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1. 发明申请

WO1994025888A1 OPTICALLY GUIDED MACROSCOPIC-SCAN-RANGE/NANOMETER RESOLUTION PROBING SYSTEM 审中-公开
标题翻译：光学引导光栅扫描范围/纳米光束分辨率探测系统
公开(公告)号：WO1994025888A1
公开(公告)日：1994-11-10
申请号：PCT/US1994004624
申请日：1994-04-26
申请人： BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM
发明人： BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM , MARCHMAN, Herschel , WETSEL, Grover, C.
IPC分类号： G02B21/00
CPC分类号： G01Q60/22 , Y10S977/868
摘要： A large-nanostructure probe with optically guided macroscopic scanning is disclosed for high-resolution imaging and characterization of nanostructures. The invention contemplates the use of a coarse positioning system, which comprises one or more quadratic index fiber optic lenses (11) in conjunction with an optical microscope (12). A magnifying probe (37) is placed in close proximity to a sample under inspection. The fiber optic lenses (11) of the coarse positoning system are used to noninvasively carry the image of a sample-to-probe junction to the optical microscope (12). The optical microscope further magnifies the image, allowing for precise positioning of the probe tip to within 1 mu m of a desired feature on the sample surface. For ease to viewing, the magnified image from the microscope may be displayed on a monitor using a charge coupled device ("CCD") camera (13), if so desired. Also disclosed is a long-range probing system wherein the probe tip may be one of a variety of measurement or probing apparatus. For example, a particularly effective configuration of the long-range probing system is one in which the optical viewing system of the present invention serves as part of a coarse approach system for a scanning tunneling microscope probe.
摘要翻译：公开了具有光学引导的宏观扫描的大型纳米结构探针用于纳米结构的高分辨率成像和表征。本发明考虑使用粗定位系统，其包括与光学显微镜（12）结合的一个或多个二次折射率光纤透镜（11）。放大探头（37）放置在靠近被检样品的位置。粗定位系统的光纤透镜（11）被用来将样品 - 探针结的图像无侵入地携带到光学显微镜（12）。光学显微镜进一步放大图像，允许将探针尖端精确定位在样品表面上所需特征的1微米以内。为了便于查看，如果需要，可以使用电荷耦合器件（“CCD”）相机（13）将显微镜的放大图像显示在监视器上。还公开了一种远程探测系统，其中探针尖端可以是各种测量或探测装置之一。例如，长距离探测系统的特别有效的构造是其中本发明的光学观察系统用作扫描隧道显微镜探针的粗略方法系统的一部分。

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