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1. 发明申请

WO2011023765A1 METROLOGY MODULE FOR LASER SYSTEM 审中-公开
标题翻译：激光系统计量模块
公开(公告)号：WO2011023765A1
公开(公告)日：2011-03-03
申请号：PCT/EP2010/062482
申请日：2010-08-26
申请人： CARL ZEISS LASER OPTICS GMBH , MÜNZ, Holger , ANDERL, Willi , KRAUS, Johannes , HEINRICH, Andreas
发明人： MÜNZ, Holger , ANDERL, Willi , KRAUS, Johannes , HEINRICH, Andreas
IPC分类号： G02B27/12 , G02B27/14 , H01S3/097 , G01J4/04 , G03F7/20 , G02B27/28 , G01J1/42
CPC分类号： G01J4/04 , G01J1/4257 , G02B27/10 , G02B27/1073 , G02B27/108 , G03F7/70025 , G03F7/70566 , G03F7/7085 , H01S3/02
摘要： A laser system (100) includes a laser (110), a housing (101) including the laser and a first chamber (120) arranged to receive laser radiation from the laser during operation of the laser system. The system also includes a first optical element (220) separating the first chamber from an adjacent chamber, the first optical element (220) being arranged in a path of the laser radiation (201) and forming a window between the first chamber (225) and the adjacent chamber; a beamsplitter (210) arranged in the path of the radiation (201) either upstream or downstream from the first optical element (220); and a radiation detection device (240). During operation of the system, the beamsplitter (210) receives the laser radiation (201), transmits a first portion of the laser radiation as a main beam (201) and directs a second portion (202, 203) of the laser radiation as a first sub-beam towards the radiation detection device.
摘要翻译：激光系统（100）包括激光器（110），包括激光器的壳体（101）和布置成在激光系统的操作期间接收来自激光器的激光辐射的第一腔室（120）。该系统还包括将第一腔室与相邻腔室分开的第一光学元件（220），第一光学元件（220）被布置在激光辐射（201）的路径中，并且在第一腔室（225）和相邻的室; 在所述第一光学元件（220）的上游或下游布置在所述辐射路径（201）中的分束器（210）; 和放射线检测装置（240）。在系统操作期间，分束器（210）接收激光辐射（201），将激光辐射的第一部分作为主光束（201）传输，并将激光辐射的第二部分（202,203）引导为朝向辐射检测装置的第一子光束。

2. 发明申请

WO2005109104A3 OPTICAL COMPONENT HAVING AN IMPROVED THERMAL BEHAVIOR 审中-公开
公开(公告)号：WO2005109104A3
公开(公告)日：2005-11-17
申请号：PCT/EP2005/004861
申请日：2005-05-04
申请人： Carl Zeiss Laser Optics GmbH , EGLE, Wilhelm , HAFNER, Wolfgang , ANDERL, Willi , BINGEL, Ulrich , MÜNZ, Holger , NEIDHARDT, Thomas
发明人： EGLE, Wilhelm , HAFNER, Wolfgang , ANDERL, Willi , BINGEL, Ulrich , MÜNZ, Holger , NEIDHARDT, Thomas
IPC分类号： G03F7/20
摘要： An optical component is suggested, comprising at least one optically effective optical element (A1) which heats up when irradiated with light, and at least one holding element (B1) for the at least one optical element for holding the at least one optical element (A1) in a carrier structure, wherein the at least one optical element is connected to the at least one holding element in heat conducting fashion, and wherein the at least one holding element is at least partially provided with an active cooling system (B2) for carrying off heat from the at least one optical element.

3. 发明申请

WO2007048507A1 BEAM SEPARATING OPTICAL ELEMENT 审中-公开
标题翻译：光束分离光学元件
公开(公告)号：WO2007048507A1
公开(公告)日：2007-05-03
申请号：PCT/EP2006/009852
申请日：2006-10-12
申请人： CARL ZEISS LASER OPTICS GMBH , LE MAIRE, Michel , TRITSCHLER, Thorsten , SHKLOVER, Vitaly , MÜNZ, Holger , EGGER, Rafael , DERST, Gerhard
发明人： LE MAIRE, Michel , TRITSCHLER, Thorsten , SHKLOVER, Vitaly , MÜNZ, Holger , EGGER, Rafael , DERST, Gerhard
IPC分类号： G02B27/09
CPC分类号： G02B27/0905 , B23K26/066 , G02B27/0972 , G02B27/0977 , G02B27/0988
摘要： The invention relates to a beam seperating optical element (26) for limiting an illuminating field of an incident optical beam (24) comprising: a first surface (28) and a second surface (30), said first surface and said second surface enclosing an angle and forming an edge (32), said edge spatially separating said incident optical beam into at least two sub-beam (34, 36), and having a deviation from a predetermined shape of not more than 20 µm/m length.
摘要翻译：本发明涉及一种用于限制入射光束（24）的照明场的光束分离光学元件（26），包括：第一表面（28）和第二表面（30），所述第一表面和所述第二表面包围并且形成边缘（32），所述边缘将所述入射光束空间上分离成至少两个子光束（34,36），并且具有与不大于20μm/ m长的预定形状的偏差。

4. 发明申请

WO2007141185A2 HOMOGENIZER WITH REDUCED INTERFERENCE 审中-公开
标题翻译：均质机减少干扰
公开(公告)号：WO2007141185A2
公开(公告)日：2007-12-13
申请号：PCT/EP2007/055323
申请日：2007-05-31
申请人： CARL ZEISS LASER OPTICS GMBH , EGGER, Rafael , MÜNZ, Holger
发明人： EGGER, Rafael , MÜNZ, Holger
IPC分类号： G02B27/48 , G02B27/09 , H01S3/00 , B23K26/06
CPC分类号： B23K26/0604 , B23K26/0613 , G02B27/0927 , G02B27/0961 , G03F7/70583 , H01S3/005
摘要： The invention relates to a method for creating a target intensity distribution (20) in a target field (3) from a first input light beam (4) propagating in a first propagation direction and a second input light beam (5), whereby said first input light beam (4) and said second input light beam (5) entering a light entrance surface (6a, 6b) of a cylindrical lens array (1a) of a homogenizer. According to the invention said second input light beam (5) propagates in a second propagation direction differing from said first propagation direction. The invention further relates to an optical system for creating a target intensity distribution (20) in a target field (3) comprising: a first light source for generating a first input light beam (4) and a second light source for generating a second input light beam (5), or a single light source for generating a light beam and a beam splitter for splitting said light beam into said first input light beam and said second input light beam, a first directing device for directing said first input light beam (4) to propagate in a first propagation direction and a ho mogenizer having a cylindrical lens array (1a) with a light entrance surface (6a, 6b) for being entered by said first input light beam (4) and said second input light beam (5). According to the invention there exists a second directing device for directing said second input light beam (5) propagating in a second propagation direction differing from said first propagation direction when entering said light entrance surface (6a, 6b).
摘要翻译：本发明涉及一种用于在从第一传播方向传播的第一输入光束（4）和第二输入光束（5）中产生目标场（3）中的目标强度分布（20）的方法，其中所述第一输入光束（4）和所述第二输入光束（5）进入均质器的柱面透镜阵列（1a）的光入射表面（6a，6b）。根据本发明，所述第二输入光束（5）沿与第一传播方向不同的第二传播方向传播。本发明还涉及一种用于在目标场（3）中产生目标强度分布（20）的光学系统，包括：第一光源，用于产生第一输入光束（4）和第二光源，用于产生第二输入光束（5）或用于产生光束的单个光源和用于将所述光束分成所述第一输入光束和所述第二输入光束的分束器，用于引导所述第一输入光束（ 4）在第一传播方向上传播，具有柱面透镜阵列（1a）的具有光入射表面（6a，6b）的霍尔发生器由所述第一输入光束（4）和所述第二输入光束（ 5）。根据本发明，当进入所述光入射表面（6a，6b）时，存在用于引导在与所述第一传播方向不同的第二传播方向上传播的所述第二输入光束（5）的第二引导装置。

5. 发明申请

WO2006066687A1 OPTICAL SYSTEM FOR CREATING A LINE FOCUS, A SCANNING SYSTEM FOR PRODUCING A SCANNING BEAM FOCUS AND A METHOD FOR LASER PROCESSING OF A SUBSTRATE 审中-公开
标题翻译：用于创建线聚焦的光学系统，用于产生扫描光束聚焦的扫描系统和用于激光加工基板的方法
公开(公告)号：WO2006066687A1
公开(公告)日：2006-06-29
申请号：PCT/EP2005/012658
申请日：2005-11-26
申请人： CARL ZEISS LASER OPTICS GMBH , HERKOMMER, Alois , MÜNZ, Holger
发明人： HERKOMMER, Alois , MÜNZ, Holger
IPC分类号： G02B27/09 , B23K26/06
CPC分类号： G02B27/0983 , B23K26/0738 , B23K26/082 , G02B19/0028 , G02B19/0047 , G02B26/105
摘要： An optical system for producing a line focus of an input light beam comprises a light source emitting the input light beam propagating in a propagation direction, the light beam having an extension in a first dimension transverse to the propagation direction and an extension in a second dimension transverse to the first dimension and to the propagation direction, and at least a first mirror which is curved in the second dimension so that the light beam is focused in the second dimension to the line focus.
摘要翻译：用于产生输入光束的线焦点的光学系统包括发射沿传播方向传播的输入光束的光源，所述光束具有在垂直于传播方向的第一尺寸中的延伸部和在第二维度上的延伸部分横向于第一尺寸和传播方向，以及至少第一反射镜，其在第二维度上弯曲，使得光束在第二维度上被聚焦到线焦点。

6. 发明申请

WO2007048474A1 LIGHT BEAM INTENSITY NON-UNIFORMITY CORRECTION DEVICE AND METHOD FOR AMENDING INTENSITY DISTRIBUTION OF A LIGHT BEAM 审中-公开
标题翻译：光束强度非均匀性校正装置和修改光束强度分布的方法
公开(公告)号：WO2007048474A1
公开(公告)日：2007-05-03
申请号：PCT/EP2006/009168
申请日：2006-09-21
申请人： CARL ZEISS LASER OPTICS GMBH , SHKLOVER, Vitaliy , KIEREY, Holger , MÜNZ, Holger , LE MAIRE, Michel , WEIGL, Bernhard
发明人： SHKLOVER, Vitaliy , KIEREY, Holger , MÜNZ, Holger , LE MAIRE, Michel , WEIGL, Bernhard
IPC分类号： G02B1/11 , G03F7/20 , G02B27/00
CPC分类号： G02B27/0988 , G02B1/115 , G02B5/22 , G02B13/08 , G02B27/0966 , G03F7/70591 , G03F7/70958 , G03F7/70975
摘要： The invention relates to a light beam intensity non-uniformity correction device (34) comprising an optical element (34) having a light entrance face (36) with an antireflective property. According to the invention said antireflective property is locally amended in order to enhance light beam intensity uniformity. The invention further relates to a method for amending intensity distribution of a light beam (12) in an optical system (2) having one optical element or a plurality of optical elements (16, 24, 26, 34), comprising the steps of: a) assembling said optical system (2) with said optical elements (16, 24, 26, 34) being arranged in predetermined positions, b) measuring intensity distribution, c) calculating locally required increase or decrease in absorption and/or reflection of one of said optical elements (34) in order to amend measured intensity distribution into a predetermined intensity distribution, d) removing said one of said optical elements (34) from said optical system (2), e) locally amending absorption and/or reflection of said one of said optical elements according to the calculation, f) installing said one of said optical elements (34) in said predetermined position in said optical system (2).
摘要翻译：本发明涉及一种光束强度不均匀性校正装置（34），其包括具有防反射特性的光入射面（36）的光学元件（34）。根据本发明，为了增强光束强度均匀性，局部地修改了抗反射性能。本发明还涉及一种用于修正具有一个光学元件或多个光学元件（16,24,26,34）的光学系统（2）中的光束（12）的强度分布的方法，包括以下步骤： a）将所述光学系统（2）与布置在预定位置的所述光学元件（16,24,26,34）组装，b）测量强度分布，c）计算局部所需的增加或减小的吸收和/或反射的一个的所述光学元件（34），以便将测量的强度分布修改为预定的强度分布，d）从所述光学系统（2）中去除所述光学元件（34）中的所述一个，e）局部地修改所述光学元件（34）的吸收和/或反射根据所述计算所述光学元件中的一个，f）将所述光学元件（34）中的所述一个安装在所述光学系统（2）中的所述预定位置。

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