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1. 发明申请

WO2009117693A2 METHOD OF RECLAIMING AND STORING A VALUABLE PROCESS GAS 审中-公开
标题翻译：回收和储存有价值工艺气体的方法
公开(公告)号：WO2009117693A2
公开(公告)日：2009-09-24
申请号：PCT/US2009/037862
申请日：2009-03-20
申请人： BROOKS AUTOMATION, INC. , BARTLETT, Allen, J. , BALL- DILFAZIO, Doreen, J.
发明人： BARTLETT, Allen, J. , BALL- DILFAZIO, Doreen, J.
IPC分类号： H01L21/203 , H01L21/205
CPC分类号： B01D8/00
摘要： Cryogenic vacuum pump method for pumping a process chamber and reclaiming process gas. The valuable process gas may include a valuable gas, such as Xenon, Krypton or other rare gases, that is too expensive to be used in a once through loop of a semiconductor processing operation. The cryogenic vacuum pump has a refrigerator and a cryogenic panel in thermal contact with the refrigerator. The cryogenic vacuum pump also has a circuit. The circuit control heating to a first temperature in which a first process gas changes from a condensed phase while at least a second process gas remains in the condensed phase. The circuit also controls heating to a second temperature to reclaim the second process gas remaining in the condensed phase once the first process gas is removed.
摘要翻译：用于泵送处理室和回收工艺气体的低温真空泵方法。有价值的工艺气体可以包括贵重的气体，例如氙气，氪气或其他稀有气体，其太贵，不能用于半导体处理操作的一次循环。低温真空泵具有冰箱和与冰箱热接触的低温面板。低温真空泵也有电路。电路控制加热到第一温度，其中第一处理气体从凝聚相变化，而至少第二处理气体保留在冷凝相中。一旦除去第一处理气体，电路也将加热控制到第二温度以回收剩余在冷凝相中的第二工艺气体。

2. 发明申请

WO2012109304A3 CRYOPUMP 审中-公开
公开(公告)号：WO2012109304A3
公开(公告)日：2012-08-16
申请号：PCT/US2012/024243
申请日：2012-02-08
申请人： BROOKS AUTOMATION, INC. , SYSSOEV, Sergei , BARTLETT, Allen, J. , CASELLO, John, J. , WELLS, Jeffrey, A. , EACOBACCI, Micahel, J.
发明人： SYSSOEV, Sergei , BARTLETT, Allen, J. , CASELLO, John, J. , WELLS, Jeffrey, A. , EACOBACCI, Micahel, J.
IPC分类号： F04B37/08
摘要： A cryopump has a simple-to-manufacture frontal baffle plate with improved gas distribution and has a large-area second-stage array plate to capture Type II gases. The cryopump has a first-stage frontal baffle plate having orifices and flaps bent from and attached to the orifices. The cryopump has a second-stage top plate that is larger in area than cooling baffles of the second stage array.

3. 发明申请

WO2011143398A1 SYSTEM AND METHOD FOR CRYOGENIC COOLING 审中-公开
标题翻译：冷冻冷却系统及方法
公开(公告)号：WO2011143398A1
公开(公告)日：2011-11-17
申请号：PCT/US2011/036213
申请日：2011-05-12
申请人： BROOKS AUTOMATION, INC. , BARTLETT, Allen, J. , JOHNSON, William , COLLINS, Mark , SYSSOEV, Sergei , O'NEIL, James, A. , EACOBACCI, Michael, J., Jr.
发明人： BARTLETT, Allen, J. , JOHNSON, William , COLLINS, Mark , SYSSOEV, Sergei , O'NEIL, James, A. , EACOBACCI, Michael, J., Jr.
IPC分类号： F25B7/00 , F25B9/14
CPC分类号： F25B7/00 , F25B9/002 , F25B9/006 , F25B9/02 , F25B9/14 , F25B2400/01 , F25B2400/06 , F25B2600/0251 , F25B2600/0253 , F25B2700/21 , Y02B30/741 , Y10T279/34
摘要： In accordance with an embodiment of the invention, there is provided a system for cooling a load. The system comprises a closed loop primary refrigeration system comprising: a primary compressor taking in a primary refrigerant at a low pressure and discharging the primary refrigerant at a high pressure; an insulated enclosure comprising an inlet receiving the primary refrigerant at the high pressure from the primary compressor and an outlet returning the primary refrigerant at the low pressure to the primary compressor; at least one heat exchanger within the insulated enclosure receiving the primary refrigerant at the high pressure and cooling the primary refrigerant using a secondary refrigerant from a secondary refrigeration system, the secondary refrigerant being in heat exchange relationship with the primary refrigerant in the at least one heat exchanger; an expansion unit within the insulated enclosure receiving the primary refrigerant at the high pressure from the at least one heat exchanger and discharging the primary refrigerant at the low pressure; and a supply line delivering the primary refrigerant at the low pressure to the load and a return line returning the primary refrigerant from the load to the primary refrigeration system. The system further comprises the secondary refrigeration system, wherein the secondary refrigeration system comprises at least one secondary cryogenic refrigerator. A system control unit controls operation of at least one of the primary refrigeration system and the secondary refrigeration system to provide a variable refrigeration capacity to the load based on at least one of: a pressure of the primary refrigerant delivered to the load, and at least one temperature of the load.
摘要翻译：根据本发明的实施例，提供了一种用于冷却负载的系统。该系统包括闭环主要制冷系统，其包括：初级压缩机，其在低压下接收初级制冷剂并在高压下排出初级制冷剂; 绝缘外壳，其包括接收来自主压缩机的高压下的初级制冷剂的入口和将低压下的初级制冷剂返回到主压缩机的出口; 所述绝热壳体内的至少一个热交换器接收高压下的初级制冷剂并且使用来自二次制冷系统的二次制冷剂冷却所述初级制冷剂，所述二次制冷剂在所述至少一个热量中与所述初级制冷剂处于热交换关系器; 所述绝缘壳体内的膨胀单元接收来自所述至少一个热交换器的高压下的所述初级制冷剂，并且在所述低压下排出所述初级制冷剂; 以及将低压下的一次制冷剂输送到负载的供给管线和将一次制冷剂从负载返回到主制冷系统的返回管路。该系统还包括二次制冷系统，其中次级制冷系统包括至少一个二次低温冰箱。系统控制单元控制主要制冷系统和次级制冷系统中的至少一个的操作，以向负载提供可变的制冷能力，其基于以下至少一个：输送到负载的一次制冷剂的压力，并且至少一个温度的负载。

4. 发明申请

WO2008143766A2 INTEGRAL FACET CRYOPUMP, WATER VAPOR PUMP, OR HIGH VACUUM PUMP 审中-公开
标题翻译：整体面积CRYOPUMP，水蒸气泵或高真空泵
公开(公告)号：WO2008143766A2
公开(公告)日：2008-11-27
申请号：PCT/US2008/005567
申请日：2008-04-30
申请人： BROOKS AUTOMATION, INC. , BARTLETT, Allen, J. , KRAUS, Joseph, A. , EACOBACCI, Michael, J.
发明人： BARTLETT, Allen, J. , KRAUS, Joseph, A. , EACOBACCI, Michael, J.
IPC分类号： H01L21/00
CPC分类号： H01L21/67173 , H01L21/6719
摘要： A cluster tool has a transfer chamber, and a load lock chamber. An adaptor is configured to be coupled between the transfer chamber and the load lock chamber. The adaptor has an adaptor housing with an interior space including an entrance with a first valve and an exit with a second valve. The adaptor housing forms a substrate path through the interior space. The first valve connects the interior space and the load lock chamber. The second valve connects the interior space and the transfer chamber. A cryogenic surface is associated with the adaptor. Other pumps can be associated with the adaptor, such as, for example, a turbo pump, or water vapor pump. The cryogenic surface is configured to selectively evacuate the interior space. A wafer is adapted to be moved through the first valve and through the adaptor housing along the path. The wafer is moved through the exit and into the transfer chamber once the second valve is opened. This adaptor can be applied to the process chamber as well as the load lock.
摘要翻译：集群工具具有传送室和负载锁定室。适配器被配置为联接在传送室和装载锁定室之间。适配器具有适配器壳体，其具有包括具有第一阀的入口和具有第二阀的出口的内部空间。适配器外壳形成通过内部空间的基板路径。第一个阀连接内部空间和负载锁定室。第二个阀连接内部空间和传送室。低温表面与适配器相关联。其他泵可以与适配器相关联，例如涡轮泵或水蒸气泵。低温表面构造成有选择地排空内部空间。晶片适于沿着路径移动通过第一阀并通过适配器壳体。一旦第二个阀打开，晶片就会通过出口移动到传送室中。该适配器可以应用于处理室以及加载锁定。

5. 发明申请

WO2012122114A3 HELIUM MANAGEMENT CONTROL SYSTEM 审中-公开
公开(公告)号：WO2012122114A3
公开(公告)日：2012-09-13
申请号：PCT/US2012/027755
申请日：2012-03-05
申请人： BROOKS AUTOMATION, INC. , DUMAS, Oliver, J. , BUONPANE, Maureen, C. , BALL-DIFAZIO, Doreen, J. , MORRIS, Ronald, N. , BARTLETT, Allen, J. , LORANGER, Leonard, A. , CHOPY, Joseph, Jr. , SULLIVAN, Robert, P. , VARONE, John, J. , AMUNDSEN, Paul, E.
发明人： DUMAS, Oliver, J. , BUONPANE, Maureen, C. , BALL-DIFAZIO, Doreen, J. , MORRIS, Ronald, N. , BARTLETT, Allen, J. , LORANGER, Leonard, A. , CHOPY, Joseph, Jr. , SULLIVAN, Robert, P. , VARONE, John, J. , AMUNDSEN, Paul, E.
IPC分类号： F25B9/00
摘要： A refrigerant management system controls the supply of refrigerant from two or more variable speed and fixed speed compressors to a plurality of cryogenic refrigerators. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators. The amount of refrigerant to supply is based on an aggregate demand for refrigerant from the plurality of cryogenic refrigerators and a refrigerant correction metric. An appropriate supply of refrigerant is distributed to each cryogenic refrigerator by adjusting the speed of the variable speed compressors or, alternatively, selectively turning the compressors on or off. The speed of the variable speed compressors is adjusted by determining an amount of refrigerant to supply to the plurality of cryogenic refrigerators. If the aggregate demand for refrigerant exceeds the capacity of the compressors, then the speed of a refrigerator within the plurality of refrigerators is adjusted.

6. 发明申请

WO2012071540A2 CRYOPUMP WITH CONTROLLED HYDROGEN GAS RELEASE 审中-公开
标题翻译：控制氢气排放的CRYOPUMP
公开(公告)号：WO2012071540A2
公开(公告)日：2012-05-31
申请号：PCT/US2011/062098
申请日：2011-11-23
申请人： BROOKS AUTOMATION, INC. , EACOBACCI, Michael, J. , BARTLETT, Allen, J. , CASELLO, John, J. , WELLS, Jeffrey, A.
发明人： EACOBACCI, Michael, J. , BARTLETT, Allen, J. , CASELLO, John, J. , WELLS, Jeffrey, A.
IPC分类号： F04B37/08
CPC分类号： B01D8/00 , F04B37/08 , F04B37/14
摘要： A cryopump system includes a cryopump having a first cooling stage and a second cooling stage connected to the first cooling stage, the second cooling stage including a gas adsorber having a hydrogen adsorbing capacity of at least about 2 standard liters. The thermal storage capacity of the second cooling stage is sufficient to enable control of hydrogen pressure within the cryopump to satisfy ignition safety limits and limits on hydrogen flow rate in an exhaust line to be within limits of an abatement system to be coupled to the cryopump, upon warming of the second cooling stage during regeneration of up to a fully loaded cryopump.
摘要翻译：低温泵系统包括具有第一冷却级的冷冻泵和连接到第一冷却级的第二冷却级，第二冷却级包括具有至少约2标准升的氢吸附能力的气体吸附器。第二冷却阶段的蓄热能力足以使得能够控制低温泵内的氢气压力，以满足排气管线中的点火安全限制和氢气流量的限制，使之在与低温泵连接的减排系统的限度内，在再次达到完全负载的低温泵的第二冷却阶段变暖。

7. 发明申请

WO2011075110A1 PROCESS CHAMBER WITH INTERGRATED PUMPING 审中-公开
标题翻译：具有互相泵送的过程室
公开(公告)号：WO2011075110A1
公开(公告)日：2011-06-23
申请号：PCT/US2009/065168
申请日：2009-11-19
申请人： BROOKS AUTOMATION, INC. , BARTLETT, Allen, J.
发明人： BARTLETT, Allen, J.
IPC分类号： H01L21/00 , H01L21/02
CPC分类号： H01L21/6719
摘要： A process chamber with integrated pumping including a process chamber, refrigerators and arrays, or pumping surface, that are integral to the process chamber.
摘要翻译：具有集成泵浦的处理室，包括处理室，制冷器和阵列或泵送表面，其与处理室成一体。

8. 发明申请

WO2010011403A2 LINEAR DRIVE CRYOGENIC REFRIGERATOR 审中-公开
标题翻译：线性驱动冷冻冷冻机
公开(公告)号：WO2010011403A2
公开(公告)日：2010-01-28
申请号：PCT/US2009/044632
申请日：2009-05-20
申请人： BROOKS AUTOMATION, INC. , MORRIS, Ronald, N. , ANDEEN, Bruce, R. , BARTLETT, Allen, J.
发明人： MORRIS, Ronald, N. , ANDEEN, Bruce, R. , BARTLETT, Allen, J.
IPC分类号： F25B9/00 , F04B37/08
CPC分类号： F04B37/08 , F25B9/10 , F25B9/14 , F25B2400/073
摘要： A cryogenic refrigerator has a refrigeration cylinder and at least two displacers. Each displacer reciprocates in the refrigeration cylinder and moves refrigeration gas through the refrigeration cylinder. A regenerator cools the refrigeration gas, and gas control valves admit high pressure gas into the refrigeration cylinder and exhaust gas from the refrigeration cylinder. The refrigerator also has linear motors operatively connected to displacers, and the linear motors drive the displacers in reciprocating movement. A position sensor is provided to determine a parameter of the displacers during reciprocation. A controller is operatively connected to the linear motors to control the linear motors. The controller controls a parameter of the two displacers during reciprocation. The parameter can be stroke length, stroke speed, stroke phase or another parameter of the displacer for temperature control of the cryogenic refrigerator. The cryogenic refrigerator may also include a device to remove vibration.
摘要翻译：低温冰箱具有制冷缸和至少两个置换器。每个置换器在制冷气瓶中往复运动，并使制冷气体通过制冷气瓶。再生器冷却制冷气体，气体控制阀将制冷气瓶内的高压气体和来自制冷气瓶的废气进入。冰箱还具有可操作地连接到置换器的线性电动机，并且线性电动机以往复运动驱动置换器。提供位置传感器以在往复运动期间确定置换器的参数。控制器可操作地连接到线性电动机以控制线性电动机。控制器在往复运动期间控制两个置换器的参数。该参数可以是用于低温冰箱的温度控制的置换器的行程长度，行程速度，冲程相位或另一参数。低温冰箱还可以包括消除振动的装置。

9. 发明申请

WO2012016192A3 MULTI-REFRIGERATOR HIGH SPEED CRYOPUMP 审中-公开
公开(公告)号：WO2012016192A3
公开(公告)日：2012-02-02
申请号：PCT/US2011/045977
申请日：2011-07-29
申请人： BROOKS AUTOMATION, INC. , BARTLETT, Allen, J. , EACOBACCI, Michael, J., Jr. , SYSSOEV, Sergei
发明人： BARTLETT, Allen, J. , EACOBACCI, Michael, J., Jr. , SYSSOEV, Sergei
IPC分类号： F25B9/10
摘要： A refrigeration system includes a first refrigerator having a first cooling load at a first temperature and a second refrigerator having a second cooling load at a second temperature. Also included is a thermal coupling between the two refrigerators to share thermal load, e.g., cooling load, between the refrigerators, the coupling being restricted to maintain a difference between the first and second temperatures. A cryopump includes a first refrigerator having at least first and second stages, and a second refrigerator. A thermal coupling between the first stage of the first refrigerator and a cold end of the second refrigerator is restricted to maintain a temperature difference between the cold end of the second refrigerator and the first stage of the first refrigerator. The cryopump also includes a radiation shield in thermal contact with the cold end of the second refrigerator, and a condensing surface, spaced from and surrounded by the radiation shield, and in thermal contact with a second stage, e.g., coldest stage, of the first refrigerator. The restricted thermal coupling can be configured to balance the cooling load on the two refrigerators. The thermal coupling can be formed in a base plate of the radiation shield, the base plate having varying cross-sectional area to maintain a substantially uniform temperature at a periphery of the base plate.

10. 发明申请

WO2008088794A2 PRESSURE BURST FREE HIGH CAPACITY CRYOPUMP 审中-公开
标题翻译：压力冲击自由高容量CRYOPUMP
公开(公告)号：WO2008088794A2
公开(公告)日：2008-07-24
申请号：PCT/US2008/000497
申请日：2008-01-15
申请人： BROOKS AUTOMATION, INC. , BARTLETT, Allen, J. , DRISCOLL, Michael, A. , EACOBACCI, Michael, J., Jr. , JOHNSON, William, L. , SULLIVAN, Robert, P. , SYSSOEV, Sergei , STIRA, Mark, A. , CASELLO, John, J.
发明人： BARTLETT, Allen, J. , DRISCOLL, Michael, A. , EACOBACCI, Michael, J., Jr. , JOHNSON, William, L. , SULLIVAN, Robert, P. , SYSSOEV, Sergei , STIRA, Mark, A. , CASELLO, John, J.
CPC分类号： F04B37/08
摘要： A cryopump includes a refrigerator with at least first and second stages. A radiation shield surrounds the second stage and is in thermal contact with the first stage. The radiation shield includes a drain hole to permit cryogenic fluid to traverse through the drain hole during regeneration. The cryopump also includes a primary pumping surface supporting adsorbent in thermal contact with the second stage. The second stage array assembly includes a primary condensing surface, protected surfaces having adsorbent, and non-primary condensing surfaces. A baffle is disposed over the drain hole. The baffle redirects gas from an annular space disposed between the radiation shield and the vacuum vessel that attempts to traverse through the drain hole to prevent the gas from condensing on a non-primary condensing surface. The baffle directs gas to condense on the primary condensing surface.
摘要翻译：低温泵包括至少具有第一和第二阶段的冰箱。辐射屏蔽围绕第二级并与第一级热接触。辐射屏蔽包括排水孔，以允许低温流体在再生期间穿过排水孔。低温泵还包括支撑与第二级热接触的吸附剂的初级泵送表面。第二级阵列组件包括主冷凝表面，具有吸附剂的保护表面和非初级冷凝表面。挡板设置在排水孔上。挡板将气体从设置在辐射屏蔽和真空容器之间的环形空间重新引导，试图穿过排水孔，以防止气体在非主冷凝表面上冷凝。挡板引导气体冷凝在主冷凝表面上。

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