专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO2010054112A3 PLASMA RESISTANT COATINGS FOR PLASMA CHAMBER COMPONENTS 审中-公开
标题翻译：用于等离子体室部件的抗等离子体涂层
公开(公告)号：WO2010054112A3
公开(公告)日：2010-07-29
申请号：PCT/US2009063437
申请日：2009-11-05
申请人： APPLIED MATERIALS INC , SUN JENNIFER Y , HE XIAO-MING , THACH SENH
发明人： SUN JENNIFER Y , HE XIAO-MING , THACH SENH
IPC分类号： H05H1/34 , H01L21/3065
CPC分类号： H01J37/32477 , Y10T428/31678
摘要： Plasma resistant coating materials, plasma resistant coatings and methods of forming such coatings on hardware components. In one embodiment, hardware component is an electrostatic chuck (ESC) and the plasma resistant coating is formed on a surface of the ESC. The plasma resistant coatings are formed by methods other than thermal spraying to provide plasma resistant coatings having advantageous material properties.
摘要翻译：抗等离子涂层材料，抗等离子涂层和在硬件部件上形成这种涂层的方法。在一个实施例中，硬件部件是静电卡盘（ESC），并且抗等离子涂层形成在ESC的表面上。耐等离子体涂层是通过除热喷涂之外的方法形成的，以提供具有有利材料性质的抗等离子涂层。

2. 发明申请

WO03107079B1 METHOD FOR ROLL-TO-ROLL DEPOSITION OF OPTICALLY TRANSPARENT AND HIGH CONDUCTIVITY METALLIC THIN FILMS 审中-公开
标题翻译：光学透明和高电导率金属薄膜的滚动沉积方法
公开(公告)号：WO03107079B1
公开(公告)日：2004-10-07
申请号：PCT/US0318755
申请日：2003-06-12
申请人： AVERY DENNISON CORP , HE XIAO-MING , HEYDARPOUR RAMIN
发明人： HE XIAO-MING , HEYDARPOUR RAMIN
IPC分类号： G02F1/1343 , H01B1/02 , H01B1/08 , B32B9/04
CPC分类号： C23C14/562 , B29D11/0073 , C23C14/022 , C23C14/08 , C23C14/205 , G02F1/133305 , G02F1/13439 , H01B1/02 , H01B1/08 , H05K1/0393 , H05K3/381 , H05K2201/0338 , H05K2203/095 , H05K2203/1545 , Y10T428/31504
摘要： Methods for roll-to-roll deposition of optically transparent and high conductivity metallic thin films are disclosed. In general, a method according to the present invention comprises: (1) providing a flexible plastic substrate; (2) depositing a multi-layered conductive metallic film on the flexible plastic substrate by a thin-film deposition technique to form a composite film; and (3) collecting the composite film in continuous rolls. Typically, the thin conductive metallic film is an InCeO-Ag-InCeO film. Typically, the thin-film deposition technique is DC magnetron sputtering. Another aspect of the invention is a composite film produced by a method according to the present invention. Still another aspect of the invention is a composite film comprising InCeO-Ag-InCeO film formed on a flexible plastic substrate, wherein the composite fillm has a combination of properties including: transmittance of at least 90% throughout the visible region; an electrical resistance of no greater than about 10 ohm/square; a root-mean-square roughness of no greater than about 2.5 nm; and an interlayer adhesion between the InCeO/Ag/InCeO metallic film and the remainder of the composite film that is sufficiently great to survive a 180° peel adhesion test.
摘要翻译：公开了光学透明和高导电性金属薄膜的卷对卷沉积的方法。通常，根据本发明的方法包括：（1）提供柔性塑料基板; （2）通过薄膜沉积技术在柔性塑料基板上沉积多层导电金属膜以形成复合膜; 和（3）将复合膜收集在连续辊中。通常，薄导电金属膜是InCeO-Ag-InCeO膜。通常，薄膜沉积技术是直流磁控溅射。本发明的另一方面是通过根据本发明的方法制造的复合膜。本发明的另一方面是一种复合膜，其包括在柔性塑料基材上形成的InCeO-Ag-InCeO膜，其中复合填料具有以下特性的组合，包括：透过整个可见区域至少90％的透射率; 电阻不大于约10欧姆/平方; 均方根粗糙度不大于约2.5nm; 以及InCeO / Ag / InCeO金属膜与复合膜的剩余部分之间的层间粘合，其足够大以承受180°剥离粘合试验。

3. 发明申请

WO03107079A9 METHOD FOR ROLL-TO-ROLL DEPOSITION OF OPTICALLY TRANSPARENT AND HIGH CONDUCTIVITY METALLIC THIN FILMS 审中-公开
标题翻译：光学透明和高导电性金属薄膜的卷对卷沉积方法
公开(公告)号：WO03107079A9
公开(公告)日：2004-03-04
申请号：PCT/US0318755
申请日：2003-06-12
申请人： AVERY DENNISON CORP , HE XIAO-MING , HEYDARPOUR RAMIN
发明人： HE XIAO-MING , HEYDARPOUR RAMIN
IPC分类号： G02F1/1343 , H01B1/02 , H01B1/08 , G02F
CPC分类号： C23C14/562 , B29D11/0073 , C23C14/022 , C23C14/08 , C23C14/205 , G02F1/133305 , G02F1/13439 , H01B1/02 , H01B1/08 , H05K1/0393 , H05K3/381 , H05K2201/0338 , H05K2203/095 , H05K2203/1545 , Y10T428/31504
摘要： Methods for roll-to-roll deposition of optically transparent and high conductivity metallic thin films are disclosed. In general, a method according to the present invention comprises: (1) providing a flexible plastic substrate; (2) depositing a multi-layered conductive metallic film on the flexible plastic substrate by a thin-film deposition technique to form a composite film; and (3) collecting the composite film in continuous rolls. Typically, the thin conductive metallic film is an InCeO-Ag-InCeO film. Typically, the thin-film deposition technique is DC magnetron sputtering. Another aspect of the invention is a composite film produced by a method according to the present invention. Still another aspect of the invention is a composite film comprising InCeO-Ag-InCeO film formed on a flexible plastic substrate, wherein the composite fillm has a combination of properties including: transmittance of at least 90% throughout the visible region; an electrical resistance of no greater than about 10 ohm/square; a root-mean-square roughness of no greater than about 2.5 nm; and an interlayer adhesion between the InCeO/Ag/InCeO metallic film and the remainder of the composite film that is sufficiently great to survive a 180° peel adhesion test.
摘要翻译：公开了用于辊对辊沉积光学透明和高导电率金属薄膜的方法。通常，根据本发明的方法包括：（1）提供柔性塑料衬底; （2）通过薄膜沉积技术在柔性塑料基板上沉积多层导电金属膜以形成复合膜; 和（3）以连续辊收集复合膜。通常，薄导电金属膜是InCeO-Ag-InCeO膜。通常，薄膜沉积技术是DC磁控溅射。本发明的另一方面是通过根据本发明的方法制造的复合膜。本发明的又一方面是一种复合薄膜，其包含在柔性塑料基材上形成的InCeO-Ag-InCeO薄膜，其中所述复合填充物具有以下特性的组合：在整个可见光区域的透射率为至少90％不大于约10欧姆/平方的电阻; 不大于约2.5nm的均方根粗糙度; 以及InCeO / Ag / InCeO金属膜与复合膜的其余部分之间的层间粘合性，其足以经受180°剥离粘合性测试。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式