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    • 3. 发明申请
    • MICRO-ELECTROMECHANICAL RELAYS
    • 微电子继电器
    • WO1998034269A1
    • 1998-08-06
    • PCT/US1997001885
    • 1997-02-04
    • CALIFORNIA INSTITUTE OF TECHNOLOGY
    • CALIFORNIA INSTITUTE OF TECHNOLOGYTAI, Yu-ChongWRIGHT, John, A.
    • H01L20/78
    • H01H50/005H01H2001/0063
    • A micro-electromechanical relay ("micro-relay") designed to both miniaturize and improve upon present day electromechanical relays. The micromachining fabrication process used to make the inventive micro-relay is based upon technology originally used by integrated circuit (IC) manufacturers. In simplest terms, the preferred inventive process consists of three steps, all performed using micromachining techniques. First, a layer of magnetic material is laid down on a substrate and patterned into a desired shape. Next, an electromagnetic coil (3) is created adjacent this material. Finally, a second layer of very efficient magnetic material is laid down adjacent the first two layers, forming a magnetic circuit, and having a portion fashioned into a deflectable structure, such as a cantilever beam (4A). The deflectable structure (4A, 4B) has at least a portion that is suspended over or adjacent to at least one electrical contact. In operation, current passes through the coil (3), clausing the deflectable structure (4A, 4B) to defect, and either make or break contact with the electrical contacts. The invention includes a unique unpowered hold feature. By integrating an electrostatic actuating capacitor into the micro-relay, an electrostatic force can be generated between the cantilever beam and the substrate (1) of the micro-relay that is strong enough to hold the relay in the "ON" position. Turning the relay "OFF" requires only that the voltage be removed.
    • 微机电继电器(“微型继电器”)设计用于小型化和改进现代机电继电器。 用于制造本发明的微型继电器的微加工制造工艺基于最初由集成电路(IC)制造商使用的技术。 简单来说,优选的本发明方法由三个步骤组成,全部使用微加工技术进行。 首先,将一层磁性材料放置在基底上并图案化成所需的形状。 接下来,在该材料附近形成电磁线圈(3)。 最后,第二层非常有效的磁性材料铺设在邻近前两层的地方,形成一个磁路,并将一部分形成为可偏转结构,如悬臂梁(4A)。 可偏转结构(4A,4B)具有至少一部分悬挂在至少一个电触头上或附近的部分。 在操作中,电流通过线圈(3),使可偏转结构(4A,4B)发生缺陷,并与电触点断开或断开。 本发明包括独特的无动力保持特征。 通过将静电驱动电容器集成到微型继电器中,可以在悬臂梁和微型继电器的基板(1)之间产生足够强的静电力,以将继电器保持在“接通”位置。 关闭继电器“OFF”仅需要去除电压。
    • 5. 发明申请
    • SENSORS FOR DETECTING ANALYTES IN FLUIDS
    • 用于检测流体分析仪的传感器
    • WO1998007024A1
    • 1998-02-19
    • PCT/US1997014070
    • 1997-08-11
    • CALIFORNIA INSTITUTE OF TECHNOLOGY
    • CALIFORNIA INSTITUTE OF TECHNOLOGYLEWIS, Nathan, S.SEVERIN, Erik
    • G01N27/12
    • G01N27/126G01N33/0031
    • Chemical sensors for detecting analytes in fluids comprise first and second conductive elements (e.g., electrical leads) electrically coupled to and separated by a chemically sensitive resistor which provides an electrical path between the conductive elements. The resistor comprises a plurality of alternating nonconductive regions (comprising a nonconductive organic polymer) and conductive regions (comprising a conductive material) transverse to the electrical path. The resistor provides a difference in resistance between the conductive elements when contacted with a fluid comprising a chemical analyte at a first concentration, than when contacted with a fluid comprising the chemical analyte at a second different concentration. Arrays of such sensors are constructed with at least two sensors having different chemically sensitive resistors providing dissimilar such differences in resistance. Variability in chemical sensitivity from sensor to sensor is provided by qualitatively or quantitatively varying the composition of the conductive and/or nonconductive regions. An electronic nose for detecting an analyte in a fluid may be constructed by using such arrays in conjunction with an electrical measuring device electrically connected to the conductive elements of each sensor.
    • 用于检测流体中的分析物的化学传感器包括电耦合到化学敏感电阻器并且由化学敏感电阻器分隔的第一和第二导电元件(例如电引线),其提供导电元件之间的电路径。 电阻器包括多个交替的非导电区域(包括非导电有机聚合物)和横向于电路径的导电区域(包括导电材料)。 当与包含第一浓度的化学分析物的流体接触时,电阻器在与包含化学分析物的流体以第二不同浓度接触时与导电元件之间的电阻差异。 这种传感器的阵列由具有不同化学敏感电阻器的至少两个传感器构成,提供不同的电阻差异。 通过定性地或定量地改变导电和/或非导电区域的组成来提供从传感器到传感器的化学敏感性的变化。 用于检测流体中的分析物的电子鼻可以通过使用这样的阵列结合电连接到每个传感器的导电元件的电测量装置来构造。