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1. 发明申请

WO2011029634A2 METHOD FOR PRODUCING AN OPTICAL ASSEMBLY HAVING AT LEAST TWO OPTICAL FUNCTIONAL SURFACES, AN OPTICAL DEVICE AND UNIT FOR CARRYING OUT THE METHOD 审中-公开
标题翻译：工艺生产具有至少两个光学功能区域光学设备和设备的光学装置用于实施过程
公开(公告)号：WO2011029634A2
公开(公告)日：2011-03-17
申请号：PCT/EP2010005691
申请日：2010-09-13
申请人： FRAUNHOFER GES FORSCHUNG , UNIV SCHILLER JENA , SCHEIDING SEBASTIAN , RISSE STEFAN , GEBHARDT ANDREAS , DAMM CHRISTOPH , PESCHEL THOMAS , STEINKOPF RALF
发明人： SCHEIDING SEBASTIAN , RISSE STEFAN , GEBHARDT ANDREAS , DAMM CHRISTOPH , PESCHEL THOMAS , STEINKOPF RALF
IPC分类号： B24B13/00
CPC分类号： B29D11/00596 , G02B7/182 , G02B17/0626 , Y10T82/10
摘要： The invention relates to a method for producing an optical assembly, comprising at least two optical functional surfaces (5, 6) arranged in a fixed positional relationship to one another on a common supporting structure (9), wherein by means of a processing machine (15), in various process steps, at least two optical functional surfaces (5, 6) and at least one reference structure (13) having a defined and measurable relative position to the optical functional surfaces (5, 6) are produced. The supporting structure (9) remains rigidly connected to the processing machine (15) until said process steps have been completed, and wherein the optical functional surfaces (5, 6) are then measured relative to the at least one reference structure (13), and any deviation from a target shape and target position is determined, after which said process steps are repeated at least once with modified actuation of the processing machine (15). The invention further relates to an optical device comprising an optical assembly produced in this way and to a unit for carrying out such a method.
摘要翻译：本发明涉及一种在共同的支撑结构具有至少两个固定位置关系的制造光学装置彼此的方法（9）布置在所述光学功能表面（5,6），其中，通过加工机（15），至少两个光学表面（在不同的工艺步骤5 ，6）和至少一个参考结构（13）具有限定的和可测量的相对位置的光学功能面（5,6制造），其中所述支撑结构（9）保持高达牢固地连接到加工机（15上述处理步骤完成）和在此之后，光学功能面（5,6）被测量相对于所述至少一个参考结构（13），并从所希望的形状的偏差，并且所希望的位置被确定，在此之后的处理步骤的上方与所述加工机（15）的修正后的控制重复至少一次。本发明还涉及一种具有这样制造的光学组件，以及用于执行这种方法的装置的光学装置。

2. 发明申请

WO2009115303A8 ADAPTIVE MIRROR AND METHOD FOR THE PRODUCTION THEREOF 审中-公开
标题翻译：自适应反射镜及其制造方法
公开(公告)号：WO2009115303A8
公开(公告)日：2009-11-26
申请号：PCT/EP2009001968
申请日：2009-03-17
申请人： FRAUNHOFER GES FORSCHUNG , UNIV SCHILLER JENA , BRUCHMANN CLAUDIA , BECKERT ERIK , PESCHEL THOMAS , DAMM CHRISTOPH
发明人： BRUCHMANN CLAUDIA , BECKERT ERIK , PESCHEL THOMAS , DAMM CHRISTOPH
IPC分类号： G02B7/18 , G02B26/06
CPC分类号： G02B7/1815 , G02B26/06 , Y10T29/42
摘要： The invention relates to an adaptive mirror based on a ceramic substrate comprising a corresponding reflector and piezoelectric actuators, a cooling device being built into the substrate. The invention also relates a method for producing such a mirror. Said mirror can be used for the modulatation or deformation of a high-power laser wave front.
摘要翻译：本发明涉及基于具有相应的反射器和压电致动器的陶瓷基板的自适应反射镜，其中在基板中集成有冷却装置。同样地，本发明涉及用于制造这种反射镜的方法。根据本发明的反射镜用于高功率激光波前的调制或变形。

3. 发明申请

WO0030172A3 SYSTEM FOR RECEIVING AND RETAINING A SUBSTRATE 审中-公开
标题翻译：一个基板的收购和停止系统
公开(公告)号：WO0030172A3
公开(公告)日：2000-11-23
申请号：PCT/DE9903637
申请日：1999-11-16
申请人： LEICA MICROSYS LITHOGRAPHY LTD , KIRSCHSTEIN ULF CARSTEN , RISSE STEFAN , DAMM CHRISTOPH , PESCHEL THOMAS
发明人： KIRSCHSTEIN ULF-CARSTEN , RISSE STEFAN , DAMM CHRISTOPH , PESCHEL THOMAS
IPC分类号： G03F7/20 , H01L21/027 , H01L21/683 , H01L21/00
CPC分类号： G03F7/70691 , H01L21/6833
摘要： The invention relates to system for receiving and retaining a substrate (17) in a light exposure device that is fitted with a handling system for the feeding of said substrate (17), an electrostatic chuck arrangement (1) for the retention of said substrate (17) during exposure to light, whereby said arrangement can be displaced in coordinates X, Y, and an exposure lens system from which corpuscular radiation is directed onto the surface of the substrate at a right angle, corresponding to coodinate Z. The inventive retention system is provided with at least one second electrostatic chuck arrangement (1) which, like the first chuck arrangement (1), is used to retain the substrate (17) during exposure to light and is provided with a bearing surface for said substrate, whereby the bearing surface of the second chuck arrangement (6) is, however, arranged in such a way that it can de displaced in the direction of coordinate Z. In terms of retention force, both chuck arrangements (1,6) are configured in such a way that the substrate (17) is maintained in a firm position when its placed on the first chuck arrangement (1) or solely on the second chuck arrangement (6).
摘要翻译：本发明涉及用于曝光系统中的基板（17）的转移和保持系统，其包括用于向基板（17）供给静电卡盘装置（1）的处理系统，静电卡盘装置（1）可在坐标X，Y上移动以保持基板（17）在曝光期间装备有曝光光学器件，从其中微粒辐射垂直于坐标Z的曝光光学器件被引导至衬底表面。至少一个第二静电卡盘装置（6）设置在这种保持系统中，其与用于在曝光期间保持基板（17）的第一卡盘装置（1）一样具有用于基板的支撑表面，但基板的支撑表面第二卡盘装置（6）在坐标Z的方向上可移动地布置。两个Chuckanordnungen（1,6）都相对于它们的保持力而设计，使得基板17在第一卡盘装置（1）上搁置时和仅在第二卡盘装置（6）上搁置时都保持位置固定。

4. 发明申请

WO2009141168A2 DEVICE FOR JOINING AND TAPERING FIBRES OR OTHER OPTICAL COMPONENTS 审中-公开
标题翻译：设备加入和菟丝子纤维或其他光学元件
公开(公告)号：WO2009141168A2
公开(公告)日：2009-11-26
申请号：PCT/EP2009003800
申请日：2009-05-19
申请人： FRAUNHOFER GES FORSCHUNG , BOEHME STEFFEN , PESCHEL THOMAS , EBERHARDT RAMONA , TUENNERMANN ANDREAS , LIMPERT JENS
发明人： BOEHME STEFFEN , PESCHEL THOMAS , EBERHARDT RAMONA , TUENNERMANN ANDREAS , LIMPERT JENS
IPC分类号： G02B6/255
CPC分类号： B23K26/0734 , B23K26/0643 , B23K26/28 , G02B6/2551
摘要： The invention relates to a device for joining and tapering fibres and/or preferably cylindrical optical components, comprising a retaining device for holding the fibres and/or optical components in the processing position, a laser radiation source for emitting a laser beam and beam forming elements for guiding the laser beam to the processing site. At least a first beam forming element is inserted into the beam path of the laser radiation source for producing a radiation having the form of an annulus and a second beam forming element is provided for specifying the angle of incidence of the radiation having the form of an annulus onto the fibre(s) and/or optical components in the processing position.
摘要翻译：提供了一种用于接合和纤维和/或与一个保持装置，用于保持所述的纤维和/或光学部件的在加工位置最好是圆柱形光学元件的锥形的装置，用于发射激光束和用于在所述处理位置将激光束引导光束成形元件的激光束源，建议。另外，在激光源的光束路径中，用于产生环形的辐射的第一光束成形元件是至少插入，且进一步，第二光束成形元件是用于指定在光纤（或多个）和/或所提供的光学部件在加工位置上的环状的辐射的入射角。

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