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    • 4. 发明申请
    • FLUID EJECTOR INCLUDING MEMS COMPOSITE TRANSDUCER
    • 流体喷射器包括MEMS复合传感器
    • WO2012145163A1
    • 2012-10-26
    • PCT/US2012/032047
    • 2012-04-04
    • EASTMAN KODAK COMPANYHUFFMAN, James, D.ZHANG, WeibinLEBENS, John, Andrew
    • HUFFMAN, James, D.ZHANG, WeibinLEBENS, John, Andrew
    • B41J2/14
    • B41J2/14282B41J2/14427
    • A fluid ejector (200) includes a substrate (110), a MEMS transducing member, a compliant membrane (130), walls, and a nozzle. First portions of the substrate define an outer boundary of a cavity (115). Second portions of the substrate define a fluidic feed (116). A first portion (121) of the MEMS transducing member is anchored to the substrate (110). A second portion (122) of the MEMS transducing member extends over at least a portion of the cavity (115) and is free to move relative to the cavity (115). The compliant membrane (130) is positioned in contact with the MEMS transducing member. A first portion (131) of the compliant membrane covers the MEMS transducing member. A second portion (132) of the compliant membrane is anchored to the substrate. Partitioning walls (202) define a chamber that is fluidically connected to the fluidic feed (116). At least the second portion of the MEMS transducing member is enclosed within the chamber. The nozzle is disposed proximate to the second portion of the MEMS transducing member and distal to the fluidic feed.
    • 流体喷射器(200)包括基底(110),MEMS换能构件,柔性膜(130),壁和喷嘴。 衬底的第一部分限定空腔(115)的外边界。 衬底的第二部分限定流体进料(116)。 MEMS转换构件的第一部分(121)被锚固到衬底(110)上。 MEMS转换构件的第二部分(122)在空腔(115)的至少一部分上延伸并且相对于空腔(115)自由移动。 柔性膜(130)被定位成与MEMS换能件接触。 柔性膜的第一部分(131)覆盖MEMS换能构件。 柔顺膜的第二部分(132)锚固到基底上。 分隔壁(202)限定流体连接到流体进料(116)的室。 至少MEMS转换构件的第二部分被封闭在腔室内。 喷嘴靠近MEMS转换构件的第二部分并且远离流体进料设置。