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    • 3. 发明申请
    • APPARATUS
    • 仪器
    • WO2012028776A1
    • 2012-03-08
    • PCT/FI2011/050743
    • 2011-08-25
    • Beneq OySINKKO, Jari
    • SINKKO, Jari
    • C23C16/455C23C16/54
    • C23C16/545C23C16/45551
    • The present invention relates to an apparatus for processing a surface (4) of a flexible substrate (6). The apparatus comprising transport mechanism (20, 22, 24, 26, 28, 30, 8, 10) for transporting the substrate (6) and at least one nozzle head (2) comprising two or more precur- sor zones (14, 16) for subjecting the surface (4) of the substrate (6) to at least first and second precursors. Ac- cording to the invention the transport mechanism (20, 22, 24, 26, 28, 30, 8, 10) comprises a transport cylinder (8) and the nozzle head is formed as a nozzle head cylinder (2) arranged around the transport cylinder (8) for trans- porting and processing the substrate (6) between the transport cylinder (8) and the nozzle head cylinder (2).
    • 本发明涉及一种用于处理柔性基板(6)的表面(4)的装置。 该装置包括用于输送基底(6)的输送机构(20,22,24,26,28,30,8,10)和至少一个包含两个或更多个前体区(14,16)的喷嘴头 )将基板(6)的表面(4)经受至少第一和第二前体。 根据本发明,输送机构(20,22,24,26,28,30,8,10)包括输送圆筒(8),喷嘴头形成为喷嘴头圆柱体(2),该喷嘴头圆柱体 运输缸(8),用于在运输缸(8)和喷嘴头缸(2)之间输送和处理衬底(6)。