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1. 发明申请

WO2010085942A3 MICROSTRUCTURE, METHOD FOR PRODUCING THE SAME, DEVICE FOR BONDING A MICROSTRUCTURE AND MICROSYSTEM 审中-公开
标题翻译：微结构，其制造方法，装置来粘合一个微结构和微
公开(公告)号：WO2010085942A3
公开(公告)日：2011-03-24
申请号：PCT/DE2010000085
申请日：2010-01-26
申请人： FRAUNHOFER GES FORSCHUNG , UNIV CHEMNITZ TECH , BRAEUER JOERG , GESSNER THOMAS , HOFMANN LUTZ , FROEMEL JOERG , WIEMER MAIK , LETSCH HOLGER , BAUM MARIO
发明人： BRAEUER JOERG , GESSNER THOMAS , HOFMANN LUTZ , FROEMEL JOERG , WIEMER MAIK , LETSCH HOLGER , BAUM MARIO
IPC分类号： B81C3/00
CPC分类号： B81C3/001 , B81C2203/019 , B81C2203/032
摘要： The invention relates to a microstructure comprising at least one bonding substrate and a reactive multilayer system, said reactive multilayer system having at least one surface layer of the bonding substrate with vertically aligned, interspaced nanostructures and regions between the nanostructures which are filled with at least one material that is a reaction partner for the material of the nanostructures. The invention further relates to a method of producing a microstructure comprising at least one bonding substrate and a reactive multilayer system, a surface layer of the bonding substrate being structured or deposited in a structured manner, thereby imparting to it vertically aligned, interspaced nanostructures and the regions between the nanostructures being filled with at least one material that is a reaction partner for the material of the nanostructures, to form the reactive multilayer system. The invention also relates to a device for bonding a microstructure, the device comprising a bonding chamber which can be opened and/or closed, and evacuated, and in which the microstructure and the further structure can be introduced and adjusted with respect to each other, and an activation mechanism coupled to the bonding chamber which mechanism is used to mechanically, electrically, electromagnetically, optically and/or thermally activate the reactive multilayer system of the microstructure in such a manner that a self-propagating, exothermal reaction takes place between the nanolayers, the multilayer system being formed by reactive nanostructures having an interposed material which is a reaction partner for the material of the nanostructures. The invention finally relates to a microsystem which is constituted of two bonding substrates and a structure lying between the bonding substrates. The structure comprises a reacted reactive layer system, the reacted reactive layer system being a reactive structure sequence of at least one surface layer provided on the bonding substrate, which surface layer has vertically aligned, interspaced nanostructures and regions between the nanostructures which are filled with at least one material that is a reaction partner for the material of the nanostructures. The microsystem is a sensor which is coated with a biological material, and/or has elements of a polymer material and/or at least one magnetic and/or piezoelectric and/or piezoresistive component.
摘要翻译：本发明涉及具有至少一个键合衬底的微结构和反应性多层系统，其中，所述反应性多层系统位于至少与垂直定向的，间隔开的纳米结构和纳米结构之间的键合衬底的表面层，具有至少一个反应物表示对所述纳米结构材料的材料填充有区域。本发明还包括一种制造微结构与至少一个键合衬底和反应性多层系统，其中，垂直取向的用于形成所述反应性多层系统中形成的，间隔的纳米结构被图案化或结构化的接合基板的一个表面层的纳米结构之间沉积的和区域的方法表示对所述纳米结构材料的材料的反应物中的至少一个被填充。此外，本发明包括联接到所述接合室激活机构用于结合微结构，其中该装置具有其中所述微结构和进一步的结构可以被插入，并调整为彼此可打开和/或关闭的，抽空的接合室的装置，和输出通过该它由与居间表示对微结构的纳米结构材料的反应性多层系统的材料的反应物形成的反应性纳米结构是这样的机械，电，电磁，光学和/或热活化来进行，所述纳米层之间的自传播的放热反应。此外，本发明涉及一种微系统，该系统由两个粘合基底的形成，并且位于键合衬底结构之间，其包括反应的反应层系统，其中所述反应的反应层系统的至少一个设置有垂直对齐的接合基板表面层上的反应结构序列，隔开的纳米结构和填充在纳米结构之间具有至少一个表示对所述纳米结构材料的区域的材料的反应物，所述微系统是一个用生物材料传感器和/或聚合材料和/或至少一个磁和/或压电和元素具有/或压阻元件。

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