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1. 发明申请

WO2011035963A1 SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD 审中-公开
标题翻译：光谱滤光片，光刻设备和器件制造方法
公开(公告)号：WO2011035963A1
公开(公告)日：2011-03-31
申请号：PCT/EP2010/061203
申请日：2010-08-02
申请人： ASML NETHERLANDS B.V. , YAKUNIN, Andrei , BANINE, Vadim , VAN HERPEN, Maarten , SOER, Wouter , JAK, Martin
发明人： YAKUNIN, Andrei , BANINE, Vadim , VAN HERPEN, Maarten , SOER, Wouter , JAK, Martin
IPC分类号： G03F7/20 , G02B5/00 , G02B5/20
CPC分类号： G03F7/70575 , G02B5/201 , G02B5/208
摘要： A spectral purity filter, in particular for use in a lithographic apparatus using EUV radiation for the projection beam, includes a plurality of apertures in a substrate. The apertures are defined by walls having side surfaces that are inclined to the normal to a front surface of the substrate.
摘要翻译：光谱纯度滤光器，特别是在用于投影光束的EUV辐射的光刻设备中使用的光谱纯度滤光器包括衬底中的多个孔。孔由具有倾斜到基底正面的法线侧面的壁限定。

2. 发明申请

WO2010006847A1 METHOD FOR REMOVING A DEPOSITION ON AN UNCAPPED MULTILAYER MIRROR OF A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD 审中-公开
标题翻译：在地平面设备的未映射多层镜面上移除沉积物的方法，光刻设备和器件制造方法
公开(公告)号：WO2010006847A1
公开(公告)日：2010-01-21
申请号：PCT/EP2009/057097
申请日：2009-06-09
申请人： ASML NETHERLANDS B.V. , BANINE, Vadim , JAK, Martin , SOER, Wouter , VAN HERPEN, Maarten
发明人： BANINE, Vadim , JAK, Martin , SOER, Wouter , VAN HERPEN, Maarten
IPC分类号： G03F7/20
CPC分类号： G03F7/70925
摘要： A method for removal of a deposition on an uncapped multilayer mirror of an apparatus. The method includes providing a gas comprising one or more Of H 2 , D 2 and DH, and one or more additional compounds selected from hydrocarbon compounds and/or silane compounds in at least part of the apparatus; producing hydrogen and/or deuterium radicals and radicals of the one or more additional compounds, from the gas; and bringing the uncapped multilayer mirror with deposition into contact with at least part of the hydrogen and/or deuterium radicals and the radicals of the one or more additional compounds to remove at least part of the deposition.
摘要翻译：一种用于去除装置的无盖多层反射镜上的沉积的方法。该方法包括在装置的至少一部分中提供包含H 2，D 2和DH中的一种或多种的气体，以及选自烃化合物和/或硅烷化合物的一种或多种另外的化合物; 从气体产生氢和/或氘自由基和一种或多种另外的化合物的基团; 并且使具有沉积的未封盖的多层反射镜与至少部分氢和/或氘基和一种或多种另外的化合物的基团接触以除去至少部分沉积物。

3. 发明申请

WO2010007015A1 SOURCE MODULE OF AN EUV LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANUFACTURING A DEVICE 审中-公开
标题翻译： EUV光刻设备的源模块，光刻设备和制造设备的方法
公开(公告)号：WO2010007015A1
公开(公告)日：2010-01-21
申请号：PCT/EP2009/058894
申请日：2009-07-13
申请人： ASML NETHERLANDS B.V. , VAN HERPEN, Maarten , SOER, Wouter , YAKUNIN, Andrey
发明人： VAN HERPEN, Maarten , SOER, Wouter , YAKUNIN, Andrey
IPC分类号： G03F7/20 , H05G2/00
CPC分类号： G03F7/70916 , G03F7/70033 , G03F7/70191 , G03F7/70575 , G03F7/70908 , H05G2/003 , H05G2/008
摘要： A source module (10) for use in a lithographic apparatus is constructed to generate extreme ultra violet (EUV) and secondary radiation, and includes a buffer gas configured to cooperate with a source of the EUV radiation. The buffer gas has at least 50% transmission for the EUV radiation and at least 70% absorption for the secondary radiation.
摘要翻译：用于光刻设备的源模块（10）被构造成产生极紫外（EUV）和二次辐射，并且包括配置成与EUV辐射源协作的缓冲气体。缓冲气体对于EUV辐射具有至少50％的透射率，对于次级辐射具有至少70％的吸收。

4. 发明申请

WO2006103612A2 OPTICAL SYSTEM FOR MAPPING SIGNAL LIGHT ONTO A DETECTOR 审中-公开
标题翻译：用于将信号光映射到探测器的光学系统
公开(公告)号：WO2006103612A2
公开(公告)日：2006-10-05
申请号：PCT/IB2006/050917
申请日：2006-03-27
申请人： KONINKLIJKE PHILIPS ELECTRONICS N. V. , BALISTRERI, Marcello , KLUNDER, Derk, Jan, Wilfred , VAN HERPEN, Maarten
发明人： BALISTRERI, Marcello , KLUNDER, Derk, Jan, Wilfred , VAN HERPEN, Maarten
CPC分类号： G01N21/645 , G02B27/0037 , G02B27/4205 , G02B27/4277
摘要： The invention relates to an optical system that particularly allows an improved detection of signal light propagating from a light source (1) through a flat glass substrate (11). SC-modes of this signal light that would normally be totally internally reflected at the backside (10) of the substrate (11) are coupled out by a first diffractive optical element DOE (21). To map all signal light leaving the substrate (11) onto a single target location (51), a focusing lens (31) and a second DOE (41) are disposed in the optical path behind the substrate (11). The DOEs (21, 41) may for example be a ID sinusoidal grating or a 2D blaze grating. The optical system may particularly be applied in an investigation apparatus for detecting multiple spots of a fluorescent sample material.
摘要翻译：本发明涉及一种特别允许改进从光源（1）通过平板玻璃基板（11）传播的信号光的检测的光学系统。通常在基板（11）的背面（10）处内部反射的该信号光的SC模式由第一衍射光学元件DOE（21）耦合出来。为了将离开基板（11）的所有信号光映射到单个目标位置（51）上，在基板（11）后面的光路中设置聚焦透镜（31）和第二DOE（41）。 DOE（21,41）可以例如是ID正弦光栅或2D火焰光栅。光学系统可以特别应用于用于检测荧光样品材料的多个点的检查装置中。

5. 发明申请

WO2007074422A2 A NON-INVASIVE SYSTEM AND METHOD FOR MEASURING SKIN HYDRATION OF A SUBJECT 审中-公开
标题翻译：用于测量受试者皮肤水化的非入侵系统和方法
公开(公告)号：WO2007074422A2
公开(公告)日：2007-07-05
申请号：PCT/IB2006/055034
申请日：2006-12-26
申请人： KONINKLIJKE PHILIPS ELECTRONICS N.V. , VAN GOGH, Antonius , VAN HERPEN, Maarten
发明人： VAN GOGH, Antonius , VAN HERPEN, Maarten
IPC分类号： A61B5/00 , A61B5/103
CPC分类号： A61B5/0095 , A61B5/01 , A61B5/14532 , A61B5/14546 , A61B5/441 , A61B5/4869
摘要： A non- invasive system and method for measuring skin hydration of a subject comprising a thermistor (7) used in transient mode to obtain a measurement of the thermal conductivity of the skin of the subject and a processor (8) for determining a skin hydration value from the thermal conductivity measurement. The system for measuring skin hydration may be comprised in a non-invasive system for detecting blood analyte concentration, preferably glucose, including a spectroscopic device having e.g. an infrared source (2) which generates infrared beam (3) and detector (6) for detecting transmitted radiation through portion 1 (e.g. finger) of a subject. The system may also include skin hydrator (9) which moisturises the skin connected in a control loop to the system for measuring skin hydration. The system for detecting blood analyte concentration may include a photoacoustic device or a metabolic heat conformation device.
摘要翻译：一种用于测量受试者的皮肤水合的非侵入性系统和方法，包括在瞬态模式中使用的热敏电阻（7），以获得对象皮肤热导率的测量值和用于确定皮肤水合值的处理器（8）从热导率测量。用于测量皮肤水合的系统可以包含在用于检测血液分析物浓度的非侵入性系统中，优选葡萄糖，包括具有例如血液的分光装置。产生用于检测通过被摄体的部分1（例如手指）的透射辐射的红外光束（3）和检测器（6）的红外源（2）。该系统还可以包括皮肤水分器（9），其将在控制回路中连接的皮肤保湿到用于测量皮肤水合的系统。用于检测血液分析物浓度的系统可以包括光声装置或代谢热构造装置。

6. 发明申请

WO2006126152A1 GLUCOSE SENSOR 审中-公开
标题翻译：葡萄糖传感器
公开(公告)号：WO2006126152A1
公开(公告)日：2006-11-30
申请号：PCT/IB2006/051599
申请日：2006-05-19
申请人： KONINKLIJKE PHILIPS ELECTRONICS N.V. , VAN HERPEN, Maarten , BALISTRERI, Marcello , PRESURA, Cristian
发明人： VAN HERPEN, Maarten , BALISTRERI, Marcello , PRESURA, Cristian
IPC分类号： A61B5/00
CPC分类号： A61B5/1455 , A61B5/14532 , A61B5/6826 , A61B5/6838
摘要： A system for the non- invasive measurement of glucose concentration in a live subject is disclosed. The system exploits the metabolic heat conformation method, and comprises temperature sensing means for measuring the body heat in respect of the subject and means for measuring the concentration of haemoglobin and oxygenated haemoglobin in the blood of the subject. The system further comprises irradiating means for irradiating a portion of the live subject, a detector for collecting the measuring beam reflected by the live subject, means for determining from the reflected measuring beam, the blood flow velocity in respect of the live subject, and means for determining glucose concentration in the live subject as a function of the body heat, the haemoglobin and oxygenated haemoglobin concentrations and the blood flow velocity.
摘要翻译：公开了一种用于活体受试者中葡萄糖浓度无创测量的系统。该系统利用代谢热构象方法，并且包括用于测量对象的身体热量的温度感测装置和用于测量受试者血液中血红蛋白和氧合血红蛋白浓度的装置。该系统还包括用于照射活体的一部分的照射装置，用于收集由活体受体反射的测量光束的检测器，用于根据反射的测量光束确定关于活体的血流速度的装置，以及装置用于测定活体受试者中的葡萄糖浓度作为体热，血红蛋白和氧合血红蛋白浓度和血流速度的函数。

7. 发明申请

WO2006067699A1 INVESTIGATION OF BODY STRUCTURES 审中-公开
标题翻译：身体结构调查
公开(公告)号：WO2006067699A1
公开(公告)日：2006-06-29
申请号：PCT/IB2005/054261
申请日：2005-12-15
申请人： KONINKLIJKE PHILIPS ELECTRONICS N.V. , PRESURA, Cristian , VAN HERPEN, Maarten
发明人： PRESURA, Cristian , VAN HERPEN, Maarten
IPC分类号： A61B5/00
CPC分类号： A61B5/1455 , A61B5/0059 , A61B5/0095 , A61B5/02007 , A61B5/489
摘要： A pulsed radiation beam is directed toward a body structure having a configuration or physical characteristic that changes over time, the radiation being pulsed at a pulse modulation frequency. A detector detects acoustic oscillations set up in the body resultant from the incident pulsed radiation and produces an output signal representative of one or more parameters of the acoustic oscillations. A control system controls operation of the radiation delivery and a processor to process the detector output signal. The pulse modulation frequency of the pulsed radiation is changed over a predetermined range of modulation frequencies and the processor determines the structure resonant frequency from the detector output.
摘要翻译：脉冲辐射束指向具有随时间变化的配置或物理特性的体结构，辐射以脉冲调制频率脉冲。检测器检测由入射脉冲辐射产生的身体中产生的声振荡并产生表示声振荡的一个或多个参数的输出信号。控制系统控制辐射传送的操作和处理器来处理检测器输出信号。脉冲辐射的脉冲调制频率在调制频率的预定范围内改变，并且处理器从检测器输出确定结构谐振频率。

8. 发明申请

WO2006064465A2 MULTI-SPOT INVESTIGATION APPARATUS 审中-公开
标题翻译：多点调查装置
公开(公告)号：WO2006064465A2
公开(公告)日：2006-06-22
申请号：PCT/IB2005/054207
申请日：2005-12-13
申请人： KONINKLIJKE PHILIPS ELECTRONICS N. V. , KLUNDER, Derk Jan Wilfred , VAN HERPEN, Maarten , BALISTRERI, Marcello , PRINS, Menno
发明人： KLUNDER, Derk Jan Wilfred , VAN HERPEN, Maarten , BALISTRERI, Marcello , PRINS, Menno
CPC分类号： G01N21/645 , B01L3/5085 , G01N21/6452 , G01N2201/0635
摘要： The invention relates to a method and an apparatus for the investigation of a sample material that is stored in the sample chamber (303) of a storage unit (300). A multi-spot generator MSG (100) and a transmission section (200) generate an array of sample light spots (501) within the sample chamber. Input light (504) that leaves the storage unit (300) in forward direction is mapped onto a CCD array (401) and measured as reference. Moreover, fluorescence light (500) that is stimulated in the sample chamber (303) is measured by a second CCD array which is disposed perpendicular to the optical path of the input light (504).
摘要翻译：本发明涉及一种用于研究存储在存储单元（300）的样品室（303）中的样品材料的方法和装置。多点发生器MSG（100）和透射部分（200）在样品室内产生样品光点阵列（501）。将存储单元（300）向前移动的输入光（504）映射到CCD阵列（401）上并作为参考进行测量。此外，通过垂直于输入光（504）的光路设置的第二CCD阵列来测量在样品室（303）中被刺激的荧光（500）。

9. 发明申请

WO2007122557A2 NON-INVASIVE GLUCOSE SENSOR 审中-公开
标题翻译：非入侵式葡萄糖传感器
公开(公告)号：WO2007122557A2
公开(公告)日：2007-11-01
申请号：PCT/IB2007/051395
申请日：2007-04-18
申请人： PHILIPS INTELLECTUAL PROPERTY & STANDARDS GmBH , KONINKLIJKE PHILIPS ELECTRONICS N.V. , VAN HERPEN, Maarten , SUCH, Olaf , VON-BASUM, Golo
发明人： VAN HERPEN, Maarten , SUCH, Olaf , VON-BASUM, Golo
CPC分类号： A61B5/412 , A61B5/083 , A61B5/14532 , A61B5/1455
摘要： Apparatus and method for sensing HO activity, and in particular blood glucose level based on an analyte level determination, the analyte being carboxyhemoglobin. In a preferred embodiment, HO activity and/or blood glucose level are extrapolated from Hb-CO level by determining an intermediate CO level. The apparatus and method are preferably non invasive.
摘要翻译：用于感测HO活性的装置和方法，特别是基于分析物水平测定的血糖水平，所述分析物是碳氧血红蛋白。在优选的实施方案中，通过确定中间CO水平，从Hb-CO水平外推HO活性和/或血糖水平。该装置和方法优选地是非侵入性的。

10. 发明申请

WO2006126154A1 NON-INVASIVE MEASUREMENT OF BLOOD ANALYTES USING THERMAL EMISSION SPECTROSCOPY 审中-公开
标题翻译：使用热发射光谱分析血液分析仪的非侵入性测量
公开(公告)号：WO2006126154A1
公开(公告)日：2006-11-30
申请号：PCT/IB2006/051601
申请日：2006-05-19
申请人： KONINKLIJKE PHILIPS ELECTRONICS N.V. , VAN GOGH, Antonius , VAN HERPEN, Maarten , BALISTRERI, Marcello
发明人： VAN GOGH, Antonius , VAN HERPEN, Maarten , BALISTRERI, Marcello
IPC分类号： A61B5/00
CPC分类号： A61B5/14532 , A61B5/015
摘要： A system is disclosed for the non- invasive measurement of an analyte concentration in body tissue. The system comprises means (16) for detecting a thermal emission spectrum (13) emitted by the body tissue, such as a finger, and interference filtering means (11) , for spatially separating the thermal emission spectrum to create a plurality of spectral patterns and measuring in respect of each of a plurality of said spectral patterns a spectral intensity at a first, reference set of wavelengths, and a second set of wavelengths dependent on the analyte being measured. The concentration of the analyte is then determined from the spectral measurements.
摘要翻译：公开了用于非侵入性测量身体组织中的分析物浓度的系统。该系统包括用于检测诸如手指的身体组织发射的热发射光谱（13）的装置（16）和用于在空间上分离热发射光谱以产生多个光谱图案的干涉滤光装置（11）针对多个所述光谱图案中的每一个测量第一参考波长组的光谱强度，以及取决于被测量的分析物的第二组波长。然后从光谱测量确定分析物的浓度。

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