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    • 1. 发明申请
    • LOCK-IN THERMOGRAPHY METHOD AND SYSTEM FOR HOT SPOT LOCALIZATION
    • 用于热点定位的锁定热成像方法和系统
    • WO2015024679A1
    • 2015-02-26
    • PCT/EP2014/061232
    • 2014-05-30
    • DCG SYSTEMS, INC.FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E. V.
    • SCHMIDT, ChristianMEINHARDT-WILDEGGER, RaikoALTMANN, FrankNAUMANN, FalkSCHLANGEN, Rudolf
    • G01N25/72G01R31/309
    • G01J5/0066G01J5/0096G01J5/10G01N25/72G01R31/311
    • A method for localizing a hot spot (27) in a sample (12), in particular an encapsulated device under test (DUT), by using lock-in thermography (LIT), where at least one heat source (23) of an electrical circuit is buried within the sample (12) and generated the hot spot (27) upon flow of current therein, comprises applying a non-harmonic excitation wave test signal at a lock-in frequency to the electrical circuit of the sample (12) to activate the heat source (23) for generating the hot spot (27); imaging the sample (12) using an infrared sensor (16) to obtain IR images of the sample (12) while the non-harmonic test signal is applied to the electrical circuit; and detecting a thermal response signal obtained from the imaging, the thermal response signal being in correlation to the thermal heat propagation within the sample (12). The invention is characterized in that applying the non-harmonic test signal comprises applying a non-harmonic signal at a single selected frequency; that the thermal response signal is subjected to a Fourier transformation (FT) to break down the thermal response signal into a frequency spectrum containing harmonics signals of a base and higher harmonic signals to thereby obtain a plurality of frequency-specific response signals at multiple specific frequencies; that the phase shifts of each of the frequency-specific response signals is determined; that a frequency vs. phase shift curve is obtained from the phase shifts of the frequency-specific response signals; and that a plurality of images, each corresponding to one of the specific frequencies are displayed.
    • 一种用于通过使用锁定热成像(LIT)来定位样品(12)中的热点(27),特别是被测试的被封装器件(DUT)的方法,其中至少一个电源(23) 电路被埋在样品(12)内,并且在其中流过电流时产生热点(27),包括以锁定频率将非谐波激发波测试信号施加到样品(12)的电路至 激活用于产生热点(27)的热源(23); 使用红外传感器(16)对样品(12)成像,以获得样品(12)的IR图像,同时将非谐波测试信号施加到电路; 以及检测从所述成像获得的热响应信号,所述热响应信号与所述样品(12)内的热传热相关。 本发明的特征在于,应用非谐波测试信号包括以单个选定频率施加非谐波信号; 对热响应信号进行傅里叶变换(FT),以将热响应信号分解为包含基波和高次谐波信号的谐波信号的频谱,从而获得多个特定频率的特定响应信号 ; 确定每个频率特定响应信号的相移; 从频率特定响应信号的相移中获得频率相移相位曲线; 并且显示各自对应于特定频率之一的多个图像。