone-based polymers, and to many plasma assisted deposition processes such as plasma enhanced CVD deposition, plasma enhanced ALD deposition and plasma enhanced NLD deposition of silicon dioxide, silicon nitride, nitrided diffusion barrier such as TiN, TaN, WN, TiSiN, TaSiN, and WSiN.
    • 公开了一种在有机聚合物底层沉积后续膜的等离子体辅助过程中保护诸如有机聚合物底层之类的装置的方法。 该方法提供了使用有机聚合物无损技术沉积保护性连续层,以便在沉积后续膜的等离子体辅助工艺期间不损坏有机聚合物底层并保护有机聚合物底层。 有机聚合物无损伤技术是一种非等离子体工艺,仅使用热能和化学反应沉积连续层。 有机聚合物无损伤技术也可以是等离子体辅助工艺,其使用的还原等离子体功率足够低,不会损坏有机聚合物底层。 该方法适用于多种有机聚合物底层,如有机聚合物为芳烃,聚四氟乙烯(PTFE),聚对二甲苯,苯并环丁烯系聚合物(BCB),聚酰亚胺,氟化聚酰亚胺,碳氟聚合物,聚(亚芳基醚) (PAE)和环己酮基聚合物,以及许多等离子体辅助沉积工艺,例如等离子体增强CVD沉积,等离子体增强ALD沉积和二氧化硅的等离子体增强NLD沉积,氮化硅,氮化扩散阻挡层如TiN,TaN,WN ,TiSiN,TaSiN和WSiN。
    • 7. 发明申请
    • NANOLAYER DEPOSITION PROCESS
    • NANOLAYER沉积工艺
    • WO2004070074A2
    • 2004-08-19
    • PCT/US2004/003349
    • 2004-02-04
    • TEGAL CORPORATIONNGUYEN, TueNGUYEN, Tai, Dung
    • NGUYEN, TueNGUYEN, Tai, Dung
    • C23C
    • C23C16/45525C23C16/56
    • A hybrid deposition process of CVD and ALD, called NanoLayer Deposition ("NLD") is provided. The nanolayer deposition process is a cyclic sequential deposition process, comprising the first step of introducing a first plurality of precursors to deposit a thin film with the deposition process not self-limiting, then a second step of purging the first set of precursors and a third step of introducing a second plurality of precursors to modify the deposited thin film. The deposition step in the NLD process using the first set of precursors is not self-limiting and is a function of substrate temperature and process time. The second set of precursors modifies the already-deposited film characteristics. The second set of precursors can treat the deposited film such as a modification of film composition, a doping, or a removal of impurities from the deposited film. The second set of precursors can also deposit another layer on the deposited film. The additional layer can react with the existing layer to form a compound layer, or can have minimum reaction to form a nanolaminate film.
    • 提供了称为NanoLayer沉积(“NLD”)的CVD和ALD的混合沉积工艺。 纳米层沉积工艺是循环顺序沉积工艺,包括引入第一多个前体以沉积薄膜而不是自限制的沉积工艺的第一步骤,然后第二步骤是清洗第一组前体和第三步 引入第二多个前体以修饰沉积的薄膜的步骤。 使用第一组前体的NLD工艺中的沉积步骤不是自限制的,而且是衬底温度和工艺时间的函数。 第二组前体改变已经沉积的膜特性。 第二组前体可以处理沉积的膜,例如膜组成的改变,掺杂或从沉积膜去除杂质。 第二组前体还可以在沉积的膜上沉积另一层。 附加层可以与现有层反应以形成化合物层,或者可以具有最小的反应以形成纳米层间膜。