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    • 2. 发明申请
    • ROBUST RADIATION DETECTOR COMPRISING DIAMOND
    • 包含钻石的鲁棒辐射探测器
    • WO2008059428A2
    • 2008-05-22
    • PCT/IB2007/054583
    • 2007-11-12
    • ELEMENT SIX LIMITEDDONALD, Heather JuneWHITEHEAD, Andrew JohnWORT, Christopher John HowardOLIVER, Kevin John
    • WHITEHEAD, Andrew JohnWORT, Christopher John HowardOLIVER, Kevin John
    • G01T1/26
    • G01T1/26
    • A radiation detector comprises a substrate of diamond material and at least one electrode formed at a surface of the substrate. The electrode comprises electrically conductive material deposited in a cavity in the surface of the substrate so that at least a portion of the material of the electrode is below the surface of the substrate. The cavity will typically be an elongate trench or channel in which electrically conductive material such as boron-doped diamond is deposited. In some embodiments, at least two electrodes are located adjacent to one another at the surface of the substrate. In other embodiments, the device has a plurality of electrodes, at least one of which is located at a first surface and at least one of which is located at an opposed second surface of the substrate. In the latter case, an electrode at one surface of the substrate can be connected to an electrode at the opposed surface of the substrate by means of a conductive via, which consists of a through-hole filled or coated with conductive material. Typically, the electrodes are arranged in an interdigitated configuration, each electrode having a plurality of elongate electrode elements. Each such electrode element extends parallel to at least one adjacent electrode element of another electrode.
    • 放射线检测器包括金刚石材料的衬底和形成在衬底的表面处的至少一个电极。 电极包括沉积在基底表面中的空腔中的导电材料,使得电极的材料的至少一部分位于基底的表面下方。 该腔通常将是其中沉积诸如硼掺杂金刚石之类的导电材料的细长沟槽或沟道。 在一些实施例中,至少两个电极在衬底的表面处彼此相邻定位。 在其他实施例中,该装置具有多个电极,其中至少一个电极位于第一表面处,并且其中至少一个电极位于基板的相对的第二表面处。 在后一种情况下,基板一个表面上的电极可以通过导电通孔连接到基板相对表面上的电极,该导电通孔由填充或涂覆有导电材料的通孔组成。 典型地,电极布置成交叉配置,每个电极具有多个细长电极元件。 每个这样的电极元件平行于另一电极的至少一个相邻电极元件延伸。