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1. 发明申请

WO2013070917A1 APPARATUS AND METHOD TO MEASURE TEMPERATURE OF 3D SEMICONDUCTOR STRUCTURES VIA LASER DIFFRACTION 审中-公开
标题翻译：通过激光衍射测量三维半导体结构温度的装置和方法
公开(公告)号：WO2013070917A1
公开(公告)日：2013-05-16
申请号：PCT/US2012/064153
申请日：2012-11-08
申请人： APPLIED MATERIALS, INC. , PAN, Heng , ROGERS, Matthew Scott , HUNTER, Aaron Muir , MOFFATT, Stephen
发明人： PAN, Heng , ROGERS, Matthew Scott , HUNTER, Aaron Muir , MOFFATT, Stephen
IPC分类号： H01L21/66
CPC分类号： G01J5/08 , G01J5/0007 , G01J5/0803 , G01J2005/0074 , G01J2005/0077
摘要： Embodiments of the present invention generally relate to apparatus for and methods of measuring and monitoring the temperature of a substrate having a 3D feature thereon. The apparatus include a light source for irradiating a substrate having a 3D feature thereon, a focus lens for gathering and focusing reflected light, and an emissometer for detecting the emissivity of the focused reflected light. The apparatus may also include a beam splitter and an imaging device. The imaging device provides a magnified image of the diffraction pattern of the reflected light. The method includes irradiating a substrate having a 3D feature thereon with light, and focusing reflected light with a focusing lens. The focused light is then directed to a sensor and the emissivity of the substrate is measured. The reflected light may also impinge upon an imaging device to generate a magnified image of the diffraction pattern of the reflected light.
摘要翻译：本发明的实施例一般涉及用于测量和监测其上具有3D特征的基板的温度的方法的装置。该装置包括用于照射其上具有3D特征的基板的光源，用于聚焦和聚焦反射光的聚焦透镜，以及用于检测聚焦反射光的发射率的发射计。该装置还可以包括分束器和成像装置。成像装置提供反射光的衍射图案的放大图像。该方法包括用光照射具有3D特征的基板，并且将聚焦透镜聚焦在反射光上。然后将聚焦的光导向传感器，并测量衬底的发射率。反射光也可能撞击成像装置以产生反射光的衍射图案的放大图像。

2. 发明申请

WO2014022184A1 APPARATUS AND METHOD FOR SELECTIVE OXIDATION AT LOWER TEMPERATURE USING REMOTE PLASMA SOURCE 审中-公开
标题翻译：使用远程等离子体源在较低温度下选择性氧化的装置和方法
公开(公告)号：WO2014022184A1
公开(公告)日：2014-02-06
申请号：PCT/US2013/051985
申请日：2013-07-25
申请人： APPLIED MATERIALS, INC. , PAN, Heng , ROGERS, Matthew Scott , TJANDRA, Agus S. , OLSEN, Christopher S.
发明人： PAN, Heng , ROGERS, Matthew Scott , TJANDRA, Agus S. , OLSEN, Christopher S.
IPC分类号： H01L21/324 , H01L21/02
CPC分类号： H01L21/02238 , H01L21/02068 , H01L21/02164 , H01L21/02252
摘要： Devices and methods for selectively oxidizing silicon are described herein. An apparatus for selective oxidation of exposed silicon surfaces includes a thermal processing chamber with a plurality of walls, first inlet connection and a second inlet connection, wherein the walls define a processing region within the processing chamber, a substrate support within the processing chamber, a hydrogen source connected with the first inlet connection, a heat source connected with the hydrogen source, and a remote plasma source connected with the second inlet connection and an oxygen source. A method for selective oxidation of non-metal surfaces, can include positioning a substrate in a processing chamber at a temperature less than 800°C, flowing hydrogen into the processing chamber, generating a remote plasma comprising oxygen, mixing the remote plasma with the hydrogen gas in the processing chamber to create an activated processing gas, and exposing the substrate to the activated gas.
摘要翻译：本文描述了用于选择性氧化硅的装置和方法。用于暴露的硅表面的选择性氧化的设备包括具有多个壁的热处理室，第一入口连接和第二入口连接，其中壁限定处理室内的处理区域，处理室内的衬底支撑件，与第一入口连接的氢源，与氢源连接的热源以及与第二入口连接和氧源连接的远程等离子体源。用于非金属表面的选择性氧化的方法可以包括将基底定位在温度低于800℃的处理室中，将氢气流入处理室，产生包含氧的远程等离子体，将远程等离子体与氢处理室中的气体以产生活化的处理气体，并将基板暴露于活化气体。

3. 发明申请

WO2008076617A2 SYSTEMS AND METHODS FOR INCREASING MOBILITY IN FIXED WIDEBAND WIRELESS APPLICATIONS 审中-公开
标题翻译：用于增加固定宽带无线应用中的移动性的系统和方法
公开(公告)号：WO2008076617A2
公开(公告)日：2008-06-26
申请号：PCT/US2007/086228
申请日：2007-12-03
申请人： ADAPTIX, INC. , PAN, Heng , LIU, Shuxin
发明人： PAN, Heng , LIU, Shuxin
IPC分类号： H04Q7/00
CPC分类号： H04W28/16 , H04W36/08 , H04W48/20
摘要： By arranging base stations in a wireless protocol with an ability to handle air interface transmissions on a class of service basis, as opposed to a specific station identification basis, mobility across base stations is achieved. In one embodiment, each station is assigned a class of service and each station can connect to any base station that recognizes that station's class of service. Class of service could, for example, be based on throughput required, fees paid by the station, etc. hi this manner, the base station need only know the class of service of a station and then can extend service to that station or not based on factors controlled from each base station, hi one embodiment, the class of service information provided with the 802.16f management model is used to verify the class of service of a station and to update base stations.
摘要翻译：通过将基站安排在具有处理基于服务等级的空中接口传输的能力的无线协议中，与特定的站识别基础相反，实现跨越基站的移动性。在一个实施例中，每个站被分配一类服务，并且每个站可以连接到识别该站的服务类别的任何基站。例如，服务等级可以基于所需的吞吐量，由电台支付的费用等。以这种方式，基站只需要知道电台的服务等级，然后可以将服务扩展到该电台或不基于在由一个基站控制的因素上。在一个实施例中，随802.16f管理模型提供的服务类别信息用于验证一个站的服务等级并更新基站。

4. 发明申请

WO2011044462A1 SYSTEM, METHOD AND DEVICE TO INTERROGATE FOR THE PRESENCE OF OBJECTS 审中-公开
标题翻译：系统，方法和装置，以便存在对象
公开(公告)号：WO2011044462A1
公开(公告)日：2011-04-14
申请号：PCT/US2010/051977
申请日：2010-10-08
申请人： LOGAN, James, D. , FORM, Michael, A. , PAN, Heng , CALL, Charles, G. , TANPITUKPONGSE, Teeporn Paul , LOGAN, Jeffrey , OPALACZ, Daniel
发明人： LOGAN, James, D. , FORM, Michael, A. , PAN, Heng , CALL, Charles, G. , TANPITUKPONGSE, Teeporn Paul , LOGAN, Jeffrey , OPALACZ, Daniel
IPC分类号： G08B13/14
CPC分类号： H04W4/02 , G08B21/025 , G08B21/0275 , G08B21/18 , G08B21/22 , H04Q9/00 , H04Q2209/43 , H04Q2209/823
摘要： A system, method and device to interrogate for the presence of objects, to prevent the inadvertent separation of the objects from their owner. An owner is alerted when they are separated from the objects by determining when a trigger event occurs, such as a person leaving and/or entering a particular monitored area or location. These monitored areas can be retrofitted with an electronic interrogation device that monitors local conditions to determine whether a user is entering or leaving the monitored area to trigger an interrogation of the personal items. The interrogation device is constructed and arranged to communicate with the objects to determine whether the objects are with the owner. The interrogation device automatically determines the presence of a particular object at the monitored environment and automatically generates a notification when needed. The system further controls functionality of the objects, according to illustrative embodiments, when the object is present.
摘要翻译：用于询问物体存在的系统，方法和装置，以防止物体与其所有者的无意分离。通过确定触发事件何时发生，例如离开和/或进入特定监视区域或位置的人员，当所有者与对象分离时，将向其发出警报。这些监控区域可以用电子询问装置进行改装，该装置监视当地状况以确定用户是否进入或离开被监视区域以触发个人物品的询问。询问装置被构造和布置成与对象通信以确定对象是否与所有者一起。询问设备自动确定特定对象在受监视环境中的存在，并在需要时自动生成通知。根据说明性实施例，当对象存在时，系统进一步控制对象的功能。

5. 发明申请

WO2008076626A1 SYSTEMS AND METHODS FOR ALLOWING IP ADDRESS HANDOFF FOR MOBILE DEVICES 审中-公开
标题翻译：允许用于移动设备的IP地址转换的系统和方法
公开(公告)号：WO2008076626A1
公开(公告)日：2008-06-26
申请号：PCT/US2007/086336
申请日：2007-12-04
申请人： ADAPTIX, INC. , PAN, Heng , LIU, Shuxin , FANG, Guichang
发明人： PAN, Heng , LIU, Shuxin , FANG, Guichang
IPC分类号： H04Q7/20
CPC分类号： H04W8/087 , H04W8/26 , H04W36/08 , H04W76/10 , H04W80/04
摘要： The present invention is directed to a system and method which mobile devices can be handed from one access point to another while maintaining continuous communication with a network and without changing the device's IP address. In an embodiment, when a device is leaving the air interface range of its home access point, it establishes a connection with an intermediary access point. In an embodiment, the communications from the network are directed to the original access point using the original IP address for the device, and forwarded to the device via the intermediary access point. Communications from the device are routed through the intermediary access point and then either directly to the network, or else through the home access point to the network. The IP address handoff is repeated between intermediary access points until the device either returns to the home access point or ceases communication with the network.
摘要翻译：本发明涉及一种系统和方法，其中移动设备可以从一个接入点切换到另一个接入点，同时保持与网络的连续通信，而不改变设备的IP地址。在一个实施例中，当设备离开其归属接入点的空中接口范围时，它建立与中间接入点的连接。在一个实施例中，来自网络的通信使用设备的原始IP地址被引导到原始接入点，并且经由中间接入点转发到设备。来自设备的通信通过中间接入点路由，然后直接到网络，或者通过到家庭接入点的网络。在中间接入点之间重复IP地址切换，直到设备返回家庭接入点或停止与网络的通信。

6. 发明申请

WO2008073735A2 SYSTEM AND METHOD FOR MANAGING WIRELESS BASE STATION HANDOFF INFORMATION 审中-公开
标题翻译：用于管理无线基站切换信息的系统和方法
公开(公告)号：WO2008073735A2
公开(公告)日：2008-06-19
申请号：PCT/US2007/086241
申请日：2007-12-03
申请人： ADAPTIX, INC. , ZHANG, Cheng , PAN, Heng , YIN, Yanjun
发明人： ZHANG, Cheng , PAN, Heng , YIN, Yanjun
IPC分类号： H04Q7/00
CPC分类号： H04W36/0083
摘要： The present invention is directed to a system and method which base stations send informational messages to neighbor base stations when conditions change, so that the neighbor base stations can update its database to keep itself current on the parameters (including availability, traffic load, modulation scheme, etc.) to use in effecting efficient base station to base station handoffs. In one embodiment, the receiving base station marks the time of the received message from a neighbor base station and if a new updated message is not received within a time window then the receiving base station assumes that there is a problem with that neighbor.
摘要翻译：本发明涉及一种系统和方法，当条件改变时，基站向相邻基站发送信息消息，使得邻近基站可以更新其数据库以保持自身最新的参数（包括可用性，业务负载，调制方案等）用于实现有效的基站到基站切换。在一个实施例中，接收基站标记来自相邻基站的接收到的消息的时间，并且如果在时间窗口内没有接收到新的更新的消息，则接收基站假设该邻居存在问题。

7. 发明申请

WO2015009447A1 SUBSTRATE SUPPORT RING FOR MORE UNIFORM LAYER THICKNESS 审中-公开
标题翻译：基座支撑环更均匀的厚度
公开(公告)号：WO2015009447A1
公开(公告)日：2015-01-22
申请号：PCT/US2014/045112
申请日：2014-07-01
申请人： APPLIED MATERIALS, INC.
发明人： PAN, Heng , HAWRYLCHAK, Lara , OLSEN, Christopher, S.
IPC分类号： H01L21/683
CPC分类号： H01L21/02274 , H01L21/67248 , H01L21/68735
摘要： Embodiments of substrate support rings providing more uniform thickness of layers deposited or grown on a substrate are provided herein. In some embodiments, a substrate support ring includes: an inner ring with a centrally located support surface to support a substrate; and an outer ring extending radially outward from the support surface, wherein the outer ring comprises a reaction surface area disposed above and generally parallel to a support plane of the support surface, and wherein the reaction surface extends beyond the support surface by about 24 mm to about 45 mm.
摘要翻译：本文提供了在衬底上提供沉积或生长的层的更均匀厚度的衬底支撑环的实施例。在一些实施例中，衬底支撑环包括：具有中心定位的支撑表面以支撑衬底的内环; 以及从所述支撑表面径向向外延伸的外环，其中所述外环包括设置在所述支撑表面的支撑平面上方并且大致平行于所述支撑表面的支撑平面的反应表面区域，并且其中所述反应表面延伸超过所述支撑表面约24mm至约45毫米。

8. 发明申请

WO2014065955A1 MINIMAL CONTACT EDGE RING FOR RAPID THERMAL PROCESSING 审中-公开
标题翻译：用于快速热处理的最小接头边缘
公开(公告)号：WO2014065955A1
公开(公告)日：2014-05-01
申请号：PCT/US2013/060002
申请日：2013-09-16
申请人： APPLIED MATERIALS, INC.
发明人： PAN, Heng , TALLAVARJULA, Sairaju , BAUTISTA, Kevin J. , TOBIN, Jeffrey
IPC分类号： H01L21/683 , H01L21/324
CPC分类号： H01L21/6835 , H01L21/67115 , H01L21/67248 , H01L21/68735
摘要： Embodiments of the disclosure generally relate to a support ring that supports a substrate in a process chamber. In one embodiment, the support ring comprises an inner ring, an outer ring connecting to an outer perimeter of the inner ring through a flat portion, an edge lip extending radially inwardly from an inner perimeter of the inner ring to form a supporting ledge, and a substrate support extending upwardly from a top surface of the edge lip. The substrate support may be a continuous ring-shaped body disposed around a circumference of the edge lip. The substrate support supports a substrate about its entire periphery from the back side with minimized contact surface to thermally disconnect the substrate from the edge lip. Particularly, the substrate support provides a substantial line contact with the back surface of the substrate.
摘要翻译：本公开的实施例一般涉及在处理室中支撑衬底的支撑环。在一个实施例中，支撑环包括内环，通过平坦部分连接到内环的外周边的外环，从内环的内周径向向内延伸以形成支撑凸缘的边缘，以及从边缘唇缘的上表面向上延伸的基底支撑件。衬底支撑件可以是围绕边缘唇缘的圆周设置的连续环形体。衬底支撑件从背面围绕其整个周边支撑衬底，具有最小化的接触表面，以使衬底与边缘唇缘热断开。特别地，衬底支撑件提供与衬底的背面的实质的线接触。

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