专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO1988005205A1 X-Y-'THETA'-Z POSITIONING STAGE 审中-公开
标题翻译： X-Y-THETA -Z定位舞台
公开(公告)号：WO1988005205A1
公开(公告)日：1988-07-14
申请号：PCT/US1987002954
申请日：1987-11-13
申请人： HUGHES AIRCRAFT COMPANY
发明人： HUGHES AIRCRAFT COMPANY , REEDS, John, W.
IPC分类号： H01
CPC分类号： G03F7/70716 , H01J37/20 , H01L21/68
摘要： A positioning stage (8) which achieves high-speed step-and-repeat alignment of a semiconductor wafer (2) to a mask with a full six degrees of freedom. A precision planar translational stage is mounted on a rotating stage (20) to allow a single-laser interferometric system to be utilized to make precise measurements of translational (X and Y) and rotational ( THETA ) positions. The entire X-Y- THETA stage system can also be moved vertically in a Z direction, or tilted with respect to the X-Y plane, by independently adjustable flexible mounts (26a, 26b, 26c). The center of rotation of the rotational stage (20) is on the beam axis (6), so that registration of the wafer (2) to a mask is simplified. Because the mass of the rotating stage (20) is not moved during high-speed X and Y-positioning steps, fast response is possible. In lithography applications, one rotational correction at the beginning of the writing procedure suffices for all the chips on the wafer, if all the rows and columns of chips are perfectly straight. Besides its usefulness in litography with a flood ion beam, the invention is also useful in direct-write electron- or ion-beam lithography systems with focused beams, to obviate the need for high-speed electronic scan rotation.
摘要翻译：一种定位台（8），其实现半自由度高的半导体晶片（2）与掩模的高速重复对准。精密平面平移平台安装在旋转台（20）上，以允许使用单激光干涉系统来进行平移（X和Y）和旋转（THETA）位置的精确测量。整个X-Y-THETA舞台系统也可以通过独立可调节的柔性支架（26a，26b，26c）在Z方向上垂直移动或相对于X-Y平面倾斜。旋转台（20）的旋转中心位于束轴（6）上，从而简化了晶片（2）对掩模的配准。由于在高速X和Y定位步骤期间旋转台（20）的质量不移动，所以可以进行快速响应。在光刻应用中，如果所有行和列的芯片完全直线，则在写入过程开始时的一个旋转校正对于晶片上的所有芯片都是足够的。除了其在具有泛洪离子束的案件中的有用性之外，本发明还可用于具有聚焦光束的直写式电子束或离子束光刻系统，以避免对高速电子扫描旋转的需要。

2. 发明申请

WO1994007705A1 VEHICLE WHEEL INCORPORATING TIRE AIR PRESSURE SENSOR 审中-公开
标题翻译：车轮轮胎空气压力传感器
公开(公告)号：WO1994007705A1
公开(公告)日：1994-04-14
申请号：PCT/US1993009236
申请日：1993-09-29
申请人： HUGHES AIRCRAFT COMPANY
发明人： HUGHES AIRCRAFT COMPANY , OLNEY, Ross, D. , REEDS, John, W.
IPC分类号： B60C23/04
CPC分类号： B60C23/0408
摘要： A tire air pressure sensor (18) is mounted on a vehicle wheel (10) and includes an inertial mass (40) which is urged radially outwardly by centrifugal force resulting from rotation of the wheel (10). The tire air pressure is applied to the inertial mass (40) in opposition to the centrifugal force. When the rotational speed of the wheel (10) is sufficient that the centrifugal force overcomes the applied air pressure, the inertial mass (40) moves radially outwardly and opens a switch (33). The speed at which the switch (33) opens is a predetermined function of the tire pressure. In another embodiment (130), a second sensor (154, 160) is provided to sense when the tire pressure is below a minimum value. A spring (140) urges an inertial mass (138) inwardly in opposition to the centrifugal force, and the tire pressure is applied to a bellows (154) having an end (160) which moves radially outwardly in proportion to the applied pressure. The bellows (154) opens a first switch (166) when the pressure is higher than the minimum value, and the inertial mass (138) moves radially outwardly away from the end (160) of the bellows (154) to open a second switch (168) when the wheel speed exceeds the value corresponding to the tire pressure.
摘要翻译：轮胎气压传感器（18）安装在车轮（10）上，并包括通过由轮（10）的旋转产生的离心力径向向外推动的惯性质量块（40）。轮胎气压与离心力相反地施加到惯性质量块（40）。当轮（10）的旋转速度足以使离心力克服所施加的空气压力时，惯性质量块（40）径向向外移动并打开开关（33）。开关（33）打开的速度是轮胎压力的预定功能。在另一实施例（130）中，提供第二传感器（154,160）以感测轮胎压力何时低于最小值。弹簧（140）相对于离心力向内推动惯性质量块138，并且将轮胎压力施加到具有与所施加的压力成比例径向向外移动的端部（160）的波纹管（154）。当压力高于最小值时，波纹管（154）打开第一开关（166），并且惯性质量（138）从波纹管（154）的端部（160）径向向外移动以打开第二开关（168）当车轮速度超过对应于轮胎压力的值时。

3. 发明申请

WO1993009964A1 SELF-REGULATING TIRE PRESSURE SYSTEM AND METHOD 审中-公开
标题翻译：自调节轮胎压力系统和方法
公开(公告)号：WO1993009964A1
公开(公告)日：1993-05-27
申请号：PCT/US1992009833
申请日：1992-11-09
申请人： HUGHES AIRCRAFT COMPANY
发明人： HUGHES AIRCRAFT COMPANY , OLNEY, Ross, D. , REEDS, John, W.
IPC分类号： B60C23/04
CPC分类号： B60C23/004 , Y10T137/3631 , Y10T137/7836 , Y10T137/8242
摘要： A self-regulating tire pressure system and method employs a bistable valve (10) that allows air from a high pressure reservoir (6) to replenish the pressure within a tire (4) when it has fallen below an actuating pressure, and discontinues its operation only after the tire pressure has increased to a closing pressure that is greater than the actuating pressure. The system is capable of sensing the valve's (10) frequency of operation as an indication of a slow tire leak when the frequency exceeds a predetermined threshold, of sensing the number of valve (10) operations and the duration of each operation as an indication of a flat tire condition when the number of operations for a predetermined duration exceeds a second threshold, and of sensing the duration of the valve's (10) operation as an indication of a low reservoir (6) pressure condition when that duration exceeds a third threshold. The valve (10) includes a bistable diaphragm (94, 120) that receives a reference pressure on one side and the tire pressure on its opposite side, and snaps between two stable positions respectively opening and closing the valve (10) in response to the tire pressure falling below the actuating pressure and then increasing to the closing pressure.

4. 发明申请

WO1985000075A1 WAFER HEIGHT CORRECTION SYSTEM FOR FOCUSED BEAM SYSTEM 审中-公开
标题翻译：聚焦光束系统的高度校正系统
公开(公告)号：WO1985000075A1
公开(公告)日：1985-01-03
申请号：PCT/US1984000772
申请日：1984-05-21
申请人： HUGHES AIRCRAFT COMPANY
发明人： HUGHES AIRCRAFT COMPANY , REEDS, John, W.
IPC分类号： H01J37/20
CPC分类号： H01L21/682 , H01J37/20 , H01J37/21
摘要： Base plate (32) of the wafer support is flexibly mounted with respect to the floor (34) of the target chamber. Flanges (54) and (58) flex by operation of motor (68) to adjust the position of the wafer support with respect to the focal point of the column.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式