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    • 1. 发明申请
    • REPAIR AND RESTORATION OF DAMAGED DIELECTRIC MATERIALS AND FILMS
    • 损坏的电介质材料和膜的修复和恢复
    • WO2004068555A2
    • 2004-08-12
    • PCT/US2004/002252
    • 2004-01-26
    • HONEYWELL INTERNATIONAL INCFAN, WenyaLU, VictorTHOMAS, MichaelDANIELS, BrianNGUYEN, TiffanyZHOU, De-LingNAMAN, AnanthJIN, LeiBHANAP, Anil
    • FAN, WenyaLU, VictorTHOMAS, MichaelDANIELS, BrianNGUYEN, TiffanyZHOU, De-LingNAMAN, AnanthJIN, LeiBHANAP, Anil
    • H01L
    • H01L21/31058H01L21/3105H01L21/76801H01L2924/0002H01L2924/00
    • Methods of repairing voids in a material are described herein that include: a) providing a material having a plurality of reactive silanol groups; b) providing at least one reactive surface modification agent; and c) chemically capping at least some of the plurality of reactive silanol groups with the at least one of the reactive surface modification agents. Methods of carbon restoration in a material are also described that include: a) providing a carbon-deficient material having a plurality of reactive silanol groups; b) providing at least one reactive surface modification agent; and c)chemically capping at least some of the plurality of reactive silanol groups with the at least one of the reactive surface modification agents. In addition, methods are described herein for reducing the condensation of a film and/or a carbon-deficient film that include: a) providing a film having a plurality of reactive silanol groups; b) placing the film into a plasma chamber; c) introducing a plurality of reactive organic moieties-containing silanes into the chamber; and d) allowing the silanes to react with at least some of the reactive silanol groups. Dielectric materials and low-k dielectric materials are described herein that comprise: a) an inorganic material having a plurality of silicon atoms; and b) a plurality of organic moiety-containing silane compounds, wherein the silane compounds are coupled to the inorganic material through at least some of the silicon atoms.
    • 本文描述了修复材料中空隙的方法,其包括:a)提供具有多个反应性硅烷醇基团的材料; b)提供至少一种反应性表面改性剂; 和c)使所述多个反应性硅烷醇基团中的至少一些与至少一种反应性表面改性剂化学封端。 还描述了材料中碳修复的方法,其包括:a)提供具有多个反应性硅烷醇基团的缺碳材料; b)提供至少一种反应性表面改性剂; 和c)使所述多个反应性硅烷醇基团中的至少一些与至少一种反应性表面改性剂化学封端。 此外,本文描述了用于减少膜和/或缺碳膜的冷凝的方法,其包括:a)提供具有多个反应性硅烷醇基团的膜; b)将膜放入等离子体室中; c)将多个含反应性有机部分的硅烷引入所述室中; 和d)允许硅烷与至少一些反应性硅烷醇基团反应。 介质材料和低k介电材料在本文中描述,其包括:a)具有多个硅原子的无机材料; 和b)多个含有机部分的硅烷化合物,其中硅烷化合物通过至少一些硅原子与无机材料偶联。
    • 5. 发明申请
    • SENSOR SYSTEM AND METHODS USED TO DETECT MATERIAL WEAR AND SURFACE DETERIORATION
    • 传感器系统和方法用于检测材料磨损和表面缺陷
    • WO2004024979A1
    • 2004-03-25
    • PCT/US2003/028832
    • 2003-09-12
    • HONEYWELL INTERNATIONAL INC.BONNE, UlrichMOSHER, JohnPOBLANO, PhilipGRABMEIER, SusanneTHOMAS, MichaelSTROTHERS, Susan
    • BONNE, UlrichMOSHER, JohnPOBLANO, PhilipGRABMEIER, SusanneTHOMAS, MichaelSTROTHERS, Susan
    • C23C14/34
    • H01J37/3479C23C14/3407
    • A sensor system has been developed for measuring erosion of a sputtering target (510) in a vacuum chamber that includes: a) a sputtering target, b) a wafer, c) a vacuum atmosphere located between the sputtering target and the wafer, and d) a sensor device (525) directly coupled to the sputtering target (510), wherein the sensor device (525) is exposed to the vacuum atmosphere and comprises a data collection apparatus that is exposed to atmospheric pressure. A method of detecting erosion in a sputtering target (510) has also been developed that includes: a) providing a sputtering target (510), b) providing a wafer (550), c) initiating a vacuum atmosphere and a plasma that are located between the sputtering target (510) and the wafer (550), d) providing a sensor device (525) directly coupled to the sputtering target (510), wherein the sensor device (525) is partly exposed to the vacuum atmosphere and comprises a data collection apparatus that is exposed to atmospheric pressure, e) collecting data from the data collection apparatus; and f) automatically terminating the operation of the plasma once the data collection apparatus determines that the sputtering target (510) has sufficiently eroded.
    • 已经开发了用于测量真空室中的溅射靶(510)的侵蚀的传感器系统,所述真空室包括:a)溅射靶,b)晶片,c)真空气氛,位于 溅射靶和晶片,以及d)直接耦合到溅射靶(510)的传感器装置(525),其中传感器装置(525)暴露于真空气氛并且包括暴露于大气压的数据收集装置 。 还已经开发了检测溅射靶(510)中的侵蚀的方法,该方法包括:a)提供溅射靶(510),b)提供晶片(550),c)引发位于其中的真空气氛和等离子体 在所述溅射靶(510)和所述晶片(550)之间,d)提供直接耦合到所述溅射靶(510)的传感器装置(525),其中所述传感器装置(525)部分地暴露于所述真空气氛并且包括 数据收集装置,其暴露于大气压力,e)从数据收集装置收集数据; 和f)一旦数据采集装置确定溅射靶(510)已被充分侵蚀,就自动终止等离子体的操作。
    • 6. 发明申请
    • LAYERED COMPONENTS, MATERIALS, METHODS OF PRODUCTION AND USES THEREOF
    • 分层组分,材料,生产方法及其用途
    • WO2003103020A2
    • 2003-12-11
    • PCT/US2003/017656
    • 2003-06-03
    • HONEYWELL INTERNATIONAL INC.IWAMOTO, NancyTHOMAS, Michael
    • IWAMOTO, NancyTHOMAS, Michael
    • H01L
    • H01L21/02126H01L21/02203H01L21/31695H01L21/76801H01L21/7682H01L21/76825H01L21/76828H01L23/5329H01L2221/1047H01L2924/0002H01L2924/09701H01L2924/00
    • A layered component is described that includes: a substrate; a dielectric material having a plurality of pores, wherein the material is coupled to the substrate; and a diffusion blocking material coupled to the low k dielectric material, wherein the diffusion blocking material is attracted to the low k dielectric material. A layered material is also described that includes: a dielectric material having a plurality of pores, wherein each pore has a pore diameter; and a layer comprising a plurality of diffusion blocking particles, wherein the particles have a article size that is larger than the pore diameter. Methods of minimizing the diffusion of metal atoms into a material having a plurality of pores are further disclosed that include: providing a precursor material that comprises molecules having a molecule size that is larger than a pore diameter of any of the plurality of pores; providing a solvent carrier solution; combining the precursor material and the solvent carrier solution to form a diffusion blocking reactive solution; and applying the diffusion blocking reactive solution to a layer of porous material.
    • 描述了一种分层部件,其包括:基板; 具有多个孔的介电材料,其中所述材料耦合到所述基底; 以及耦合到所述低k电介质材料的扩散阻挡材料,其中所述扩散阻挡材料被所述低k介电材料吸引。 还描述了一种层状材料,其包括:具有多个孔的介电材料,其中每个孔具有孔径; 以及包含多个扩散阻挡颗粒的层,其中所述颗粒具有大于孔径的制品尺寸。 还公开了使金属原子扩散到具有多个孔的材料中的扩散的方法,其包括:提供包含分子尺寸大于多个孔中的任何孔的孔径的分子的前体材料; 提供溶剂载体溶液; 组合前体材料和溶剂载体溶液以形成扩散阻断反应溶液; 并将扩散阻挡反应溶液施加到多孔材料层上。