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1. 发明申请

WO2017031257A2 FLUID CONTROL SYSTEM 审中-公开
标题翻译：流体控制系统
公开(公告)号：WO2017031257A2
公开(公告)日：2017-02-23
申请号：PCT/US2016/047441
申请日：2016-08-17
申请人： ICHOR SYSTEMS, INC.
发明人： BARROS, Philip, Ryan , MULLIGAN, Greg, Patrick , MELCER, Chris , PENG, Hong
IPC分类号： H01L21/02 , H01L21/67 , H01L21/3065
CPC分类号： H01L21/67017
摘要： An improved fluid delivery system and method that directly controls the concentration of constituent components in a fluid mixture delivered, for example, to a process chamber. Pressure of the fluid mixture can also be directly controlled. A concentration sensor capable of measuring concentration of all of the constituent components in a fluid mixture is used to provide signals used to vary the flow rate of constituent gases under a closed loop feedback system. The signal output of one or more pressure sensors can also be used to provide a signal used to vary the flow rate of constituent gases under a closed loop feedback system. By directly controlling these two extremely important process variables, embodiments of the present invention provide a significant advantage in measurement accuracy over the prior art, enable real-time process control, reduce system level response time, and allow for a system with a significant footprint reduction.
摘要翻译：一种改进的流体递送系统和方法，其直接控制例如输送到处理室的流体混合物中的组成成分的浓度。流体混合物的压力也可以直接控制。使用能够测量流体混合物中所有构成成分的浓度的浓度传感器来提供用于在闭环反馈系统下改变组成气体流速的信号。一个或多个压力传感器的信号输出也可用于提供用于改变闭环反馈系统下的组成气体流速的信号。通过直接控制这两个非常重要的过程变量，本发明的实施例提供了相对于现有技术的测量精度的显着优点，实现了实时过程控制，降低了系统级响应时间，并且允许具有显着占地面积减小的系统。

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