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1. 发明申请

WO2012006558A3 CHARGED PARTICLE BEAM PROCESSING SYSTEM WITH VISUAL AND INFRARED IMAGING 审中-公开
标题翻译：带视觉和红外成像的带电粒子束处理系统
公开(公告)号：WO2012006558A3
公开(公告)日：2012-04-12
申请号：PCT/US2011043410
申请日：2011-07-08
申请人： FEI CO , RUE CHAD , CROWLEY DANIEL
发明人： RUE CHAD , CROWLEY DANIEL , AGORIO ENRIQUE
IPC分类号： H01J37/22 , H01J37/08 , H01J37/20 , H01J37/244
CPC分类号： G01J3/0262 , G01J3/0208 , G01J3/0278 , G01N21/9501 , G01N21/95684 , G01N2021/8825 , G01N2021/95653 , H01J37/226 , H01J37/3005 , H01J37/3056 , H01J2237/31749
摘要： A charged particle beam system for processing substrates is disclosed, comprising a charged particle column, combination infrared radiation and visible light illumination and imaging subsystems, in-vacuum optics, and a precision stage for supporting and positioning the substrate alternately under the charged particle column and the imaging system. The axes of the charged particle column and imaging system are offset to enable much closer working distances for both imaging and beam processing than would be possible in a single integrated assembly. A method for extremely accurately calibrating the offset between the column and imaging system is disclosed, enabling beam processing at precisely-determined locations on the substrate. The imaging system is capable of locating sub-surface features on the substrate which cannot be seen using the charged particle beam. Two illumination modes are disclosed, enabling both bright-field and dark-field imaging in infrared radiation and visible light.
摘要翻译：公开了一种用于处理基板的带电粒子束系统，其包括带电粒子柱，组合式红外辐射和可见光照明和成像子系统，真空中的光学器件以及用于交替地在带电粒子柱下方支撑和定位衬底的精密台，以及成像系统。带电粒子柱和成像系统的轴偏移，使得成像和光束处理的工作距离比单个集成组件中的可能距离更近。公开了一种用于非常准确地校准柱和成像系统之间的偏移的方法，使得能够在衬底上精确确定的位置处进行光束处理。成像系统能够在衬底上定位使用带电粒子束无法看到的子表面特征。公开了两种照明模式，使红外辐射和可见光中的明场和暗场成像成为可能。

2. 发明申请

WO2012006558A4 CHARGED PARTICLE BEAM PROCESSING SYSTEM WITH VISUAL AND INFRARED IMAGING 审中-公开
标题翻译：具有可视和红外成像的充电颗粒光束处理系统
公开(公告)号：WO2012006558A4
公开(公告)日：2012-06-14
申请号：PCT/US2011043410
申请日：2011-07-08
申请人： FEI CO , RUE CHAD , CROWLEY DANIEL
发明人： RUE CHAD , CROWLEY DANIEL , AGORIO ENRIQUE
IPC分类号： H01J37/22 , H01J37/08 , H01J37/20 , H01J37/244
CPC分类号： G01J3/0262 , G01J3/0208 , G01J3/0278 , G01N21/9501 , G01N21/95684 , G01N2021/8825 , G01N2021/95653 , H01J37/226 , H01J37/3005 , H01J37/3056 , H01J2237/31749
摘要： A charged particle beam system for processing substrates is disclosed, comprising a charged particle column, combination infrared radiation and visible light illumination and imaging subsystems, in-vacuum optics, and a precision stage for supporting and positioning the substrate alternately under the charged particle column and the imaging system. The axes of the charged particle column and imaging system are offset to enable much closer working distances for both imaging and beam processing than would be possible in a single integrated assembly. A method for extremely accurately calibrating the offset between the column and imaging system is disclosed, enabling beam processing at precisely-determined locations on the substrate. The imaging system is capable of locating sub-surface features on the substrate which cannot be seen using the charged particle beam. Two illumination modes are disclosed, enabling both bright-field and dark-field imaging in infrared radiation and visible light.
摘要翻译：公开了一种用于处理衬底的带电粒子束系统，包括带电粒子柱，组合红外辐射和可见光照明和成像子系统，真空内光学器件，以及精确级，用于在充电粒子柱下交替地支撑和定位衬底，成像系统。带电粒子柱和成像系统的轴线偏移，以使成像和光束处理的工作距离远远大于单个集成组件中可能的距离。公开了一种用于非常精确校准柱和成像系统之间的偏移的方法，使得能够在基板上的精确确定的位置处进行光束处理。成像系统能够将基底上的子表面特征定位为使用带电粒子束不能看到的。公开了两种照明模式，使得能够在红外辐射和可见光下进行亮场和暗场成像。

3. 发明申请

WO2008051880B1 METHOD AND APPARATUS FOR SAMPLE EXTRACTION AND HANDLING 审中-公开
公开(公告)号：WO2008051880B1
公开(公告)日：2008-09-04
申请号：PCT/US2007082030
申请日：2007-10-20
申请人： FEI CO , AGORIO ENRIQUE , HUDSON JAMES EDGAR , GERHARD DANIEL , TANGUAY MICHAEL , ARJAVAC JASON
发明人： AGORIO ENRIQUE , HUDSON JAMES EDGAR , GERHARD DANIEL , TANGUAY MICHAEL , ARJAVAC JASON
IPC分类号： G01R1/073 , H01L21/66
CPC分类号： H01J37/20 , G01N1/286 , G01N1/32 , G01N2001/2873 , G01N2001/2886 , G01R31/2893 , H01J37/26 , H01J37/28 , H01J37/285 , H01J37/31 , H01J2237/202 , H01J2237/2802 , H01J2237/2812 , H01J2237/3109 , H01J2237/3114 , H01J2237/31745
摘要： An improved method and apparatus for extracting and handling samples for S/TEM analysis. Preferred embodiments of the present invention make use of a micromanipulator and a hollow microprobe probe using vacuum pressure to adhere the microprobe tip to the sample. By applying a small vacuum pressure to the lamella through the microprobe tip, the lamella can be held more securely and its placement controlled more accurately than by using electrostatic force alone. By using a probe having a beveled tip and which can also be rotated around its long axis, the extracted sample can be placed down flat on a sample holder. This allows sample placement and orientation to be precisely controlled, thus greatly increasing predictability of analysis and throughput.

4. 发明申请

WO2008051880A2 METHOD AND APPARATUS FOR SAMPLE EXTRACTION AND HANDLING 审中-公开
标题翻译：用于样品提取和处理的方法和设备
公开(公告)号：WO2008051880A2
公开(公告)日：2008-05-02
申请号：PCT/US2007082030
申请日：2007-10-20
申请人： FEI CO , AGORIO ENRIQUE , HUDSON JAMES EDGAR , GERHARD DANIEL , TANGUAY MICHAEL , ARJAVAC JASON
发明人： AGORIO ENRIQUE , HUDSON JAMES EDGAR , GERHARD DANIEL , TANGUAY MICHAEL , ARJAVAC JASON
IPC分类号： G01R1/073 , H01L21/66
CPC分类号： H01J37/20 , G01N1/286 , G01N1/32 , G01N2001/2873 , G01N2001/2886 , G01R31/2893 , H01J37/26 , H01J37/28 , H01J37/285 , H01J37/31 , H01J2237/202 , H01J2237/2802 , H01J2237/2812 , H01J2237/3109 , H01J2237/3114 , H01J2237/31745
摘要： An improved method and apparatus for extracting and handling samples for S/TEM analysis. Preferred embodiments of the present invention make use of a micromanipulator and a hollow microprobe probe using vacuum pressure to adhere the microprobe tip to the sample. By applying a small vacuum pressure to the lamella through the microprobe tip, the lamella can be held more securely and its placement controlled more accurately than by using electrostatic force alone. By using a probe having a beveled tip and which can also be rotated around its long axis, the extracted sample can be placed down flat on a sample holder. This allows sample placement and orientation to be precisely controlled, thus greatly increasing predictability of analysis and throughput.
摘要翻译：用于S / TEM分析的提取和处理样品的改进方法和设备。本发明的优选实施例利用微操作器和使用真空压力的空心微探针探针将微探针尖端粘附到样本。通过微探针尖对薄片施加小的真空压力，薄片可以更牢固地保持，并且其放置比单独使用静电力更精确地控制。通过使用具有斜面尖端并且也可以围绕其长轴旋转的探针，可以将提取的样本平放在样本架上。这样可以精确控制样品放置和定位，从而大大提高分析和通量的可预测性。

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