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    • 2. 发明申请
    • METHOD FOR FABRICATING A BACK CONTACT SOLAR CELL
    • 制造背接触式太阳能电池的方法
    • WO2011087341A3
    • 2011-12-08
    • PCT/KR2011000354
    • 2011-01-18
    • HYUN DAI HEAVY IND CO LTDJEON MIN SUNGLEE WON JAECHO EUN CHELLEE JOON SUNG
    • JEON MIN SUNGLEE WON JAECHO EUN CHELLEE JOON SUNG
    • H01L31/042
    • H01L31/1804H01L31/02363H01L31/0682Y02E10/547Y02P70/521
    • The present invention relates to a method for fabricating a back contact solar cell, in which an ion implantation process and a thermal diffusion process are combined in forming a p+ region and an n+ region on a back surface of a substrate, to thereby minimize the number of processes. The method for fabricating a back contact solar cell according to the present invention comprises the following steps: preparing an n-type crystalline silicon substrate; forming a thermal diffusion control film on the front, back and side surfaces of the substrate; implanting a p-type impurity ion on the back surface of the substrate to form a p-type impurity region; patterning the thermal diffusion control film such that the back surface of the substrate can be selectively exposed; and performing a thermal diffusion process to form a high concentration back electric field layer (n+) on the exposed back surface area of the substrate and a low concentration front electric field layer (n-) on the front surface area of the substrate, and to activate the p-type impurity region to form a p+ emitter region.
    • 背接触太阳能电池的制造方法技术领域本发明涉及一种背接触太阳能电池的制造方法,其中离子注入工艺和热扩散工艺被结合以在衬底的背表面上形成p +区域和n +区域, 的过程。 根据本发明的制造背接触太阳能电池的方法包括以下步骤:制备n型晶体硅衬底; 在衬底的正面,背面和侧面上形成热扩散控制膜; 在衬底的背表面上注入p型杂质离子以形成p型杂质区; 构图热扩散控制膜,使得衬底的背表面可以被选择性地暴露; 并且执行热扩散工艺以在衬底的暴露的后表面区域上形成高浓度背电场层(n +),并且在衬底的前表面区域上形成低浓度前电场层(n-) 激活p型杂质区域以形成p +发射极区域。