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    • 2. 发明申请
    • AN ATMOSPHERIC PRESSURE PLASMA ASSEMBLY
    • 大气压力等离子体总成
    • WO2003086031A1
    • 2003-10-16
    • PCT/EP2003/004349
    • 2003-04-08
    • DOW CORNING IRELAND LIMITEDGOODWIN, Andrew, JamesLEADLEY, StuartSWALLOW, FrankDOBBYN, Peter
    • GOODWIN, Andrew, JamesLEADLEY, StuartSWALLOW, FrankDOBBYN, Peter
    • H05H1/24
    • H05H1/2406H05H2001/2412
    • An atmospheric pressure plasma assembly (1) comprising a first and second pair of vertically arrayed, parallel spaced-apart planar electrodes (36) with at least one dielectric plate (31) between said first pair, adjacent one electrode and at least one dielectric plate (31) between said second pair adjacent one electrode, the spacing between the dielectric plate and the other dielectric plate or electrode of each of the first and second pairs of electrodes forming a first and second plasma regions (25, 60) characterized in that the assembly further comprises a means of transporting a substrate (70, 71, 72) successively through said first and second plasma regions (25, 60) and an atomizer (74) adapted to introduce an atomized liquid or solid coating making material into one of said first or second plasma regions.
    • 一种大气压等离子体组件(1),包括第一和第二对垂直排列的平行隔开的平面电极(36),所述平面电极具有在所述第一对之间,相邻的一个电极和至少一个电介质板之间的至少一个电介质板(31) (31)在所述第二对相邻的一个电极之间,所述电介质板和所述第一和第二对电极中的每一对电极的另一电介质板或电极之间的间隔形成第一和第二等离子体区域(25,60),其特征在于, 组件还包括依次通过所述第一和第二等离子体区域(25,60)输送衬底(70,71,72)的装置和适于将雾化液体或固体涂层制造材料引入所述第一和第二等离子体区域之一的雾化器(74) 第一或第二等离子体区域。
    • 3. 发明申请
    • AN ATMOSPHERIC PRESSURE PLASMA ASSEMBLY
    • 大气压力等离子体总成
    • WO2003085693A1
    • 2003-10-16
    • PCT/EP2003/004345
    • 2003-04-08
    • DOW CORNING IRELAND LIMITEDSWALLOW, FrankDOBBYN, PeterLEADLEY, Stuart
    • SWALLOW, FrankDOBBYN, PeterLEADLEY, Stuart
    • H01J37/32
    • H05H1/46C23C4/123C23C4/134H05H1/2406H05H2001/2412H05H2001/4697
    • An atmospheric plasma generation assembly (100) having a body (17) containing a reactive agent introducing means, a process gas introducing means and one or more multiple parallel electrode arrangements adapted for generating a plasma. Each electrode arrangement having at least one partially dielectric coated electrode (3, 4) said assembly being adapted such that the only means of exit for a process gas and atomised liquid or solid reactive agent introduced into said assembly is through the plasma region (6) between the aforementioned electrodes (3, 4). The assembly is adapted to move relative to a substrate (1) substantially adjacent to the aforementioned electrodes outermost tips (23). The assembly may also comprise an extractor unit surrounding the plasma generating assembly, comprising an extractor body (8) which is adapted to isolate the assembly from external atmosphere and provide a means of removing exhaust process gas, reactive agents and by-products.
    • 具有包含反应剂引入装置的主体(17),处理气体引入装置和适于产生等离子体的一个或多个多个平行电极装置的大气等离子体产生组件(100)。 每个电极布置具有至少一个部分电介质涂覆的电极(3,4),所述组件适于使得引入到所述组件中的工艺气体和雾化液体或固体反应剂的唯一出口装置通过等离子体区域(6) 在上述电极(3,4)之间。 组件适于相对于基本上邻近上述电极最外端(23)的衬底(1)移动。 组件还可以包括围绕等离子体产生组件的提取器单元,包括提取器主体(8),其适于将组件与外部气氛隔离,并提供去除废气处理气体,反应剂和副产物的手段。
    • 6. 发明申请
    • GEL AND POWDER MAKING
    • 凝胶和粉末制作
    • WO2003086029A1
    • 2003-10-16
    • PCT/EP2003/004344
    • 2003-04-08
    • DOW CORNING IRELAND LIMITEDDOW CORNING CORPORATIONGOODWIN, Andrew, JamesLEADLEY, StuartCHEVALIER, PierrePARBHOO, Bhukandas
    • GOODWIN, Andrew, JamesLEADLEY, StuartCHEVALIER, PierrePARBHOO, Bhukandas
    • H05H1/24
    • C23C4/134C23C4/123
    • A method of forming a gel and/or powder of a metallic oxide, metalloid oxide and/or a mixed oxide or resin thereof from one or more respective organometallic liquid precursors(s) and/or organometalloid liquid precursors(s) by oxidatively treating said liquid in a non-thermal equilibrium plasma discharage and/or an ionized bas stream resulting therefrom and collecting the resulting product. The non-thermal equilibrium plasma is preferably atmospheric plasma glow discharge, continuous low pressure glow discharge plasma, low pressure pulse plasma or direct barrier discharge. The metallic oxides this invention particularly relates to are those in columns 3a and 4a of the periodic table namely, aluminium, gallium, indium, tin and lead and the transition metals. The metalloids may be selected from boron, silicon, germanium, arsenic, antimony and tellurium. Preferred metalloid oxide products made according to the process of the present invention are in particular oxides of silicon including silicone resins and the like, boron, antimony and germanium.
    • 一种由一种或多种相应的有机金属液体前体和/或有机金属液体前体形成金属氧化物,准金属氧化物和/或其混合氧化物或树脂的凝胶和/或粉末的方法,其通过氧化所述 在非热平衡等离子体放电中的液体和/或由此产生的离子化碱性流,并收集所得产物。 非热平衡等离子体优选为大气等离子体辉光放电,连续低压辉光放电等离子体,低压脉冲等离子体或直接屏障放电。 本发明的金属氧化物特别涉及元素周期表的第3a和4a栏,即铝,镓,铟,锡和铅以及过渡金属。 准金属可以选自硼,硅,锗,砷,锑和碲。 根据本发明方法制备的优选的准金属氧化物产物特别是硅的氧化物,包括硅树脂等,硼,锑和锗。