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    • 3. 发明申请
    • WAVEGUIDE FABRICATION
    • 波导制造
    • WO1991010931A1
    • 1991-07-25
    • PCT/GB1991000044
    • 1991-01-14
    • BRITISH TELECOMMUNICATIONS PUBLIC LIMITED COMPANYWELBOURN, Anthony, DavidSHEPHERD, John, Nicholas
    • BRITISH TELECOMMUNICATIONS PUBLIC LIMITED COMPANY
    • G02B06/12
    • G02B6/13
    • A method of fabricating an optical waveguide includes the initial step of forming a strip (3) of doped silicon in a silicon substrate (1). The substrate (1) is then subjected to a porous anodisation step, whereby the doped silicon strip (3) is converted to a porous structure. The substrate (1) is then nitrided, whereby the porous structure (3) is converted to a substantially fully-dense silicon oxynitride matrix (3'). A doped silicon region (4) is then formed around the silicon oxynitride matrix (3'). The substrate (1) is then subjected to a second anodisation step, whereby the doped region (4) is converted into a porous structure (4'). The substrate (1) is then oxidised whereby the porous structure (4') is converted to a substantially fully-dense silicon dioxide matrix. Finally, an oxide layer (5) may be formed on top of the substrate (1).
    • 制造光波导的方法包括在硅衬底(1)中形成掺杂硅的条带(3)的初始步骤。 然后将衬底(1)进行多孔阳极氧化步骤,由此将掺杂硅带(3)转化为多孔结构。 然后将衬底(1)氮化,由此将多孔结构(3)转化为基本上致密的氮氧化硅基质(3')。 然后在氮氧化硅基体(3')周围形成掺杂硅区(4)。 然后对衬底(1)进行第二阳极氧化步骤,由此将掺杂区域(4)转化为多孔结构(4')。 然后将衬底(1)氧化,由此将多孔结构(4')转化为基本上致密的二氧化硅基质。 最后,可以在衬底(1)的顶部上形成氧化物层(5)。
    • 6. 发明申请
    • OPTICAL SYSTEM
    • 光学系统
    • WO1992000538A1
    • 1992-01-09
    • PCT/GB1991001073
    • 1991-07-02
    • BRITISH TELECOMMUNICATIONS PUBLIC LIMITED COMPANYWELBOURN, Anthony, DavidGILL, Michael, Dennis
    • BRITISH TELECOMMUNICATIONS PUBLIC LIMITED COMPANY
    • G02B06/38
    • G02B6/3839G02B6/3873G02B6/3897G02B6/4249G02B6/43
    • An optical system comprises a hybrid optical motherboard (M1) having a plurality of optical interconnections formed therein, and a connector (P1). A connector region (S1) is formed in, but does not extend completely along, an edge portion of the hybrid optical motherboard (M1). The connector region (S1) contains a number of optical interconnections, and the connector (P1) contains an optical device (7). The connector (P1) is connectible to the connector region (S1) to align the optical device (7) of the connector with the optical interconnections contained in the connector region. The connector (P1) and the connector region (S1) each comprises first and second substrates (1, 2 and 11, 12) made of crystalline material and containing intersecting planes which can be delineated by etching. Each first substrate (1, 11) is formed with etched alignment groove means (3, 13), and each second substrate (2, 12) is formed with etched alignment groove means (4, 14) which are complementary to the alignment groove means of the associated first substrate. The alignment groove means (3, 13 and 4, 14) of the first and second substrates (1, 2 and 11, 12) of the connector (P1) and of the connector region (S1) are accurately aligned and contiguous when the two substrates are placed in face-to-face engagement, and the aligned contiguous alignment groove means of the connector can be accurately aligned, and be contiguous, with the aligned, contiguous alignment groove means of the connector region. The connector (P1) is provided with alignment means (5) for accurately positioning the associated optical device (7) between its two substrates (1, 12) with respect to the contiguous aligned groove means (3, 4) thereof.
    • 光学系统包括其中形成有多个光学互连的混合光学母板(M1)和连接器(P1)。 连接器区域(S1)沿着混合光学母板(M1)的边缘部分形成,但不完全延伸。 连接器区域(S1)包含多个光学互连件,并且连接器(P1)包含光学装置(7)。 连接器(P1)可连接到连接器区域(S1),以将连接器的光学装置(7)与包含在连接器区域中的光学互连对准。 连接器(P1)和连接器区域(S1)各自包括由结晶材料制成的包含可通过蚀刻描绘的交叉平面的第一和第二基板(1,2和11,12)。 每个第一基板(1,11)形成有蚀刻的对准槽装置(3,13),并且每个第二基板(2,12)形成有蚀刻的对准槽装置(4,14),其与对准槽装置 的相关联的第一衬底。 当连接器(P1)和连接器区域(S1)的第一和第二基板(1,2和11,12)和连接器区域(S1)的对准槽装置(3,13和4,14)精确对齐并连续时 基板被放置成面对面接合,并且连接器的对准的连续对准槽装置可以与连接器区域的对齐的连续对准槽装置精确对准并且邻接。 连接器(P1)设置有对准装置(5),用于相对于其相邻对准的槽装置(3,4)将相关联的光学装置(7)精确地定位在其两个基板(1,12)之间。